Wafer holder for manufacturing semiconductor

- TOKYO ELECTRON LIMITED
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Description

FIG. 1 is a front view of a wafer holder for manufacturing semiconductor showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a front perspective view thereof;

FIG. 8 is an enlarged cross sectional view taken along line 8-8 in FIG. 1;

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 1; and,

FIG. 10 is another front perspective view of FIG. 1 shown in a used condition with wafers shown in broken lines.

The features shown in dotted lines depict environmental subject matter only and form no part of the claimed design.

Claims

The ornamental design for a wafer holder for manufacturing semiconductor, as shown and described.

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Patent History
Patent number: D766850
Type: Grant
Filed: Sep 12, 2014
Date of Patent: Sep 20, 2016
Assignee: TOKYO ELECTRON LIMITED (Minato-ku, Tokyo)
Inventors: Eisuke Morisaki (Nirasaki), Wataru Machiyama (Nirasaki), Hirokatsu Kobayashi (Nirasaki), Masayuki Harashima (Nirasaki), Yukio Sano (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/502,191