Active Channel Region Has A Graded Dopant Concentration Decreasing With Distance From Source Region (e.g., Double Diffused Device, Dmos Transistor) Patents (Class 257/335)
  • Patent number: 10727308
    Abstract: One device disclosed herein includes a gate above a semiconductor substrate, the gate comprising a gate structure and a gate cap, and conductive source/drain metallization structures adjacent the gate, each of the conductive source/drain metallization structures having a front face and a recess defined in each of the conductive source/drain metallization structures. In this example, the device further includes a spacer structure comprising recess filling portions that substantially fill the recesses and a portion that extends across a portion of the upper surface of the gate cap, wherein a portion of the gate cap is exposed within the spacer structure, an insulating material within the spacer structure and on the exposed portion of the gate cap, a gate contact opening that exposes a portion of an upper surface of the gate structure, and a conductive gate contact structure in the conductive gate contact opening.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: July 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Hao Tang, Cheng Chi, Daniel Chanemougame, Lars W. Liebmann, Mark V. Raymond
  • Patent number: 10727333
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor device includes a first semiconductor region, a second semiconductor region, a third semiconductor region, an insulating unit, a void, a gate insulating film and a gate electrode. The second semiconductor region provides on a part of the first semiconductor region. The third semiconductor region provides on one other part of the first semiconductor region. The insulating unit provides on a part of the second semiconductor region. The void provides at a lower part of the insulating unit. The gate insulating film provides on a part of the first semiconductor region between the second semiconductor region and the third semiconductor region. The gate electrode provides on the gate insulating film. A position in a first direction of at least a part of the void is between the insulating unit and the third semiconductor region.
    Type: Grant
    Filed: January 17, 2017
    Date of Patent: July 28, 2020
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hirofumi Nagano, Koichi Ozaki
  • Patent number: 10707202
    Abstract: An integrated MOSFET device is formed in a body of silicon carbide and with a first type of conductivity. The body accommodates a first body region, with a second type of conductivity; a JFET region adjacent to the first body region; a first source region, with the first type of conductivity, extending into the interior of the first body region; an implanted structure, with the second type of conductivity, extending into the interior of the JFET region. An isolated gate structure lies partially over the first body region, the first source region and the JFET region. A first metallization layer extends over the first surface and forms, in direct contact with the implanted structure and with the JFET region, a JBS diode.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: July 7, 2020
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Mario Giuseppe Saggio, Simone RascunĂ¡
  • Patent number: 10706921
    Abstract: One embodiment provides an apparatus. The apparatus includes a bipolar junction transistor (BJT) and an integrated resistive element. The BJT includes a base contact, a base region, a collector contact, a collector region and an integrated emitter contact. The integrated resistive element includes a resistive layer and an integrated electrode. The resistive element is positioned between the base region and the integrated emitter contact.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: July 7, 2020
    Assignee: INTEL CORPORATION
    Inventors: Elijah V. Karpov, Ravi Pillarisetty, Prashant Majhi, Niloy Mukherjee, Uday Shah
  • Patent number: 10707301
    Abstract: A semiconductor device has a termination structure region that includes a lower parallel pn structure having lower first-columns of a first conductivity type and lower second-columns of a second conductivity type; a center parallel pn structure having center first-columns of the first conductivity type and first rings of the second conductivity type; an upper parallel pn structure having upper first-columns of the first conductivity type and upper second-columns of the second conductivity type; and an uppermost parallel pn structure having uppermost first-columns of the first conductivity type and second rings of the second conductivity type. The first and second rings are wider than the lower second-columns. An interval between the first rings and between the second rings is wider than an interval between the lower second-columns. Positions of the first rings differ from positions of the second rings, along a direction parallel to a front surface of the semiconductor device.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: July 7, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Ryo Maeta
  • Patent number: 10693000
    Abstract: A semiconductor device includes a plurality of first field-effect structures each including a polysilicon gate arranged on and in contact with a first gate dielectric, and a plurality of second field-effect structures each including a metal gate arranged on and in contact with a second gate dielectric. The plurality of first field-effect structures and the plurality of second field-effect structures form part of a power semiconductor device.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: June 23, 2020
    Assignee: Infineon Technologies Austria AG
    Inventor: Walter Rieger
  • Patent number: 10692852
    Abstract: Silicon-controlled rectifiers and methods for forming a silicon-controlled rectifier. A first well of a first conductivity type is arranged in a substrate, and second and third wells of a second conductivity type are arranged in the substrate between the first well and the top surface of the substrate. A deep trench isolation region is laterally arranged between the first well of the second conductivity type and the second well of the second conductivity type. The second well is adjoined with the first well along a first interface, the third well is adjoined with the first well along a second interface, and the deep trench isolation region extends the top surface of the substrate past the first interface and the second interface and into the first well. A doped region of the first conductivity type is arranged in the substrate between the second well and the top surface of the substrate.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: June 23, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Alain Loiseau, You Li, Mickey Yu, Tsung-Che Tsai, Souvick Mitra, Robert J. Gauthier, Jr.
