Variable Threshold (e.g., Floating Gate Memory Device) Patents (Class 257/314)
  • Patent number: 10707307
    Abstract: A semiconductor storage device includes a substrate, a plurality of first gate electrodes on the substrate and arranged in a thickness direction of the substrate, and a first semiconductor pillar extending in the thickness direction of the substrate through the plurality of first gate electrodes, the first semiconductor pillar including a first portion facing the plurality of first gate electrodes and a second portion farther from the substrate than the first portion. The semiconductor storage device also includes a second gate electrode on the substrate farther from the substrate than the plurality of first gate electrodes, and a second semiconductor pillar extending in the thickness direction of the substrate through the second gate electrode, and connected to the first semiconductor pillar at the second portion of the first semiconductor pillar. The second portion of the first semiconductor pillar contains carbon (C).
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: July 7, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Hiroyasu Sato
  • Patent number: 10700089
    Abstract: Fabricating a three-dimensional memory device may include forming an alternating stack of insulating layers and sacrificial material layers over a substrate. Stepped surfaces are formed by patterning the alternating stack. Sacrificial pads are formed on physically exposed horizontal surfaces of the sacrificial material layers. A retro-stepped dielectric material portion is formed over the sacrificial pads. After memory stack structures extending through the alternating stack are formed, the sacrificial material layers and the sacrificial pads can be replaced with replacement material portions that include electrically conductive layers. The electrically conductive layers can be formed with thicker end portions. Contact via structures can be formed on the thicker end portions.
    Type: Grant
    Filed: February 12, 2019
    Date of Patent: June 30, 2020
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Naoto Hojo, Takahiro Tabira, Yoshitaka Otsu
  • Patent number: 10685959
    Abstract: An electrode structure is disclosed. The electrode structure includes a first polysilicon layer doped with resistance adjustment impurities; a second polysilicon layer for adjusting grains, formed in the first polysilicon layer and doped with grain adjustment impurities; an ohmic metal layer formed on the first and second polysilicon layers; a barrier metal layer formed on the ohmic metal layer; and a metal layer formed on the barrier metal layer.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: June 16, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dong-Kak Lee, Joon Kim, Bong-hyun Kim, Han-Jin Lim
  • Patent number: 10686046
    Abstract: The present disclosure relates to a memory cell comprising a vertical selection gate extending in a trench made in a substrate, a floating gate extending above the substrate, and a horizontal control gate extending above the floating gate, wherein the floating gate also extends above a portion of the vertical selection gate over a non-zero overlap distance. Application mainly to the production of a split gate memory cell programmable by hot-electron injection.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: June 16, 2020
    Assignee: STMicroelectronics (Rousset) SAS
    Inventors: Francesco La Rosa, Stephan Niel, Arnaud Regnier, Julien Delalleau
  • Patent number: 10685975
    Abstract: A vertical memory device includes a substrate having a peripheral circuit interconnection, lower word lines stacked on the substrate, vertical channel structures passing through the lower word lines, a first cell contact plug including a bottom end lower than a bottom surface of a first lower word line and being connected to the first lower word line, and lower insulating layers and first lower mold patterns positioned beneath the first lower word line and stacked alternately on each other from the substrate.
    Type: Grant
    Filed: October 29, 2018
    Date of Patent: June 16, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Seok Cheon Baek
  • Patent number: 10680037
    Abstract: A cross-point memory array includes a plurality of variable resistance memory cell pillars. Adjacent memory cell pillars are separated by a partially filled gap that includes a buried void. In addition, adjacent memory cell pillars include storage material elements that are at least partially interposed by the buried void.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: June 9, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Fantini, Cristina Casellato, Fabio Pellizzer
  • Patent number: 10679985
    Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack including interleaved conductive layers and dielectric layers, a channel structure extending vertically through the memory stack, and a semiconductor layer above the memory stack. The channel structure includes a channel plug in a lower portion of the channel structure, a memory film along a sidewall of the channel structure, and a semiconductor channel over the memory film and in contact with the channel plug. The semiconductor layer includes a semiconductor plug above and in contact with the semiconductor channel.
