Elastic membrane for semiconductor wafer polishing

- EBARA CORPORATION
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a bottom perspective view of an elastic membrane for semiconductor wafer polishing showing our new design;

FIG. 2 is a top perspective view thereof;

FIG. 3 is a bottom view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a front view thereof, rear view being identical;

FIG. 6 is a right-side view thereof, left-side view being identical;

FIG. 7 is a cross-sectional view taken along line 7-7 of FIG. 4; and,

FIG. 8 is an enlarged portion view labeled FIG. 8 in FIG. 7.

The portions of the elastic membrane shown in even broken lines form no part of the claimed design. The dashed-dot lines in the drawings represent the boundary lines of the claimed design. The box labeled FIG. 8 shown in even broken lines in FIG. 7 defines the enlarged portion view of FIG. 8.

Claims

The ornamental design for an elastic membrane for semiconductor wafer polishing, as shown and described.

Referenced Cited
U.S. Patent Documents
D363464 October 24, 1995 Fukasawa
D411516 June 29, 1999 Imafuku et al.
6183354 February 6, 2001 Zuniga
6659850 December 9, 2003 Korovin et al.
6890402 May 10, 2005 Gunji
7033260 April 25, 2006 Togawa
D546784 July 17, 2007 Hayashi
D553104 October 16, 2007 Oohashi et al.
D557226 December 11, 2007 Uchino et al.
D559993 January 15, 2008 Nagakubo et al.
D559994 January 15, 2008 Nagakubo et al.
7357699 April 15, 2008 Togawa
7402098 July 22, 2008 Severson
D633452 March 1, 2011 Namiki et al.
D634719 March 22, 2011 Yasuda et al.
D649126 November 22, 2011 Takahashi
8469776 June 25, 2013 Zuniga et al.
D709536 July 22, 2014 Yoshimura et al.
D709538 July 22, 2014 Mizukami
D709539 July 22, 2014 Kuwabara et al.
D711330 August 19, 2014 Fukushima et al.
8859070 October 14, 2014 Yasuda et al.
8932106 January 13, 2015 Fukushima
8939817 January 27, 2015 Son
D729753 May 19, 2015 Fukushima et al.
9376752 June 28, 2016 Goel et al.
D767234 September 20, 2016 Kirkland et al.
D769200 October 18, 2016 Fukushima et al.
D770990 November 8, 2016 Fukushima et al.
D770992 November 8, 2016 Tauchi et al.
D783922 April 11, 2017 Kirkland
D797067 September 12, 2017 Zhang et al.
D808349 January 23, 2018 Fukushima et al.
D810705 February 20, 2018 Krishnan et al.
D813180 March 20, 2018 Fukushima
D839224 January 29, 2019 Yamaki
D859331 September 10, 2019 Yamamoto
D859332 September 10, 2019 Yamaki
20010029158 October 11, 2001 Sasaki
20020160693 October 31, 2002 Nihonmatsu
20030171076 September 11, 2003 Moloney
20040175951 September 9, 2004 Chen
20050215182 September 29, 2005 Fuhriman
20070063453 March 22, 2007 Ishikawa
20080070479 March 20, 2008 Nabeya
20080119119 May 22, 2008 Zuniga
20090068934 March 12, 2009 Hong
20090111362 April 30, 2009 Nabeya
20090247057 October 1, 2009 Kobayashi et al.
20130316628 November 28, 2013 Jang
20140262193 September 18, 2014 Im et al.
20160002788 January 7, 2016 Nal et al.
20170009367 January 12, 2017 Harris
Patent History
Patent number: D913977
Type: Grant
Filed: Dec 10, 2018
Date of Patent: Mar 23, 2021
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Satoru Yamaki (Tokyo), Makoto Fukushima (Tokyo), Keisuke Namiki (Tokyo), Osamu Nabeya (Tokyo), Shingo Togashi (Tokyo), Tomoko Owada (Tokyo), Masahiko Kishimoto (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/672,852