  • Patent number: 10665551
    Abstract: A trench-type metal-oxide-semiconductor field-effect transistor (MOSFET) device and a fabrication method are disclosed. A semiconductor substrate of a first conductivity type is provided. A plurality of first trenches arranged side by side in a first stripe layout extending along a first direction in a first preset area of the semiconductor substrate are formed. A plurality of second trenches arranged side by side in a second stripe layout extending along a second direction perpendicular to the first direction in a second preset area of the semiconductor substrate are formed. The plurality of first trenches and the plurality of second trenches are filled with a conductive material so as to form a plurality of control gates.
    Type: Grant
    Filed: June 21, 2018
    Date of Patent: May 26, 2020
    Assignee: ALPHA AND OMEGA SEMICONDUCTOR (CAYMAN) LTD.
    Inventors: Xiaobin Wang, Madhur Bobde, Paul Thorup
  • Patent number: 10658505
    Abstract: A high voltage device may include a substrate, source and drain regions, a gate structure and an oxide layer. The substrate may include a recessed region with a recessed surface lower than a top surface of the substrate. The source and drain regions may be at least partially arranged within the substrate under the recessed surface and top surface respectively. The drain region may be positioned higher than the source region. The gate structure may include first and second portions arranged over the recessed region. The first and second portions may be nearer to the source and drain regions respectively. The oxide layer may include a first part between the first portion of the gate structure and the recessed surface, and a second part between the second portion of the gate structure and the recessed surface. The second part of the oxide layer may be thicker than the first part.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: May 19, 2020
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventor: Guowei Zhang
  • Patent number: 10644132
    Abstract: A semiconductor device is provided. The device may include a semiconductor layer; and a doped well disposed in the semiconductor layer and having a first conductivity type. The device may also include a drain region, a source region, and a body region, where the source and body regions may operate in different voltages. Further, the device may include a first doped region having a second conductivity type, the first doped region disposed between the source region and the doped well; and a second doped region having the first conductivity type and disposed under the source region. The device may include a third doped region having the second conductivity type and disposed in the doped well; and a fourth doped region disposed above the third doped region, the fourth doped region having the first conductivity type. Additionally, the device may include a gate and a field plate.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: May 5, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Tsung-Hsiung Lee, Shin-Cheng Lin
  • Patent number: 10644119
    Abstract: A semiconductor layer (2,3) is provided on a substrate (1). A gate electrode (4), a source electrode (5) and a drain electrode (6) are provided on the semiconductor layer (3). A first passivation film (7) covers the gate electrode (4) and the semiconductor layer (3). A source field plate (9) is provided on the first passivation film (7), and extends from the source electrode (5) to a space between the gate electrode (4) and the drain electrode (6). A second passivation film (10) covers the first passivation film (7) and the source field plate (9). The first passivation film (7) has a quasi-conductive thin film (8) provided at least between the gate electrode (4) and the drain electrode (6) and having an electric resistivity of 1.0 ?cm to 1010 ?cm.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: May 5, 2020
    Assignee: Mitsubishi Electric Corporation
    Inventor: Hajime Sasaki
  • Patent number: 10629687
    Abstract: According to one embodiment, a semiconductor device includes a first element. The first element includes a first electrode, a second electrode and first to fourth semiconductor regions. The second electrode includes a first conductive region and a second conductive region. The first semiconductor region is provided between the first electrode and the first conductive region and between the first electrode and the second conductive region. The second semiconductor region includes a first partial region and a second partial region. The first partial region is provided between the first electrode and the first conductive region. The second partial region is provided between the first electrode and the second conductive region. The third semiconductor region is provided between the second partial region and the second conductive region. The fourth semiconductor region is provided between the third semiconductor region and the second conductive region.
