Elastic membrane for semiconductor wafer polishing
Latest EBARA CORPORATION Patents:
The portions of the elastic membrane shown in even broken lines form no part of the claimed design. The dashed-dot lines in the drawings represent the boundary lines of the claimed design. The box labeled
Claims
The ornamental design for an elastic membrane for semiconductor wafer polishing, as shown and described.
D363464 | October 24, 1995 | Fukasawa |
D411516 | June 29, 1999 | Imafuku et al. |
6183354 | February 6, 2001 | Zuniga |
6659850 | December 9, 2003 | Korovin et al. |
6890402 | May 10, 2005 | Gunji |
7033260 | April 25, 2006 | Togawa |
D546784 | July 17, 2007 | Hayashi |
D553104 | October 16, 2007 | Oohashi et al. |
D557226 | December 11, 2007 | Uchino et al. |
D559993 | January 15, 2008 | Nagakubo et al. |
D559994 | January 15, 2008 | Nagakubo et al. |
7357699 | April 15, 2008 | Togawa |
7402098 | July 22, 2008 | Severson |
D633452 | March 1, 2011 | Namiki et al. |
D634719 | March 22, 2011 | Yasuda et al. |
D649126 | November 22, 2011 | Takahashi |
8469776 | June 25, 2013 | Zuniga et al. |
D709536 | July 22, 2014 | Yoshimura et al. |
D709538 | July 22, 2014 | Mizukami |
D709539 | July 22, 2014 | Kuwabara et al. |
D711330 | August 19, 2014 | Fukushima et al. |
8859070 | October 14, 2014 | Yasuda et al. |
8932106 | January 13, 2015 | Fukushima |
8939817 | January 27, 2015 | Son |
D729753 | May 19, 2015 | Fukushima et al. |
9376752 | June 28, 2016 | Goel et al. |
D767234 | September 20, 2016 | Kirkland et al. |
D769200 | October 18, 2016 | Fukushima et al. |
D770990 | November 8, 2016 | Fukushima et al. |
D770992 | November 8, 2016 | Tauchi et al. |
D783922 | April 11, 2017 | Kirkland |
D797067 | September 12, 2017 | Zhang et al. |
D808349 | January 23, 2018 | Fukushima et al. |
D810705 | February 20, 2018 | Krishnan et al. |
D813180 | March 20, 2018 | Fukushima |
D839224 | January 29, 2019 | Yamaki |
D859331 | September 10, 2019 | Yamamoto |
D859332 | September 10, 2019 | Yamaki |
20010029158 | October 11, 2001 | Sasaki |
20020160693 | October 31, 2002 | Nihonmatsu |
20030171076 | September 11, 2003 | Moloney |
20040175951 | September 9, 2004 | Chen |
20050215182 | September 29, 2005 | Fuhriman |
20070063453 | March 22, 2007 | Ishikawa |
20080070479 | March 20, 2008 | Nabeya |
20080119119 | May 22, 2008 | Zuniga |
20090068934 | March 12, 2009 | Hong |
20090111362 | April 30, 2009 | Nabeya |
20090247057 | October 1, 2009 | Kobayashi et al. |
20130316628 | November 28, 2013 | Jang |
20140262193 | September 18, 2014 | Im et al. |
20160002788 | January 7, 2016 | Nal et al. |
20170009367 | January 12, 2017 | Harris |
Type: Grant
Filed: Dec 10, 2018
Date of Patent: Mar 23, 2021
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Satoru Yamaki (Tokyo), Makoto Fukushima (Tokyo), Keisuke Namiki (Tokyo), Osamu Nabeya (Tokyo), Shingo Togashi (Tokyo), Tomoko Owada (Tokyo), Masahiko Kishimoto (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/672,852