    Type: Grant
    Filed: November 17, 2018
    Date of Patent: June 9, 2020
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Shasha Liu, Li Hong Xiao, EnBo Wang, Feng Lu, Qianbin Xu
  • Patent number: 10680007
    Abstract: A semiconductor device includes gate electrodes stacked along a direction perpendicular to an upper surface of a substrate, the gate electrodes extending to different lengths in a first direction, and each gate electrode including subgate electrodes spaced apart from each other in a second direction perpendicular to the first direction, and gate connection portions connecting subgate electrodes of a same gate electrode of the gate electrodes to each other, channels extending through the gate electrodes perpendicularly to the upper surface of the substrate, and dummy channels extending through the gate electrodes perpendicularly to the upper surface of the substrate, the dummy channels including first dummy channels arranged in rows and columns, and second dummy channels arranged between the first dummy channels in a region including the gate connection portions.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: June 9, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung Jun Shin, Hyun Mog Park, Joong Shik Shin
  • Patent number: 10680003
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a staircase structure disposed over a substrate. The staircase structure includes a plurality of layer stacks, where each layer stack is made of a first material layer over a portion of a second material layer. The staircase structure further includes a plurality of landing pads, where each landing pad is disposed over another portion of the second material layer of a respective layer stack.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: June 9, 2020
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Jun Chen, Xiaowang Dai, Jifeng Zhu, Qian Tao, Yu Ru Huang, Si Ping Hu, Lan Yao, Li Hong Xiao, A Man Zheng, Kun Bao, Haohao Yang
  • Patent number: 10680010
    Abstract: Embodiments of 3D memory devices having zigzag slit structures and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack including interleaved conductive layers and dielectric layers above the substrate, an array of memory strings each extending vertically through the memory stack, and a plurality of slit structures laterally dividing the array of memory strings into a plurality of memory regions. Each of the plurality of slit structures extends vertically through the memory stack and extends laterally in a first zigzag pattern in a plan view.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: June 9, 2020
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventor: Wenyu Hua
  • Patent number: 10672655
    Abstract: The disclosed technology generally relates to patterning structures in semiconductor fabrication, and more particularly to patterning structures using mask structures having bridged lines.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: June 2, 2020
    Assignees: IMEC vzw, Katholieke Universiteit Leuven
    Inventors: Basoene Briggs, Ivan Zyulkov, Katia Devriendt
  • Patent number: 10665510
    Abstract: A spacer structure and a fabrication method thereof are provided. The method includes the following operations. First and second conductive structures are formed over a substrate. Dielectric layer is formed to cover the first and second conductive structures. Hard mask layer is formed over the dielectric layer. The hard mask layer covers the dielectric layer over the first conductive structure, and the hard mask layer has an opening exposing the dielectric layer over the second conductive structure. The dielectric layer exposed by the hard mask layer is etched to reduce thickness of the dielectric layer. The hard mask layer is removed. The dielectric layer is etched to form first main spacer on sidewall of the first conductive structure and second main spacer on sidewall of the second conductive structure. A first width of the first main spacer is greater than a second width of the second main spacer.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: May 26, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Alexander Kalnitsky, Kong-Beng Thei
  • Patent number: 10658230
    Abstract: A semiconductor device includes a comprise a substrate including a main zone and an extension zone, vertical channels on the main zone, and an electrode structure including gate electrodes stacked on the substrate. The vertical channel structures extend in a first direction perpendicular to a top surface of the substrate. The gate electrodes include line regions and contact regions. The line regions extend from the main zone toward the extension zone along a second direction the second direction that is perpendicular to the first direction. The contact regions are on ends of the line regions and are thicker than the line regions. A spacing distance in the second direction between the contact regions is greater than a spacing distance in the first direction between the line regions.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: May 19, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chung-Il Hyun, Semee Jang, Sung Yun Lee
  • Patent number: 10658373
    Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming a split gate stack having a main gate and a select gate and forming a logic gate stack having a logic gate over a semiconductor substrate. The main gate and the logic gate is respectively replaced with a metal memory gate and a metal logic gate, in which the main gate and the logic gate are replaced simultaneously.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: May 19, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Harry-Hak-Lay Chuang, Wei-Cheng Wu, Ya-Chen Kao
  • Patent number: 10651311
    Abstract: A method includes forming an opening in a dielectric to reveal a protruding semiconductor fin, forming a gate dielectric on sidewalls and a top surface of the protruding semiconductor fin, and forming a conductive diffusion barrier layer over the gate dielectric. The conductive diffusion barrier layer extends into the opening. The method further includes forming a silicon layer over the conductive diffusion barrier layer and extending into the opening, and performing a dry etch on the silicon layer to remove horizontal portions and vertical portions of the silicon layer. After the dry etch, a conductive layer is formed over the conductive diffusion barrier layer and extending into the opening.