    Type: Grant
    Filed: August 10, 2018
    Date of Patent: April 21, 2020
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Chiharu Ota, Tatsunori Sakano, Tatsuo Shimizu, Ryosuke Iijima
  • Patent number: 10615079
    Abstract: A buried n-type region is provided in a surface layer portion of an n-type body layer of a Pch MOSFET. This makes it possible to lower the threshold voltage Vt. In a portion of the n-type body layer other than the buried n-type region, since an n-type impurity concentration can be kept relatively high, the threshold voltage Vt can be lowered while securing an on-breakdown voltage. Furthermore, since an accumulation region is configured by an n-type active layer, a partial high concentration portion is not formed in a p-type drift layer. Therefore, as in the case where the partial high concentration portion is generated in the p-type drift layer, a reduction in a breakdown voltage caused by an electric field concentration can be restricted from occurring with a distribution in which equipotential lines are concentrated.
    Type: Grant
    Filed: March 13, 2017
    Date of Patent: April 7, 2020
    Assignee: DENSO CORPORATION
    Inventors: Shogo Ikeura, Yusuke Nonaka, Shinichirou Yanagi, Seiji Noma, Shinya Sakurai
  • Patent number: 10607880
    Abstract: A continuous buried doped isolation region in a substrate of a die. The substrate includes an isolation ring structure surrounding a first area of the die. The continuous buried doped isolation region is of a net first conductivity type and is located in the first area. The continuous buried doped isolation region including a first portion having a net first conductivity type dopant concentration of at least a first level located in an interior region of the first area and extending to a sidewall of the isolation ring structure. The first portion does not extend to the sidewall of the isolation ring structure in a location of a corner area of the first area. The corner area is defined by the isolation ring structure. A second portion of the continuous buried doped isolation region in the corner area has a net first conductivity type dopant concentration of a second level that is lower than the first level.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: March 31, 2020
    Assignee: NXP USA, INC.
    Inventors: Saumitra Raj Mehrotra, Tanuj Saxena, Ljubo Radic, Bernhard Grote
  • Patent number: 10593774
    Abstract: An electronic device can include a transistor having a drain region, a source region, a dielectric layer, and a gate electrode. The dielectric layer can have a first portion and a second portion, wherein the first portion is relatively thicker and closer to the drain region; the second portion is relatively thinner and closer to the source region. The gate electrode of the transistor can overlie the first and second portions of the dielectric layer. In another aspect, an electronic device can be formed using two different dielectric layers having different thicknesses. A gate electrode within the electronic device can be formed over portions of the two different dielectric layers. The process can eliminate masking and doping steps that may be otherwise used to keep the drain dopant concentration closer to the concentration as originally formed.
    Type: Grant
    Filed: October 11, 2017
    Date of Patent: March 17, 2020
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gary H. Loechelt, Gordon M. Grivna
  • Patent number: 10529849
    Abstract: A high-voltage semiconductor device is disclosed. The high-voltage semiconductor device includes a gate structure on a substrate structure. A drain doped region and a source doped region are located close to opposite sides of the gate structure. The source doped region, the gate structure and the drain doped region are located close to a top surface of the substrate structure. A super junction doped structure is located close to the drain doped region. The super junction doped structure includes a plurality of first conductive type doped sub-regions extending along a first direction and arranged along a second direction. A plurality of second conductive type doped sub-regions extends along the first direction and is arranged staggered with the first conductive type doped sub-regions. The widths of the first conductive type doped sub-regions and the second conductive type doped sub-regions along the second direction decrease linearly along the second direction.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: January 7, 2020
    Assignee: Nuvoton Technology Corporation
    Inventors: M D Imran Siddiqui, Po-An Chen
  • Patent number: 10529804
    Abstract: Disclosed examples include LDMOS transistors and integrated circuits with a gate, a body region implanted in the substrate to provide a channel region under a portion of the gate, a source adjacent the channel region, a drain laterally spaced from a first side of the gate, a drift region including a first highly doped drift region portion, a low doped gap drift region above the first highly doped drift region portion, and a second highly doped region portion above the gap drift region, and an isolation structure extending through the second highly doped region portion into the gap drift region portion, with a first end proximate the drain region and a second end under the gate dielectric layer, where the body region includes a tapered side laterally spaced from the second end of the isolation structure to define a trapezoidal JFET region.
