Dummy wafer

- Tokyo Electron Limited
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Description

FIG. 1 is a top plan view of a dummy wafer showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is an enlarged portion view taken along lines 3-3 in FIG. 1;

FIG. 4 is a cross-sectional view taken along line 4-4 in FIG. 3; and,

FIG. 5 is a cross-sectional view taken along line 5-5 in FIG. 3.

The broken lines shown in the drawings represent portions of the dummy wafer that form no part of the claimed design. Right, left and back views of the dummy wafer shown in FIG. 1 have been omitted because they are the same as the front view. The bottom view of the dummy wafer shown in FIG. 1 has been omitted because it forms no part of the claimed design.

Claims

The ornamental design for a dummy wafer, as shown and described.

Referenced Cited
U.S. Patent Documents
198816 January 1878 Robinson
415734 November 1889 Randall
1769409 July 1930 Armstrong
D92994 August 1934 Aaronson
D122735 September 1940 Christen
D133264 August 1942 Perkins
D179747 February 1957 Sylvester et al.
4244761 January 13, 1981 Remi
4374906 February 22, 1983 Breault et al.
D273582 April 24, 1984 Bolt
D273860 May 15, 1984 Bolt
4450212 May 22, 1984 Feigenbaum et al.
4460634 July 17, 1984 Hasegawa
D308247 May 29, 1990 Adam
D320361 October 1, 1991 Karasawa
5458938 October 17, 1995 Nygard et al.
5514439 May 7, 1996 Sibley
5662758 September 2, 1997 Hamilton et al.
5766702 June 16, 1998 Lin
5773110 June 30, 1998 Shields
5804281 September 8, 1998 Phan et al.
5853840 December 29, 1998 Saito et al.
D417235 November 30, 1999 Malik et al.
D425113 May 16, 2000 Kleman et al.
6150023 November 21, 2000 Yasaka et al.
6340514 January 22, 2002 Kerr et al.
6550092 April 22, 2003 Brown et al.
6589631 July 8, 2003 Suzuki et al.
6610390 August 26, 2003 Kauschke et al.
D483187 December 9, 2003 Cheng
D508180 August 9, 2005 Sneed
6988942 January 24, 2006 Chen et al.
7030046 April 18, 2006 Wong et al.
D540272 April 10, 2007 Higashibata
D544452 June 12, 2007 Nakamura et al.
D552565 October 9, 2007 Nakamura et al.
D562568 February 26, 2008 Johnston et al.
7462094 December 9, 2008 Yoshida et al.
D589472 March 31, 2009 Li
D589473 March 31, 2009 Takamoto
D598380 August 18, 2009 Kuriki
7572173 August 11, 2009 Huang et al.
7632170 December 15, 2009 O'Moore et al.
D609652 February 9, 2010 Nagasaka et al.
D621804 August 17, 2010 Sip
D633672 March 1, 2011 McKnight
D633673 March 1, 2011 McKnight
D651991 January 10, 2012 Nishiguchi
D651992 January 10, 2012 Nishiguchi
D655256 March 6, 2012 Nishiguchi
D670917 November 20, 2012 Blackford
D674759 January 22, 2013 Chang et al.
D676672 February 26, 2013 Lee
D677062 March 5, 2013 Lee
D684551 June 18, 2013 Nguyen
D686175 July 16, 2013 Gurary et al.
D686582 July 23, 2013 Krishnan et al.
D690671 October 1, 2013 Gurary et al.
D695241 December 10, 2013 Gurary et al.
D699201 February 11, 2014 Petsch
D699908 February 18, 2014 Fang
D703162 April 22, 2014 Tamaso
D704155 May 6, 2014 Chang et al.
D720313 December 30, 2014 Flynn et al.
D733960 July 7, 2015 Howe
D739363 September 22, 2015 Sharma
D740035 October 6, 2015 Teherani
D751999 March 22, 2016 Sharma
D761745 July 19, 2016 Shinkai
D766850 September 20, 2016 Morisaki et al.
D768115 October 4, 2016 Kazanchian
20050170616 August 4, 2005 Murata et al.
20060079160 April 13, 2006 Balagani et al.
20090247057 October 1, 2009 Kobayashi et al.
Other references
  • U.S. Appl. No. 29/524,897, filed Apr. 24, 2015, Tokyo Electron Limited.
  • U.S. Appl. No. 29/524,898, filed Apr. 24, 2015, Tokyo Electron Limited.
Patent History
Patent number: D786810
Type: Grant
Filed: Apr 24, 2015
Date of Patent: May 16, 2017
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yutaka Motoyama (Iwate), Kohei Fukushima (Iwate)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/524,912