    Type: Grant
    Filed: November 9, 2016
    Date of Patent: May 12, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Han Fang, Po-Chi Wu
  • Patent number: 10651187
    Abstract: Embodiments of three-dimensional (3D) memory devices and methods for forming the 3D memory devices are disclosed. In an example, a 3D memory device includes a substrate, a peripheral device disposed on the substrate, a peripheral interconnect layer disposed above the peripheral device, a first source plate disposed above and electrically connected to the peripheral interconnect layer, a first memory stack disposed on the first source plate, a first memory string extending vertically through the first memory stack and in contact with the first source plate, and a first bit line disposed above and electrically connected to the first memory string and the peripheral device.
    Type: Grant
    Filed: October 1, 2018
    Date of Patent: May 12, 2020
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventor: Jun Liu
  • Patent number: 10650891
    Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: May 12, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Patent number: 10651194
    Abstract: A semiconductor device includes a stack structure on a substrate, the stack structure including interlayer insulating layers and first gate electrodes alternately stacked on each other, a semiconductor layer in an opening penetrating through the stack structure, a first dielectric layer between the semiconductor layer and the stack structure, and a lower pattern closer to the substrate than to the first gate electrodes in the stack structure, the lower pattern including a first surface facing the first dielectric layer, and a second surface facing the stack structure, the second surface defining an acute angle with the first surface, wherein the first dielectric layer includes a first portion facing the stack structure, and a second portion facing the first surface of the lower pattern, the second portion having a thickness greater than a thickness of the first portion.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: May 12, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ji Hoon Choi, Sung Gil Kim, Seulye Kim, Jung Ho Kim, Hong Suk Kim, Phil Ouk Nam, Jae Young Ahn, Han Jin Lim
  • Patent number: 10650900
    Abstract: A semiconductor memory device includes a first NAND string and a second NAND string sharing a channel and being connected in parallel. When reading a value from a first memory cell transistor of the first NAND string, a first potential is applied to a gate of a second memory cell transistor of the first NAND string and a gate of at least one of fourth memory cell transistors opposing the second memory cell transistor, a second potential is applied to a gate of a third memory cell transistor of the second NAND string opposing the first memory cell transistor, and a gate potential of the first memory cell transistor is swept between the second potential and the first potential. The second potential is lower than the first potential.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: May 12, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Yusuke Shimada, Fumitaka Arai, Tatsuya Kato
  • Patent number: 10644105
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a channel to conduct current, the channel including a first channel portion and a second channel portion, a first memory cell structure located between a first gate and the first channel portion, a second memory cell structure located between a second gate and the second channel portion, and a void located between the first and second gates and between the first and second memory cell structures.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: May 5, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Chris M. Carlson
  • Patent number: 10644020
    Abstract: A three-dimensional semiconductor device includes: A peripheral circuit, distributed on a substrate; a plurality of memory cells above the peripheral circuit, each of which includes: a common source region, between the memory cell and the peripheral circuit; a channel layer, distributed in a direction perpendicular to the surface of the substrate; at least one substrate contact layer, extending horizontally from the central portion of the channel layer parallel to the surface of the substrate, each comprising at least one substrate contact region; a plurality of insulating layers, located on sidewalls of the channel layer; a plurality of control gates, sandwiched between adjacent insulating layers; a gate dielectric layer, located between the channel layer and the control gates; a drain region, located at top of the channel layer; a substrate contact lead-out line, electrically connected to the substrate contact regions; and a bit line wiring, electrically connected to the drain region of each memory cell and
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: May 5, 2020
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Zongliang Huo, Tianchun Ye
  • Patent number: 10636782
    Abstract: Circuits and methods for protecting a device are provided. A first device to be protected includes a gate dielectric of a first thickness. A second device includes a gate dielectric of a second thickness that is less than the first thickness. A gate is shared by the first device and the second device.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: April 28, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kuo-Yu Chou, Shang-Fu Yeh, Yi-Ping Chao, Chih-Lin Lee