    Type: Grant
    Filed: August 21, 2017
    Date of Patent: January 7, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Jun Cai
  • Patent number: 10522420
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate having a first device region and a second device region, a first fin over the substrate in the first device region, a second fin over the substrate in the second device region, a first epitaxial feature over the first fin in the source/drain region of the first fin, a second epitaxial feature over the second fin in the source/drain region of the second fin, and a dielectric layer on the first and second epitaxial features. The first epitaxial feature is doped with a first dopant of a first conductivity and the second epitaxial feature is doped with a second dopant of a second conductivity different from the first conductivity. The dielectric layer is doped with the first dopant.
    Type: Grant
    Filed: June 24, 2019
    Date of Patent: December 31, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 10522618
    Abstract: An isolation structure for active devices is provided. In some embodiments, the isolation structure is used in a transistor. The transistor includes a substrate having a first doping type. The transistor also includes a channel layer positioned over the substrate and comprising a first section and a second section. The transistor further includes an active layer positioned over the channel layer. The isolation structure includes a horizontal segment, a first vertical segment, and a second vertical segment. The horizontal segment is arranged below the second section of the channel layer and continuously extends between the first vertical segment and the second vertical segment. The isolation structure has a second doping type that is different than the first doping type.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: December 31, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Man-Ho Kwan
  • Patent number: 10515966
    Abstract: A semiconductor device includes a substrate, a fin structure and an isolation layer formed on the substrate and adjacent to the fin structure. The semiconductor device includes a gate structure formed on at least a portion of the fin structure and the isolation layer. The semiconductor device includes an epitaxial layer including a strained material that provides stress to a channel region of the fin structure. The epitaxial layer has a first region and a second region, in which the first region has a first doping concentration of a first doping agent and the second region has a second doping concentration of a second doping agent. The first doping concentration is greater than the second doping concentration. The epitaxial layer is doped by ion implantation using phosphorous dimer.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chang Lin, Chun-Feng Nieh, Huicheng Chang, Hou-Yu Chen, Yong-Yan Lu
  • Patent number: 10510831
    Abstract: A high voltage transistor with low on resistance is disclosed. The transistor may include at least one cut out region in the drift region under the drain of the transistor. The cut out region is devoid of the drift well which connects the drain to the channel. Cut out regions may be distributed along the width direction of the drain region of the transistor. The transistor may alternatively or further include a vertical polysilicon plate surrounding the device region. The vertical polysilicon plate may be implemented as a deep trench isolation region. The deep trench isolation region includes a deep trench lined with an insulation collar and filled with polysilicon. The vertical polysilicon plate reduces an on resistance to improve device performance.
    Type: Grant
    Filed: February 19, 2018
    Date of Patent: December 17, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Namchil Mun, Jeoung Mo Koo, Shiang Yang Ong, Raj Verma Purakh
  • Patent number: 10510882
    Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 10490658
    Abstract: A power semiconductor device includes a plurality of vertical field effect transistor cells arranged in a plurality of parallel rows, each row including vertical field effect transistor cells arranged along a first direction, wherein in each vertical field effect transistor cell a body region is surrounded by the gate layer from two lateral surfaces of the body region opposite to each other. In each row of vertical field effect transistor cells the body regions are separated from each other in the first direction by first gate regions of the gate layer, each first gate region penetrating through the body layer, so that in each row of vertical field effect transistor cells the first gate regions alternate with the body regions along the first direction. The first gate regions within each row of vertical field effect transistor cells are connected with each other by second gate regions extending across the body regions of the respective vertical field effect transistor cells in the first direction.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: November 26, 2019
    Assignee: ABB Schweiz AG
    Inventors: Lars Knoll, Renato Minamisawa
  • Patent number: 10483396
    Abstract: An embodiment is a semiconductor structure. The semiconductor structure includes a substrate. A fin is on the substrate. The fin includes silicon germanium. An interfacial layer is over the fin. The interfacial layer has a thickness in a range from greater than 0 nm to about 4 nm. A source/drain region is over the interfacial layer. The source/drain region includes silicon germanium.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: November 19, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yun Chin, Chii-Horng Li, Chien-Wei Lee, Hsueh-Chang Sung, Heng-Wen Ting, Roger Tai, Pei-Ren Jeng, Tzu-Hsiang Hsu, Yen-Ru Lee, Yan-Ting Lin, Davie Liu
  • Patent number: 10483359
    Abstract: Disclosed is a power device, such as power MOSFET, and method for fabricating same. The device includes an upper trench situated over a lower trench, where the upper trench is wider than the lower trench. The device further includes a trench dielectric inside the lower trench and on sidewalls of the upper trench. The device also includes an electrode situated within the trench dielectric. The trench dielectric of the device has a bottom thickness that is greater than a sidewall thickness.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: November 19, 2019
    Assignee: Infineon Technologies Americas Corp.
