Wafer holder for manufacturing semiconductor
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The features shown in dotted lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for a wafer holder for manufacturing semiconductor, as shown and described.
| D589474 | March 31, 2009 | Ogasawara |
| D589912 | April 7, 2009 | Ogasawara |
| 7582166 | September 1, 2009 | Lampe |
| 7644968 | January 12, 2010 | Hirooka |
| D609652 | February 9, 2010 | Nagasaka |
| D614593 | April 27, 2010 | Lee |
| D616394 | May 25, 2010 | Sato |
| D616395 | May 25, 2010 | Sato |
| D654883 | February 28, 2012 | Honma |
| D654884 | February 28, 2012 | Honma |
| D655257 | March 6, 2012 | Honma |
| D655259 | March 6, 2012 | Honma |
| D674366 | January 15, 2013 | Kajiwara |
| D674759 | January 22, 2013 | Chang |
| D674761 | January 22, 2013 | Iida |
| D684551 | June 18, 2013 | Nguyen |
| D686175 | July 16, 2013 | Gurary |
| D703162 | April 22, 2014 | Tamaso |
| D716742 | November 4, 2014 | Jang |
| D723077 | February 24, 2015 | Sakata |
| D724553 | March 17, 2015 | Choi |
| D734730 | July 21, 2015 | Yoshida |
| D737785 | September 1, 2015 | Yoshida |
| D738329 | September 8, 2015 | Yoshida |
| 9167625 | October 20, 2015 | Shero |
| D747279 | January 12, 2016 | Yoshida |
| D753269 | April 5, 2016 | Yamagishi |
| 20050193952 | September 8, 2005 | Goodman |
Type: Grant
Filed: Sep 12, 2014
Date of Patent: Sep 20, 2016
Assignee: TOKYO ELECTRON LIMITED (Minato-ku, Tokyo)
Inventors: Eisuke Morisaki (Nirasaki), Wataru Machiyama (Nirasaki), Hirokatsu Kobayashi (Nirasaki), Masayuki Harashima (Nirasaki), Yukio Sano (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/502,191