  • Patent number: 10636814
    Abstract: A 3D memory device, comprising a plurality of rows of strings of memory cells, each row of strings of memory cells comprising an array of strings of memory cells extending along a first direction, the rows following one another along a second direction. Each string of memory cells comprises a stack of memory cells, and the strings of memory cells of the stack extend in a third direction from a first end to a second end. A source region is provided at the second end of the strings of memory cells. Consecutive rows of strings of memory cells along the second direction are spaced apart from each other of a pitch. Between pairs of strings of a row of memory cells along the second direction there is formed a slit extending in the third direction from the first end down to the source region. The slit has dimension, along the second direction, smaller than, equal to or greater than the pitch, sufficient to the formation, in the slit, of an electrical contact to the source region.
    Type: Grant
    Filed: August 1, 2019
    Date of Patent: April 28, 2020
    Assignee: Trinandable, S.r.l.
    Inventor: Sabrina Barbato
  • Patent number: 10636808
    Abstract: A vertical memory device and method of manufacture thereof are provided. The vertical memory device includes gate electrode layers stacked on a substrate; a channel layer penetrating through the gate electrode layers; and a first epitaxial layer in contact with a lower portion of the channel layer and including a region having a diameter smaller than an external diameter of the channel layer.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: April 28, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyung Hwan Lee, Yong Seok Kim, Tae Hun Kim, Byoung Taek Kim, Jun Hee Lim
  • Patent number: 10629606
    Abstract: A plurality of horizontal top surfaces that are vertically offset is formed on a substrate. An alternating stack of insulating layers and spacer material layers is formed and patterned to provide a plurality of staircase regions that are laterally spaced apart and overlies a respective one of the plurality of horizontal top surfaces of the substrate. Memory stack structures are formed through the alternating stack. The spacer material layers are formed as, or are replaced with, electrically conductive layers. A set of contact via cavities are formed over the electrically conductive layers.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: April 21, 2020
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Nobutoshi Sugawara, Shigeyuki Sugihara
  • Patent number: 10629609
    Abstract: A three-dimensional semiconductor device and a method of forming the same are provided. The three-dimensional semiconductor device comprises a substrate including first and second areas; first and second main separation patterns, disposed on the substrate and intersecting the first and second areas; gate electrodes disposed between the first and second main separation patterns and forming a stacked gate group, the gate electrodes sequentially stacked on the first area and extending in a direction from the first area to the second area; and at least one secondary separation pattern disposed on the second area, disposed between the first and second main separation patterns, and penetrating through the gate electrodes disposed on the second area. The gate electrodes include pad portions on the second area, and the pad portions are thicker than the gate electrodes disposed on the first area and in contact with the at least one secondary separation pattern.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: April 21, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang Sup Lee, Phil Ouk Nam, Sung Yun Lee, Chang Seok Kang
  • Patent number: 10629801
    Abstract: A laminated structure includes a ferromagnetic layer, a multiferroic layer provided on one surface of the ferromagnetic layer, and a ferroelectric layer which is provided on the multiferroic layer opposite to the ferromagnetic layer and has a permittivity greater than that of the multiferroic layer.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: April 21, 2020
    Assignee: TDK CORPORATION
    Inventors: Eiji Suzuki, Katsuyuki Nakada, Shogo Yonemura
  • Patent number: 10629611
    Abstract: A method of forming a three-dimensional memory device includes forming an alternating stack of insulating layers and sacrificial material layers over a substrate, forming a patterned template structure around memory openings in a drain-select-level above the alternating stack, forming drain-select-level isolation structures in trenches in the patterned template structure, forming memory stack structures in the memory openings extending through the alternating stack, where each of the memory stack structures includes a memory film and a vertical semiconductor channel, replacing the sacrificial material layers with word lines, and separately replacing the patterned template structure with a drain select gate electrode.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: April 21, 2020
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Zhixin Cui, Kiyohiko Sakakibara, Mitsuteru Mushiga, Hisakazu Otoi, Kenji Sugiura