    Inventors: Timothy D. Henson, Kapil Kelkar, Ljubo Radic
  • Patent number: 10461156
    Abstract: The Rds*Cgd figure of merit (FOM) of a laterally diffused metal oxide semiconductor (LDMOS) transistor is improved by forming the drain drift region with a number of dopant implants at a number of depths, and forming a step-shaped back gate region with a number of dopant implants at a number of depths to adjoin the drain drift region.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: October 29, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Jun Cai
  • Patent number: 10446435
    Abstract: A trap-rich polysilicon layer is interposed between the active (SOI) layer and the underlying handle portion of a semiconductor substrate to prevent or minimize parasitic surface conduction effects within the active layer and promote device linearity. In various embodiments, the trap-rich layer extends vertically through a portion of an isolation layer and laterally therefrom between the isolation layer and the handle portion of the substrate to underlie a portion of the device active area.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: October 15, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Steven M. Shank, Michel Abou-Khalil
  • Patent number: 10446581
    Abstract: A semiconductor integrated circuit device having a control signal system for avoiding failure to check an indefinite signal propagation prevention circuit, for facilitating a check included in an automated tool, and for facilitating a power shutdown control inside a chip. In the semiconductor integrated circuit device, power shutdown priorities are provided by independent power domains (Area A to Area I). A method for preventing a power domain having a lower priority from being turned OFF when a circuit having a high priority is turned ON is also provided.
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: October 15, 2019
    Assignee: Renesas Electronics Corporation
    Inventors: Yusuke Kanno, Hiroyuki Mizuno, Yoshihiko Yasu, Kenji Hirose, Takahiro Irita
  • Patent number: 10431650
    Abstract: A method of manufacturing a semiconductor device, including implanting hydrogen atoms from a second principal surface of a semiconductor substrate, forming a plurality of second semiconductor layers that each have a carrier concentration higher than that of the first semiconductor layer and that have carrier concentration peak values at different depths from the second principal surface of the semiconductor substrate, applying a heat treatment process to promote generation of donors from the hydrogen atoms, implanting an impurity from the second principal surface of the semiconductor substrate, forming a third semiconductor layer in the semiconductor substrate at the second principal surface thereof, and applying another heat treatment process to locally heat the semiconductor substrate, so as to reduce the carrier concentration at an interface between the third semiconductor layer and the second semiconductor layer adjacent to the third semiconductor layer.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: October 1, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Yuichi Onozawa
  • Patent number: 10418445
    Abstract: In a vertical MOSFET having a trench gate structure, a lifetime killer region is provided in a p-type epitaxial layer formed by epitaxial growth. The lifetime killer region includes an electron lifetime killer that causes electrons entering the lifetime killer region to recombine and become extinct. As a result, the lifetime killer region decreases the electrons generated at the pn interface of the p-type epitaxial layer and an n-type drift layer and enables a configuration in which electrons are not delivered to the p-type epitaxial layer.
    Type: Grant
    Filed: May 24, 2018
    Date of Patent: September 17, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Mina Ryo, Takeshi Tawara, Masaki Miyazato, Masaaki Miyajima
  • Patent number: 10418481
    Abstract: One embodiment is directed towards a method. The method includes forming a drift region of a first conductivity type above or in a substrate. The substrate has first and second surfaces. A first insulator is formed over a first portion of the channel, and which has a first thickness. A second insulator is formed over the second portion of the channel, and which has a second thickness that is less than the first thickness. A first gate is formed over the first insulator. A second gate is formed over the second insulator. A body region of a second conductivity type is formed above or in the substrate.
