Wafer holder for manufacturing semiconductor
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The features shown in dotted lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for a wafer holder for manufacturing semiconductor, as shown and described.
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Type: Grant
Filed: Sep 12, 2014
Date of Patent: Sep 20, 2016
Assignee: TOKYO ELECTRON LIMITED (Minato-ku, Tokyo)
Inventors: Eisuke Morisaki (Nirasaki), Wataru Machiyama (Nirasaki), Hirokatsu Kobayashi (Nirasaki), Masayuki Harashima (Nirasaki), Yukio Sano (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/502,191