  • Patent number: 10615270
    Abstract: A method of forming a non-volatile memory cell on a substrate having memory cell and logic circuit regions by forming a pair of conductive floating gates in the memory cell region, forming a first source region in the substrate between the pair of floating gates, forming a polysilicon layer in both regions, forming an oxide layer over the polysilicon layer in the logic circuit region, performing a chemical-mechanical polish of the polysilicon layer in the memory cell area leaving a first block of the polysilicon layer between the floating gates that is separated from remaining portions of the polysilicon layer, and selectively etching portions of the polysilicon layer to result in: second and third blocks of the polysilicon layer disposed in outer regions of the memory cell area, and a fourth block of the polysilicon layer in the logic circuit region.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: April 7, 2020
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Leo Xing, Andy Liu, Melvin Diao, Xian Liu, Nhan Do
  • Patent number: 10612125
    Abstract: A multilayer structure can selectively bind certain molecules, due to reentrant spaces having an appropriate size. The multilayers can be fabricated by alternating layers of two different materials having different etching rate. The layers of the material having a higher etching rate form reentrant spaces which can protect molecules from further chemical interactions.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: April 7, 2020
    Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
    Inventors: Axel Scherer, Peter A Petillo, Deepan Kishore Kumar
  • Patent number: 10608004
    Abstract: Some embodiments include a semiconductor device having a stack structure including a source comprising polysilicon, an etch stop of oxide on the source, a select gate source on the etch stop, a charge storage structure over the select gate source, and a select gate drain over the charge storage structure. The semiconductor device may further include an opening extending vertically into the stack structure to a level adjacent to the source. A channel comprising polysilicon may be formed on a side surface and a bottom surface of the opening. The channel may contact the source at a lower portion of the opening, and may be laterally separated from the charge storage structure by a tunnel oxide. A width of the channel adjacent to the select gate source is greater than a width of the channel adjacent to the select gate drain.
    Type: Grant
    Filed: July 5, 2018
    Date of Patent: March 31, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Hongbin Zhu, Zhenyu Lu, Gordon Haller, Jie Sun, Randy J. Koval, John Hopkins
  • Patent number: 10608013
    Abstract: A method for forming 3D memory device includes forming an alternating dielectric stack in a contact region on a substrate, forming a plurality of contact holes with various depths vertically extending in the alternating dielectric stack, forming a sacrificial-filling layer to fill the contact holes, forming a plurality of dummy channel holes penetrating the alternating dielectric stack in the contact region, filling the dummy channel holes with a dielectric material to form supporters, and replacing the sacrificial layers of the alternating dielectric stack and the sacrificial-filling layer with conductive layers so as to form a plurality of gate lines and contacts.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: March 31, 2020
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventor: Li Hong Xiao
  • Patent number: 10608010
    Abstract: An alternating stack of insulating layers and sacrificial material layers is formed with stepped surfaces. Sacrificial metal plates are formed on the top surfaces of the sacrificial material layers, and a retro-stepped dielectric material portion is formed over the sacrificial metal plates. Contact via cavities are formed through the retro-stepped dielectric material portion employing the sacrificial metal plates as etch stop structures. The sacrificial metal plates are replaced with portions of insulating spacer layers. Sacrificial via fill structures within remaining volumes of the contact via cavities. The sacrificial material layers are replaced with electrically conductive layers. The sacrificial via fill structures are replaced with portions of staircase-region contact via structures that contact the electrically conductive layers.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: March 31, 2020
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Yujin Terasawa, Genta Mizuno, Yusuke Mukae, Yoshinobu Tanaka, Shiori Kataoka, Ryosuke Itou, Kensuke Yamaguchi, Naoki Takeguchi
  • Patent number: 10608009
    Abstract: This nonvolatile semiconductor memory device comprises: a memory cell array including memory cells; and a wiring line portion connecting the memory cell array to an external circuit. The memory cell array comprises a plurality of first conductive layers which are connected to the memory cells and arranged in a stacking direction. On the other hand, the wiring line portion comprises: a plurality of second conductive layers arranged in the stacking direction and respectively connected to the plurality of first conductive layers, positions of ends of the plurality of second conductive layers being different in a first direction crossing the stacking direction; a third conductive layer extending in the stacking direction from the second conductive layer; a channel semiconductor layer connected to one end of the third conductive layer; and a gate electrode wiring line disposed on a surface of the channel semiconductor layer via a gate insulating film.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: March 31, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Keiji Ikeda, Masumi Saitoh, Hideaki Aochi, Takeshi Kamigaichi, Jun Fujiki