    Type: Grant
    Filed: October 20, 2017
    Date of Patent: September 17, 2019
    Assignee: Intersil Americas LLC
    Inventor: Dev Alok Girdhar
  • Patent number: 10411141
    Abstract: A semiconductor device includes: a semiconductor base body where a second semiconductor layer is stacked on a first semiconductor layer, a trench is formed on a surface of the second semiconductor layer, and a third semiconductor layer which is formed of an epitaxial layer is formed in the inside of the trench; a first electrode; an interlayer insulation film which has a predetermined opening; and a second electrode, wherein metal is filled in the opening, the opening is disposed at a position avoiding a center portion of the third semiconductor layer, the second electrode is connected to the third semiconductor layer through the metal, and a surface of the center portion of the third semiconductor layer is covered by the interlayer insulation film.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: September 10, 2019
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventors: Mizue Kitada, Takeshi Asada, Takeshi Yamaguchi, Noriaki Suzuki, Daisuke Arai
  • Patent number: 10403551
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate having a first device region and a second device region, a first fin over the substrate in the first device region, a second fin over the substrate in the second device region, a first epitaxial feature over the first fin in the source/drain region of the first fin, a second epitaxial feature over the second fin in the source/drain region of the second fin, and a dielectric layer on the first and second epitaxial features. The first epitaxial feature is doped with a first dopant of a first conductivity and the second epitaxial feature is doped with a second dopant of a second conductivity different from the first conductivity. The dielectric layer is doped with the first dopant.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: September 3, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 10396196
    Abstract: A semiconductor device includes a substrate, a semiconductor layer, a doped region, a device region, a first isolation structure, a second isolation structure and a terminal. The semiconductor layer is disposed over the substrate. The doped region is disposed in the semiconductor layer. The device region is disposed on the doped region and includes a source, a drain and a gate. The first isolation structure is disposed in the semiconductor layer and surrounds the doped region. The second isolation structure surrounds the first isolation structure and is spaced apart from the first isolation structure. The terminal is disposed between the first isolation structure and the second isolation structure, and is equipotential with the source.
    Type: Grant
    Filed: January 30, 2019
    Date of Patent: August 27, 2019
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Jui-Chun Chang, Shih-Kai Wu, Cheng-Yu Wang, Li-Yang Hong, Chia-Ming Hsu
  • Patent number: 10396200
    Abstract: A semiconductor device includes a gate arranged on a substrate; a source/drain formed on the substrate adjacent to the gate; a source/drain contact extending from the source/drain and through an interlayer dielectric (ILD) over the source/drain, a portion of the source/drain positioned adjacent to the source/drain contact; and a silicide positioned along a sidewall of the source/drain contact between the portion of the source/drain and the source/drain contact, and along an endwall of the source/drain contact between the source/drain contact and the substrate.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: August 27, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Injo Ok, Soon-Cheon Seo, Balasubramanian Pranatharthiharan, Charan V. V. S. Surisetty
  • Patent number: 10304924
    Abstract: According to one embodiment, a hydrogen concentration of a bottom part in a vicinity of a boundary with the insulating layer in the first silicon layer is higher than a hydrogen concentration of a part above the bottom part in the first silicon layer. And a resistivity of the bottom part in the first silicon layer is lower than a resistivity of the part above the bottom part in the first silicon layer.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: May 28, 2019
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Ryo Wada
  • Patent number: 10297677
    Abstract: Methods are directed to forming an electronic semiconductor device that includes a body having a first side and a second side opposite to one another and including a first structural region facing the second side, and a second structural region extending over the first structural region and facing the first side. A body region extends in the second structural region at the first side. A source region extends inside the body region and a lightly-doped drain region faces the first side of the body. A gate electrode is formed over the body region. A trench dielectric region extends through the second structural region in a first trench conductive region immediately adjacent to the trench dielectric region. A second trench conductive region is in electrical contact with the body region and source region. An electrical contact on the body is in electrical contact with the drain region through the first structural region.
    Type: Grant
    Filed: March 21, 2018
    Date of Patent: May 21, 2019
    Assignee: STMicroelectronics S.r.l.
    Inventors: Antonello Santangelo, Salvatore Cascino, Leonardo Gervasi
  • Patent number: 10298184
    Abstract: Transistors may be manufactured with a shared drain to reduce die area consumed by circuitry. In one example, two transistors can be manufactured that include two body regions that abut a shared drain region. The two transistors can be independently operated by coupling terminals to a source and a gate for each transistor and the shared drain. Characteristics of the two transistors can be controlled by adjusting feature sizes, such as overlap between the gate and the shared drain for a transistor. In particular, two transistors with different voltage requirements can be manufactured using a shared drain structure, which can be useful in amplifier circuitry and in particular Class-D amplifiers.
    Type: Grant
    Filed: March 16, 2016
    Date of Patent: May 21, 2019
    Assignee: Cirrus Logic, Inc.
    Inventors: Shanjen Pan, Marc L. Tarabbia, Christian Larsen
  • Patent number: 10290702
    Abstract: A metal-oxide-semiconductor field-effect transistor (MOSFET) power device includes an active region formed on a bulk semiconductor substrate, the active region having a first conductivity type formed on at least a portion of the bulk semiconductor substrate. A first terminal is formed on an upper surface of the structure and electrically connects with at least one other region having the first conductivity type formed in the active region. A buried well having a second conductivity type is formed in the active region and is coupled with a second terminal formed on the upper surface of the structure. The buried well and the active region form a clamping diode which positions a breakdown avalanche region between the buried well and the first terminal. A breakdown voltage of at least one of the power devices is a function of characteristics of the buried well.
    Type: Grant
    Filed: April 21, 2017
    Date of Patent: May 14, 2019
    Assignee: Silanna Asia Pte Ltd
    Inventors: Michael A. Stuber, Stuart B. Molin, Jacek Korec, Boyi Yang
  • Patent number: 10283635
    Abstract: The field effect transistor device comprises a substrate (1) of semiconductor material, a body well of a first type of electric conductivity in the substrate, a source region in the body well, the source region having an opposite second type of electric conductivity, a source contact (3) on the source region, a body contact region of the first type of electric conductivity in the body well, a body contact (5) on the body contact region, and a gate electrode layer (2) partially overlapping the body well. A portion (2*) of the gate electrode layer (2) is present between the source contact (3) and the body contact (5).
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: May 7, 2019
    Assignee: ams AG
    Inventors: Martin Knaipp, Georg Roehrer, Jong Mun Park
  • Patent number: 10276664
    Abstract: A semiconductor device having a channel formed from a nanowire with a multi-dimensional diameter is provided. The semiconductor device comprises a drain region formed on a semiconductor substrate. The semiconductor device further comprises a nanowire structure formed between a source region and the drain region. The nanowire structure has a first diameter section joined with a second diameter section. The first diameter section is coupled to the drain region and has a diameter greater than the diameter of the second diameter section. The second diameter section is coupled to the source region. The semiconductor device further comprises a gate region formed around the junction at which the first diameter section and the second diameter section are joined.
    Type: Grant
    Filed: February 10, 2014
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Tsung-Hsing Yu, Chia-Wen Liu, Yeh Hsu, Jean-Pierre Colinge
  • Patent number: 10236375
    Abstract: A high voltage MOS device includes: a well region with a first conductive type, a body region with a second conductive type, a gate, plural source regions with the first conductive type, a drain region with the first conductive type, and a body contact region with the second conductive type. The plural source regions contact the gate, and are substantially arranged in parallel along a width direction, and each two neighboring source regions are not contacted with each other. The body connection region extends along the width direction and overlaps with at least two of the source regions, such that the body connection region includes at least a first region and a second region, wherein the first region overlaps with at least one of the source regions, and the second region does not overlap any of the regions. The contact region does not contact the gate along a lateral direction.
    Type: Grant
    Filed: February 5, 2018
    Date of Patent: March 19, 2019
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Tsung-Yi Huang, Chu-Feng Chen
  • Patent number: 10236285
    Abstract: A semiconductor device includes a semiconductor substrate and a pair of first well regions formed in the semiconductor substrate, wherein the pair of first well regions have a first conductivity type and are separated by at least one portion of the semiconductor substrate. The semiconductor device also includes a first doping region formed in a portion of at least one portion of the semiconductor substrate separating the pair of first well regions, and a pair of second doping regions, respectively formed in one of the pair of first well regions, having the first conductivity type. Further, the semiconductor device includes a pair of insulating layers, respectively formed over a portion of the semiconductor substrate to cover a portion of the first doped region and one of the pair of second doping regions.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: March 19, 2019
    Assignee: MEDIATEK INC.