  • Patent number: 10600806
    Abstract: A stack structure includes conductive layer patterns and interlayer insulating layer patterns alternately stacked on one another. A channel hole penetrates the stack structure. A dielectric layer is disposed on a sidewall of the channel hole. A channel layer is disposed on the dielectric layer and in the channel hole. A passivation layer is disposed on the channel layer and in the channel hole. The channel layer is interposed between the passivation layer and the dielectric layer. An air gap is surrounded by the passivation layer. A width of the air gap is larger than a width of the passivation layer.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: March 24, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung Gil Kim, Seul Ye Kim, Hong Suk Kim, Jin Tae Noh, Ji Hoon Choi, Jae Young Ahn
  • Patent number: 10593753
    Abstract: Techniques for controlling top spacer thickness in VFETs are provided. In one aspect, a method of forming a VFET device includes: depositing a dielectric hardmask layer and a fin hardmask(s) on a wafer; patterning the dielectric hardmask layer and the wafer to form a fin(s) and a dielectric cap on the fin(s); forming a bottom source/drain at a base of the fin(s); forming bottom spacers on the bottom source/drain; forming a gate stack alongside the fin(s); burying the fin(s) in a dielectric fill material; selectively removing the fin hardmask(s); recessing the gate stack to form a cavity in the dielectric fill material; depositing a spacer material into the cavity; recessing the spacer material to form top spacers; removing the dielectric cap; and forming a top source/drain at a top of the fin(s). A VFET device is also provided.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: March 17, 2020
    Assignee: International Business Machines Corporation
    Inventors: Wenyu Xu, Chen Zhang, Kangguo Cheng, Xin Miao
  • Patent number: 10593393
    Abstract: A semiconductor memory device includes a substrate, a ground selection line, a word line, an insulating layer, a vertical channel portion, and a first peripheral circuit gate pattern. The substrate includes a cell array region and a peripheral circuit region. The ground selection line is on the cell array region. The word line is on the ground selection line. The insulating layer is between the ground selection line and the word line. The vertical channel portion penetrates the ground selection line, word line, and insulating layer in a direction vertical to a top surface of the substrate. The first peripheral circuit gate pattern is on the peripheral circuit region of the substrate. The insulating layer extends from the cell array region onto the peripheral circuit region to cover a top surface of the first peripheral circuit gate pattern.
    Type: Grant
    Filed: July 3, 2019
    Date of Patent: March 17, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: JoongShik Shin, Byoungil Lee, Hyunmog Park, Euntaek Jung
  • Patent number: 10586803
    Abstract: A method of forming a three-dimensional memory device includes forming an alternating stack of insulating layers and sacrificial material layers over a substrate, forming a patterned template structure around memory openings in a drain-select-level above the alternating stack, forming drain-select-level isolation structures in trenches in the patterned template structure, forming memory stack structures in the memory openings extending through the alternating stack, where each of the memory stack structures includes a memory film and a vertical semiconductor channel, replacing the sacrificial material layers with word lines, and separately replacing the patterned template structure with a drain select gate electrode.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: March 10, 2020
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Mitsuteru Mushiga, Hisakazu Otoi, Kenji Sugiura, Zhixin Cui, Kiyohiko Sakakibara
  • Patent number: 10580795
    Abstract: A microelectronic device comprises vertically alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures; a staircase structure within the stack structure and having steps comprising edges of at least some of the tiers; a source tier underlying the stack structure and comprising: a source structure, and first discrete conductive structures horizontally separated from one another and the source structure by at least one dielectric material; conductive contact structures on the steps of the staircase structure; and first conductive pillar structures horizontally alternating with the conductive contact structures and vertically extending through the stack structure to the first discrete conductive structures of the source tier. A memory device, a 3D NAND Flash memory device, and an electronic system are also described.
    Type: Grant
    Filed: August 15, 2019
    Date of Patent: March 3, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
  • Patent number: 10580829
    Abstract: Embodiments of the invention include resulting structures and a method for fabricating a vertical ReRAM array structure. The embodiments of the invention include forming alternating layers over a metal layer of a structure, wherein a layer of the alternating layers comprises a low resistivity material, masking one or more portions of a topmost layer of the alternating layers, and etching one or more portions of the alternating layers down to the metal layer. Embodiments of the invention also include depositing a lateral electrode layer over the etched one or more portions of the alternating layers, performing an etch back on the lateral electrode layer, and forming a vertical electrode layer over the structures.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: March 3, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Takashi Ando, Pouya Hashemi, Choonghyun Lee
  • Patent number: 10573658
    Abstract: A method of manufacturing three-dimensional semiconductor device includes the steps of: forming a stack structure of a plurality of a first material layers and a second material layers on a substrate in the memory cell region; etching the stack structure to form a plurality of trenches; forming channel layers in the plurality of trenches; and reducing the surface roughness and the interface state by performing annealing treatment to at least one surface of the channel layers.
    Type: Grant
    Filed: July 10, 2014
    Date of Patent: February 25, 2020
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Zongliang Huo
  • Patent number: 10566336
    Abstract: Embodiments of three-dimensional (3D) memory devices having through array contacts (TACs) and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A dielectric stack including a plurality of dielectric/sacrificial layer pairs is formed on a substrate. A channel structure extending vertically through the dielectric stack is formed. A first opening extending vertically through the dielectric stack is formed. A spacer is formed on a sidewall of the first opening. A TAC extending vertically through the dielectric stack is formed by depositing a conductor layer in contact with the spacer in the first opening. A slit extending vertically through the dielectric stack is formed after forming the TAC. A memory stack including a plurality of conductor/dielectric layer pairs is formed on the substrate by replacing, through the slit, the sacrificial layers in the dielectric/sacrificial layer pairs with a plurality of conductor layers.
    Type: Grant
    Filed: October 1, 2018
    Date of Patent: February 18, 2020
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Mei Lan Guo, Yushi Hu, Ji Xia, Hongbin Zhu
  • Patent number: 10566345
    Abstract: A three-dimensional semiconductor memory device includes a peripheral logic structure on a semiconductor substrate. A horizontal semiconductor layer is on the peripheral logic structure and includes a cell array region and a connection region. Electrode structures extend in a first direction on the horizontal semiconductor layer and are spaced apart in a second direction intersecting the first direction. A pair of the electrode structures adjacent to each other are symmetrically disposed to define a contact region partially exposing the horizontal semiconductor layer. A through via structure is on the contact region and connects the electrode structures to the peripheral logic structure. Each of the electrode structures includes a plurality of gate insulation regions extending along the first direction on the connection region. The gate insulation regions have different lengths from each other in the first direction.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: February 18, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kohji Kanamori, Seo-Goo Kang, Younghwan Son, Kwonsoon Jo
  • Patent number: 10559474
    Abstract: A semiconductor device includes interlayer insulating layers and conductive patterns alternately stacked over a pipe gate, a first slit and a second slit penetrating the interlayer insulating layers and the conductive patterns and crossing each other, an etch stop pad groove overlapping an intersection of the first slit and the second slit, arranged in the pipe gate, and connected to the first slit or the second slit, and slit insulating layers filling the first slit, the second slit and the etch stop pad groove.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: February 11, 2020
    Assignee: SK hynix Inc.
    Inventors: Myeong Seong Yoon, Il Seok Seo
  • Patent number: 10553711
    Abstract: Various aspects of tunable barrier transistors that can be used in high power electronics are provided. In one example, among others, a tunable barrier transistor includes an inorganic semiconducting layer; a source electrode including a nano-carbon film disposed on the inorganic semiconducting layer; a gate dielectric layer disposed on the nano-carbon film; and a gate electrode disposed on the gate dielectric layer over at least a portion of the nano-carbon film. The nano-carbon film can form a source-channel interface with the inorganic semiconducting layer. A gate field produced by the gate electrode can modulate a barrier height at the source-channel interface. The gate field may also modulate a barrier width at the source-channel interface.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: February 4, 2020
    Assignee: University of Florida Research Foundation, Inc.
    Inventors: Maxime G. Lemaitre, Xiao Chen, Bo Liu, Mitchell Austin McCarthy, Andrew Gabriel Rinzler
  • Patent number: 10553602
    Abstract: A semiconductor device includes gate stacked structures surrounding channel layers, a common source line filling a separation area between the gate stacked structures adjacent to each other and having an upper surface including first concave portions, and a support insulating layer filling the first concave portions and having sidewalls facing portions of the channel layers.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: February 4, 2020
    Assignee: SK hynix Inc.
    Inventor: Ki Hong Lee
  • Patent number: 10546871
    Abstract: A semiconductor memory device according to an embodiment comprises: a memory cell array region including a plurality of conductive layers that are electrically connected to a plurality of memory cells arranged in a first direction on a semiconductor substrate, the first direction intersecting a surface of the semiconductor substrate; a stepped part for contacting the plurality of conductive layers to a wiring line; a contact extending in the first direction and being connected to the conductive layer in the stepped part; and a plurality of columnar bodies extending in the first direction and penetrates the conductive layer in the stepped part and including a first columnar body having a first height and a second columnar body having a second height which is lower than the first height.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: January 28, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Kenji Aoyama
  • Patent number: 10546870
    Abstract: A three-dimensional NAND memory string includes an alternating stack of insulating layers and word line layers extending in a word line direction, a memory array region in the alternating stack containing memory stack structures, a group of more than two column stairs located in the alternating stack and extending in the word line direction from one side of the memory array region, and bit lines electrically contacting the vertical semiconductor channels and extending in a bit line direction which is perpendicular to the word line direction. Each column stair of the group of N column stairs has a respective step in a first vertical plane which extends in the bit line direction, and the respective steps in the first vertical plane decrease and then increase from one end column stair to another end column stair.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: January 28, 2020
    Assignee: SanDisk Technologies LLC
    Inventors: Seiji Shimabukuro, Kensuke Yamaguchi
  • Patent number: 10546869
    Abstract: A semiconductor device comprises a plurality of stack structures that include gate electrodes sequentially stacked on a substrate and are disposed along a first direction, and a plurality of separating insulation layers each of which is disposed between the stack structures. A plurality of vertical pillars penetrate each of the stack structures and are connected to the substrate. A plurality of bit lines are disposed on the vertical pillars and run across the stack structures in the first direction. A plurality of bit line contact structures connect the vertical pillars to the bit lines. A plurality of first cell dummy lines are disposed on the plurality of separating insulation layers and extend in a second direction crossing the first direction.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: January 28, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Taekeun Cho, Hongsoo Kim, Jong-Kook Park, TaeHee Lee
  • Patent number: 10535673
    Abstract: A memory device that includes: a memory controller; a control unit; and a memory cell array that includes memory blocks, each memory block comprising: memory cells, word lines respectively coupled to the memory cells, signal lines to transfer signals to perform programming operations to one or more memory cells of the memory cells, a first metal layer coupled to a first group of lines and configured to route the first group of the lines to the control unit, the lines comprising the word lines and the signal lines, and a second metal layer coupled to a second group of the lines and configured to route the second group of the lines to the control unit, wherein the memory controller is configured to: control the control unit to (i) select particular memory cells and (ii) program data to the particular memory cells is disclosed.
    Type: Grant
    Filed: June 4, 2018
    Date of Patent: January 14, 2020
    Assignee: Macronix International Co., Ltd.
    Inventors: Teng-Hao Yeh, Chih-Wei Hu, Hang-Ting Lue