    Inventors: Chien-Kai Huang, Yuan-Fu Chung, Bo-Shih Huang, Chang-Tzu Wang
  • Patent number: 10230004
    Abstract: The present disclosure provides a TFT, an array substrate and a fabricating method thereof and a display device. The TFT includes a gate, an active layer, a first electrode and a second electrode, the first electrode is arranged at one side of the active layer, the second electrode is arranged at the other side of the active layer, the first electrode, the active layer and the second electrode forms a stacked structure, the gate is arranged to surround the stacked structure, and the gate and the stacked structure are insulated and separated from each other. Under fixed occupation area, the conductive channel of the TFT of the present disclosure has increased width, so drain current in saturation region is increased without impacting aperture ratio of a display panel, which further optimizes performance of the TFT and the array substrate, and improves display effect of the display device.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: March 12, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Shaozhuan Wang
  • Patent number: 10217814
    Abstract: A semiconductor device including a substrate, a metal-oxide-semiconductor field-effect transistor (MOSFET), and a plurality of junction gate field-effect transistors (JFETs) connected in parallel is provided. The MOSFET is disposed on a substrate. The MOSFET includes a source region, a drain region, and a gate structure disposed between the source region and the drain region. The JFETs and the MOSFET are connected in series. Each of the JFETs laterally extends between the source region and the drain region.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: February 26, 2019
    Assignee: Nuvoton Technology Corporation
    Inventor: Wen-Ying Wen
  • Patent number: 10211337
    Abstract: To provide a high-withstand-voltage lateral semiconductor device in which ON-resistance or drain current density is uniform at an end portion and a center portion of the device in a gate width direction. A lateral N-type MOS transistor 11 formed on an SOI substrate includes a trench isolation structure 10b filled with an insulating film at an end portion of the transistor. An anode region 6 of a diode 12 is provided adjacent to a P-type body region 1 of the transistor through the trench isolation structure 10b and a cathode region 15 of the diode 12 is also provided adjacent to an N-type drain-drift region 4 of the transistor through the trench isolation structure 10b so as to cause electric field to be applied to the trench isolation structure 10b to be zero when a voltage is applied across the transistor.
    Type: Grant
    Filed: October 22, 2014
    Date of Patent: February 19, 2019
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventor: Shinichirou Wada
  • Patent number: 10204899
    Abstract: In a non-insulated DC-DC converter having a circuit in which a power MOS?FET high-side switch and a power MOS?FET low-side switch are connected in series, the power MOS?FET low-side switch and a Schottky barrier diode to be connected in parallel with the power MOS?FET low-side switch are formed within one semiconductor chip. The formation region SDR of the Schottky barrier diode is disposed in the center in the shorter direction of the semiconductor chip, and on both sides thereof, the formation regions of the power MOS?FET low-side switch are disposed. From the gate finger in the vicinity of both long sides on the main surface of the semiconductor chip toward the formation region SDR of the Schottky barrier diode, a plurality of gate fingers are disposed so as to interpose the formation region SDR between them.
    Type: Grant
    Filed: September 11, 2017
    Date of Patent: February 12, 2019
    Assignee: Renesas Electronics Corporation
    Inventors: Masaki Shiraishi, Tomoaki Uno, Nobuyoshi Matsuura
  • Patent number: 10181513
    Abstract: A power device having fast switching characteristic, while keeping EMI noise to a minimum and a method of fabricating the same are provided. The power device includes a first field stop layer having a first conductivity type, a first drift region formed on the first field stop layer and having a first conductivity type in an impurity concentration that is lower than the first field stop layer, a buried region formed on the first drift region and having the first conductivity type in an impurity concentration that is higher than the first drift region, a second drift region formed on the buried region, a power device cell formed at an upper portion of the second drift region, and a collector region formed below the first field stop layer.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: January 15, 2019
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Jae-duck Jeon, Young-chul Kim, Kyeong-seok Park, Jin-myung Kim, Young-chul Choi
  • Patent number: 10177252
    Abstract: A device includes a semiconductor substrate, a doped isolation barrier disposed in the semiconductor substrate, a body region disposed in the semiconductor substrate within the doped isolation barrier and in which a channel is formed during operation, an isolation contact disposed at the semiconductor substrate and to which a voltage is applied during operation, and a plurality of reduced surface field (RESURF) layers disposed in the semiconductor substrate, the plurality of reduced surface field (RESURF) layers being arranged in a stack between the body region and the isolation contact.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: January 8, 2019
    Assignee: NXP USA, Inc.
    Inventors: Xin Lin, Hongning Yang, Ronghua Zhu, Jiang-Kai Zuo
  • Patent number: 10158001
    Abstract: A semiconductor structure includes a source drain region of a first material and an extension region of a second material. A semiconductor device fabrication process includes forming a sacrificial dielectric portion upon a semiconductor substrate, forming a sacrificial gate stack upon the sacrificial dielectric portion, forming a gate spacer upon the sacrificial dielectric portion against the sacrificial gate, forming a source drain region of a first doped material upon the semiconductor substrate against the gate spacer, forming a replacement gate trench by removing the sacrificial gate stack, forming an extension trench by removing the sacrificial dielectric portion, and forming an extension region of a second doped material within the extension trench.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: December 18, 2018
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek