Dynamic Random Access Memory, Dram, Structure (epo) Patents (Class 257/E27.084)
  • Patent number: 7608506
    Abstract: A semiconductor structure for a dynamic random access memory (DRAM) cell array that includes a plurality of vertical memory cells built on a semiconductor-on-insulator (SOI) wafer and a body contact in the buried dielectric layer of the SOI wafer. The body contact electrically couples a semiconductor body with a channel region of the access device of one vertical memory cell and a semiconductor substrate of the SOI wafer. The body contact provides a current leakage path that reduces the impact of floating body effects upon the vertical memory cell. The body contact may be formed by an ion implantation process that modifies the stoichiometry of a region of the buried dielectric layer so that the modified region becomes electrically conductive with a relatively high resistance.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: October 27, 2009
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Louis Lu-Chen Hsu, Jack Allan Mandelman
  • Publication number: 20090261396
    Abstract: In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a method includes forming a portion of the unidirectional transistor and a portion of a bidirectional transistor in or over a semiconductor material simultaneously. Other embodiments are described and claimed.
    Type: Application
    Filed: October 21, 2008
    Publication date: October 22, 2009
    Inventor: Bishnu P. Gogoi
  • Patent number: 7605409
    Abstract: A semiconductor device includes first and second unit circuits. Each first unit circuit has first transistors connected in series, wherein each of the first transistors includes a first gate structure having a pitch. Each second unit circuit has second transistors connected in series, wherein each of the second transistors includes a second gate structure having the pitch. A third transistor and a fourth transistor electrically isolate each of the first and second unit circuits, respectively. An insulation layer covers the first through the fourth transistors. Plugs in the insulation layer are connected to a first gate structure, a second gate structure, a first source region, a first drain region, a second source region or a second drain region. A wiring is connected to the plugs.
    Type: Grant
    Filed: February 9, 2007
    Date of Patent: October 20, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Soon-Hong Ahn, Sang-Pyo Hong
  • Publication number: 20090256237
    Abstract: A miniaturized semiconductor device is provided by reducing the design thickness of a wiring line protecting film covering the surface of a wiring layer, and reducing the distance between the wiring layer and via plugs formed by a self-aligning process. Dummy mask layers extending in the same layout pattern as the wiring layer is formed above the wiring layer covered with a protecting film composed of a cap layer and side wall layers. In the self-aligning process for forming via plugs in a self-aligned manner with the wiring layer and its protecting film, the thickness of the cap layer is reduced and the design interval between the via plugs is reduced, whereby the miniaturization of the semiconductor device is achieved.
    Type: Application
    Filed: April 8, 2009
    Publication date: October 15, 2009
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Hirotaka KOBAYASHI
  • Publication number: 20090256182
    Abstract: A semiconductor memory device includes a memory cell portion and a peripheral circuit portion. The memory cell portion includes a pillar capacitor with a lower electrode, a dielectric film, and an upper electrode sequentially formed on a side surface of a first insulating portion which is parallel to a predetermined direction, and a transistor electrically connected to the lower electrode. The peripheral circuit portion includes a plate electrode, a cylinder capacitor with an upper electrode, a dielectric film, and a lower electrode sequentially formed on a side surface of the plate electrode which is parallel to the predetermined direction, and a transistor electrically connected to the lower electrode.
    Type: Application
    Filed: April 9, 2009
    Publication date: October 15, 2009
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Mitsunari SUKEKAWA
  • Publication number: 20090256180
    Abstract: A standard cell includes a capacity element which is made up of a first well diffusion layer into which a first conductive impurity is diffused in a region from a surface of a substrate to a predetermined depth, an insulation film which is provided on the first well diffusion layer, and a first dummy pattern which is provided on the insulation film.
    Type: Application
    Filed: April 9, 2009
    Publication date: October 15, 2009
    Applicant: Elpida Memory, Inc.
    Inventor: Shoji Azuma
  • Patent number: 7601630
    Abstract: A method of fabricating a semiconductor memory device and a structure that forms both a resistor and an etching protection layer to reduce a contact resistance. The method of fabricating a semiconductor memory device according to the invention includes forming an insulation layer on a semiconductor substrate having a cell array region, a core region, and a peripheral region, each having at least one transistor formed therein, and forming both a first landing pad in the core region on the insulation layer and a second landing pad in the peripheral region, the first landing pad being overlapped with a part of a first conductive line. The invention reduces the contact resistance and prevents or minimizes a device failure caused by a misalignment, with the simplified process.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: October 13, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Je-Min Park, Dong-Won Shin, Yoo-Sang Hwang
  • Patent number: 7602001
    Abstract: This invention includes a capacitorless one transistor DRAM cell that includes a pair of spaced source/drain regions received within semiconductive material. An electrically floating body region is disposed between the source/drain regions within the semiconductive material. A first gate spaced is apart from and capacitively coupled to the body region between the source/drain regions. A pair of opposing conductively interconnected second gates are spaced from and received laterally outward of the first gate. The second gates are spaced from and capacitively coupled to the body region laterally outward of the first gate and between the pair of source/drain regions. Methods of forming lines of capacitorless one transistor DRAM cells are disclosed.
    Type: Grant
    Filed: July 17, 2006
    Date of Patent: October 13, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Fernando Gonzalez
  • Publication number: 20090251946
    Abstract: Disclosed are methods and devices, among which is a device that includes a first semiconductor fin having a first gate, a second semiconductor fin adjacent the first semiconductor fin and having a second gate, and a third gate extending between the first semiconductor fin and the second semiconductor fin. In some embodiments, the third gate may not be electrically connected to the first gate or the second gate.
    Type: Application
    Filed: April 3, 2008
    Publication date: October 8, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Werner Juengling
  • Publication number: 20090251966
    Abstract: A semiconductor memory cell, semiconductor memory devices comprising a plurality of the semiconductor memory cells, and methods of using the semiconductor memory cell and devices are described. A semiconductor memory cell includes a substrate having a first conductivity type; a first region embedded in the substrate at a first location of the substrate and having a second conductivity type; a second region embedded in the substrate at a second location of the substrate and have the second conductivity type, such that at least a portion of the substrate having the first conductivity type is located between the first and second locations and functions as a floating body to store data in volatile memory; a trapping layer positioned in between the first and second locations and above a surface of the substrate; the trapping layer comprising first and second storage locations being configured to store data as nonvolatile memory independently of one another; and a control gate positioned above the trapping layer.
    Type: Application
    Filed: April 8, 2009
    Publication date: October 8, 2009
    Inventor: Yuniarto Widjaja
  • Patent number: 7598543
    Abstract: A semiconductor memory component comprises at least one memory cell. The memory cell comprises a semiconductor body comprised of a body region, a drain region and a source region, a gate dielectric, and a gate electrode. The body region comprises a first conductivity type and a depression between the source and drain regions, and the source and drain regions comprise a second conductivity type. The gate electrode is arranged at least partly in the depression and is insulated from the body, source, and drain regions by the gate dielectric. The body region further comprises a first continuous region with a first dopant concentration and a second continuous region with a second dopant concentration greater than the first dopant concentration. The first continuous region adjoins the drain region, the depression and the source region, and the second region is arranged below the first region and adjoins the first region.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: October 6, 2009
    Assignee: Qimonda AG
    Inventors: Franz Hofmann, Richard Johannes Luyken, Wolfgang Roesner, Michael Specht, Martin Staedele
  • Patent number: 7598558
    Abstract: In a complete CMOS SRAM having a memory cell composed of six MISFETs formed over a substrate, a capacitor element having a stack structure is formed of a lower electrode covering the memory cell, an upper electrode, and a capacitor insulating film (dielectric film) interposed between the lower electrode and the upper electrode. One electrode (the lower electrode) of the capacitor element is connected to one storage node of a flip-flop circuit, and the other electrode (the upper electrode) is connected to the other storage node. As a result, the storage node capacitance of the memory cell of the SRAM is increased to improve the soft error resistance.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: October 6, 2009
    Assignee: Renesas Technology Corp.
    Inventors: Naotaka Hashimoto, Yutaka Hoshino, Shuji Ikeda
  • Publication number: 20090242952
    Abstract: An integrated circuit including a capacitor and a method of fabricating an integrated circuit. The capacitor has a first electrode. A plurality of conductive lines is separated from each other and is configured to be held at a potential being the same for all conductive lines. A second electrode encloses individual ones of the conductive lines at a top side and at least one lateral side and is separated from the first electrode by a dielectric layer. The second electrode includes a polycrystalline semiconductor material, a metal or a metal-semiconductor compound.
    Type: Application
    Filed: March 27, 2008
    Publication date: October 1, 2009
    Applicant: QIMONDA AG
    Inventors: Frank Heinrichsdorff, Steffen Meyer, Jens Schmidt
  • Publication number: 20090242953
    Abstract: Forming a shallow trench capacitor in conjunction with an FET by forming a plurality of STI trenches; for the FET, implanting a first cell well having a first polarity between a first and a second of the STI trenches; for the capacitor, implanting a second cell well having a second polarity in an area of a third of the STI trenches; removing dielectric material from the third STI trench; forming a gate stack having a first portion located between the first and the second of the STI trenches and a second portion located over and extending into the third trench; and performing a source/drain implant of the same polarity as the second cell well, thereby forming a FET in the first cell well, and a capacitor in the second cell well. The second polarity may be opposite from the first polarity. An additional implant may reduce ESR in the second cell well.
    Type: Application
    Filed: March 31, 2008
    Publication date: October 1, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Roger A. Booth, JR., MaryJane Brodsky, Kangguo Cheng, Chengwen Pei
  • Patent number: 7595521
    Abstract: A process and apparatus directed to forming a terraced film stack of a semiconductor device, for example, a DRAM memory device, is disclosed. The present invention addresses etch undercut resulting from materials of different etch selectivity used in the film stack, which if not addressed can cause device failure.
    Type: Grant
    Filed: November 20, 2008
    Date of Patent: September 29, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Robert J. Hanson, Alex Schrinsky, Terry McDaniel
  • Publication number: 20090236602
    Abstract: An integrated circuit mounting a DRAM which can realize high integration without complicated manufacturing steps. The integrated circuit according to the invention comprises a DRAM in which a plurality of memory cells each having a thin film transistor are disposed. The thin film transistor comprises an active layer including a channel forming region, and first and second electrodes overlapping with each other with the channel forming region interposed therebetween. By controlling a drain voltage of the thin film transistor according to data, it is determined whether to accumulate holes in the channel forming region or not, and data is read out by confirming whether or not holes are accumulated.
    Type: Application
    Filed: May 29, 2009
    Publication date: September 24, 2009
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventor: Kiyoshi Kato
  • Patent number: 7592649
    Abstract: A memory device with improved word line structure is disclosed. The memory device includes a plurality of polysilicon strips substantially parallel to each other on the substrate, the plurality of polysilicon strips arranged in two interleaved groups of a first group and a second group. The memory device further includes a first layer of conductive strips forming a plurality of bit lines and a second layer of meal strips, the second layer of conductive strips overlying the polysilicon strips and coupled to the first group of polysilicon strips. In addition, the memory device includes a third layer of conductive strips forming one or more power line, and a fourth layer of metal strips, the fourth layer of conductive strips overlying the second layer of conductive strips and coupled to the second group of polysilicon strips to form a new word line structure having a low resistance.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: September 22, 2009
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shine Chung, Cheng-Hsien Hung
  • Publication number: 20090230447
    Abstract: A semiconductor device may include a capacitor and a transistor on a silicon-on-insulator (SOI) substrate and a method for manufacturing the semiconductor device may include forming such a structure. A semiconductor device, formed on a silicon-on-insulator structure including first and second silicon layers and a insulating layer buried between the first and the second silicon layers, may include a capacitor including one electrode formed in a doped region of the first silicon layer and the other electrode formed in a well region of the second silicon layer.
    Type: Application
    Filed: June 27, 2008
    Publication date: September 17, 2009
    Applicant: HYNIX SEMICONDUCTOR INC.
    Inventor: Sang Min Hwang
  • Publication number: 20090230510
    Abstract: A rutile phase can be formed even in the case of a thin film by adding nickel or cobalt to titanium dioxide in the range of 0.5 to 10 atm %, and the use of this element-added titanium dioxide film in a capacitor dielectric film results in an increase in capacitance per unit area of a DRAM memory cell and enables a high-integration DRAM to be realized at low cost.
    Type: Application
    Filed: March 9, 2009
    Publication date: September 17, 2009
    Applicant: Elpida Memory, Inc.
    Inventors: Hiroshi Miki, Tomoko Sekiguchi, Naomi Inada, Mitsuhiro Horikawa
  • Publication number: 20090230448
    Abstract: In a semiconductor integrated circuit device, testing pads (209b) using a conductive layer, such as relocation wiring layers (205) are provided just above or in the neighborhood of terminals like bonding pads (202b) used only for probe inspection at which bump electrodes (208) are not provided. Similar testing pads may be provided even with respect to terminals like bonding pads provided with bump electrodes. A probe test is executed by using these testing pads or under the combined use of under bump metallurgies antecedent to the formation of the bump electrodes together with the testing pads. According to the above, bump electrodes for pads dedicated for probe testing may not be added owing to the use of the testing pads. Further, the use of testing pads provided in the neighborhood of the terminals like the bonding pads and smaller in size than the under bump metallurgies enables a probe test to be executed after a relocation wiring process.
    Type: Application
    Filed: April 30, 2009
    Publication date: September 17, 2009
    Applicant: RENESAS TECHNOLOGY CORP.
    Inventors: Asao Nishimura, Syouji Syukuri, Gorou Kitsukawa, Toshio Miyamoto
  • Publication number: 20090224301
    Abstract: A semiconductor memory device comprises a field effect transistor including a source/drain region, an interlayer insulation film burying the field effect transistor, a ferroelectric capacitor including a lower electrode, a ferroelectric film and an upper electrode, the lower electrode with a concave-convex surface, and a plug electrically connecting between the source/drain region and the ferroelectric capacitor. A height and a size in an in-place direction of each convex portion in the concave-convex surface is 1 to 50 nm. The ferroelectric film includes a lower ferroelectric film with a predetermined height from the lower electrode and an upper ferroelectric film formed on the lower ferroelectric film as being formed from the same material as the lower ferroelectric film. The lower ferroelectric film includes a part of which at least one of composition, crystallizing orientation and size of a crystalline particle being different from a crystalline particle in the upper ferroelectric film.
    Type: Application
    Filed: March 6, 2009
    Publication date: September 10, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Koji Yamakawa, Soichi Yamazaki
  • Patent number: 7582524
    Abstract: A method for preparing a memory structure comprises the steps of forming a plurality of line-shaped blocks on a dielectric structure of a substrate, and forming a first etching mask exposing a sidewall of the line-shaped blocks. A portion of the line-shaped blocks is removed incorporating the first etching mask to reduce the width of the line-shaped blocks to form a second etching mask including a plurality of first blocks and second blocks arranged in an interlaced manner. Subsequently, a portion of the dielectric structure not covered by the second etching mask is removed to form a plurality of openings in the dielectric structure, and a conductive plug is formed in each of the openings. The plurality of openings includes first openings positioned between the first blocks and second openings positioned between the second blocks, and the first opening and the second opening extend to opposite sides of an active area.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: September 1, 2009
    Assignee: Promos Technologies Inc.
    Inventors: Jung Wu Chien, Chia Shun Hsiao
  • Publication number: 20090212338
    Abstract: Some embodiments include methods of forming semiconductor constructions. Oxide is formed over a substrate, and first material is formed over the oxide. Second material is formed over the first material. The second material may be one or both of polycrystalline and amorphous silicon. A third material is formed over the second material. A pattern is transferred through the first material, second material, third material, and oxide to form openings. Capacitors may be formed within the openings. Some embodiments include semiconductor constructions in which an oxide is over a substrate, a first material is over the oxide, and a second material containing one or both of polycrystalline and amorphous silicon is over the first material. Third, fourth and fifth materials are over the second material. An opening may extend through the oxide; and through the first, second, third, fourth and fifth materials.
    Type: Application
    Filed: February 26, 2008
    Publication date: August 27, 2009
    Inventor: Russell A. Benson
  • Publication number: 20090207681
    Abstract: Disclosed are methods, systems and devices, including a device having a fin field-effect transistor with a first terminal, a second terminal, and two gates. In some embodiments, the device includes a local data line connected to the first terminal, at least a portion of a capacitor plate connected to the second terminal, and a global data line connected to the local data line by the capacitor plate.
    Type: Application
    Filed: February 19, 2008
    Publication date: August 20, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Werner Juengling
  • Publication number: 20090200593
    Abstract: A semiconductor device comprises MOS transistors sequentially arranged in the plane direction of a substrate, wherein a gate electrode and a wiring portion for connecting between the gate electrodes to each other are implanted into a layer that is lower than a surface of the substrate in which a diffusion layer has been formed. A first device isolation area with a STI structure for separating the diffusion layers that function as a source/drain area is formed on the surface of the substrate. A second device isolation area with the STI structure for separating channel areas of the MOS transistors adjacent to each other is formed in a layer that is lower than a layer that has the first device isolation area.
    Type: Application
    Filed: January 28, 2009
    Publication date: August 13, 2009
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Hiroyuki UCHIYAMA
  • Patent number: 7572670
    Abstract: The invention includes semiconductor packages having a patterned substrate with openings extending therethrough, conductive circuit traces over the substrate and having portions extending over the openings, a semiconductor die over the circuit traces, and a matrix contacting the circuit traces and also contacting the die. The invention also includes methods of forming semiconductor packages. Such methods can include provision of a construction comprising an electrically conductive layer on a masking material. The layer has a first surface facing the masking material and a second surface in opposing relation to the first surface. The masking material is patterned to form openings extending to the first surface of the layer. The layer is then patterned. Subsequently, an integrated circuit die is provided over the second surface of the layer.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: August 11, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Lee Teck Kheng
  • Publication number: 20090194802
    Abstract: The invention includes methods for utilizing partial silicon-on-insulator (SOI) technology in combination with fin field effect transistor (finFET) technology to form transistors particularly suitable for utilization in dynamic random access memory (DRAM) arrays. The invention also includes DRAM arrays having low rates of refresh. Additionally, the invention includes semiconductor constructions containing transistors with horizontally-opposing source/drain regions and channel regions between the source/drain regions. The transistors can include gates that encircle at least three-fourths of at least portions of the channel regions, and in some aspects can include gates that encircle substantially an entirety of at least portions of the channel regions.
    Type: Application
    Filed: August 6, 2008
    Publication date: August 6, 2009
    Inventor: Mark Fischer
  • Publication number: 20090189222
    Abstract: A memory includes a U-shape layer on a substrate; a first diffusion layer provided at an upper part of the U-shaped layer; a second diffusion layer provided at a lower part of the U-shaped layer; a body formed at an intermediate portion of the U-shaped layer between the first and the second diffusion layers; a first gate dielectric film provided on an outer side surface of the U-shaped layer; a first gate electrode provided on the first gate dielectric film; a second gate dielectric film provided on an inner side surface of the U-shaped layer; a second gate electrode provided on the second gate dielectric film; a bit line contact connecting the bit line to the first diffusion layer; a source line contact connecting the source line to the second diffusion layer, wherein cells adjacent in the first direction alternately share the bit line contact and the source line contact.
    Type: Application
    Filed: January 27, 2009
    Publication date: July 30, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Tomoaki SHINO
  • Publication number: 20090189209
    Abstract: In a full CMOS SRAM having a lateral type cell (memory cell having three partitioned wells arranged side by side in a word line extending direction and longer in the word line direction than in the bit line direction) including first and second driver MOS transistors, first and second load MOS transistors and first and second access MOS transistors, two capacitors are arranged spaced apart from each other on embedded interconnections to be storage nodes, with lower and upper cell plates cross-coupled to each other.
    Type: Application
    Filed: March 2, 2009
    Publication date: July 30, 2009
    Applicant: RENESAS TECHNOLOGY CORP.
    Inventor: Takahiro YOKOYAMA
  • Patent number: 7566603
    Abstract: A method for manufacturing a semiconductor device having a metal silicide layer comprises forming a structure including a plurality of gate stacks formed on a semiconductor substrate, forming a gate spacer layer formed on an upper surface of the semiconductor substrate and around a sidewall of each gate stack, and forming an insulation layer between the gate stacks. The method further comprises forming a metal silicide layer on an exposed surface of the semiconductor substrate between the gate stacks.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: July 28, 2009
    Assignee: Hynix Semiconductor Inc.
    Inventor: Hyo Geun Yoon
  • Publication number: 20090184351
    Abstract: A semiconductor device includes a semiconductor substrate, an active region formed in the semiconductor substrate and extending in a first direction, the active region including a transistor sub-region and a capacitor sub-region, a first trench extending around the transistor sub-region, an isolation layer disposed in the first trench, a second trench extending around the capacitor sub-region, a first transistor including a first insulating layer disposed on the transistor sub-region, the first transistor including a first conductive layer disposed on the first insulating layer, and a first capacitor including a second insulating layer extending over the capacitor sub-region and a sidewall of the second trench, the first capacitor including a second conductive layer disposed on the second insulating layer, the active region having an end portion in the first direction opposite to the transistor sub-region and extending across the first capacitor.
    Type: Application
    Filed: January 15, 2009
    Publication date: July 23, 2009
    Applicant: FUJITSU MICROELECTRONICS LIMITED
    Inventors: Hiroyuki OGAWA, Jun LIN, Hideyuki KOJIMA
  • Publication number: 20090184354
    Abstract: A semiconductor device, having a memory cell region and a peripheral circuit region, includes an insulating film, having an upper surface, formed on a major surface of a semiconductor substrate to extend from the memory cell region to the peripheral circuit region. A capacitor lower electrode assembly is formed in the memory cell region to upwardly extend to substantially the same height as the upper surface of the insulating film on the major surface of the semiconductor substrate. Additionally, the lower electrode assembly includes first and second lower electrodes that are adjacent through the insulating film. A capacitor upper electrode is formed on the capacitor lower electrode through a dielectric film, to extend onto the upper surface of the insulating film. The capacitor lower electrode includes a capacitor lower electrode part having a top surface and a bottom surface.
    Type: Application
    Filed: February 10, 2009
    Publication date: July 23, 2009
    Applicant: RENESAS TECHNOLOGY CORP.
    Inventors: Yoshinori TANAKA, Masahiro Shimizu, Hideaki Arima
  • Patent number: 7564088
    Abstract: A memory cell which is formed on a substrate of a first conductivity type. A pillar of the first conductivity type extends vertically upward from the substrate. A source region of a second conductivity type is formed in the substrate extending adjacent to and away from a base of the pillar. A drain region of the second conductivity type is formed in an upper region of the pillar. A gate dielectric and conductor are arranged along a first side of the pillar. A capacitor dielectric and body capacitor plate are arranged along an opposite, second side of the pillar. A depletion region around the source region defines a floating body region within the pillar which forms both a body of an access transistor structure and a plate of a capacitor structure. The cell also provides gain with respect to charge stored within the floating body.
    Type: Grant
    Filed: August 1, 2006
    Date of Patent: July 21, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Leonard Forbes
  • Patent number: 7560337
    Abstract: Programmable resistive RAM cells have a resistance that depends on the size of the contacts. Manufacturing methods and integrated circuits for lowered contact resistance are disclosed that have contacts of reduced size.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: July 14, 2009
    Assignee: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh-Kun Lai, Kuang Yeu Hsieh
  • Publication number: 20090173980
    Abstract: A memory cell has an access transistor and a capacitor with an electrode disposed within a deep trench. STI oxide covers at least a portion of the electrode, and a liner covers a remaining portion of the electrode. The liner may be a layer of nitride over a layer of oxide. Some of the STI may cover a portion of the liner. In a memory array a pass wordline may be isolated from the electrode by the STI oxide and the liner.
    Type: Application
    Filed: January 7, 2008
    Publication date: July 9, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Johnathan E. Faltermeier, Herbert L. Ho, Paul C. Parries
  • Publication number: 20090173982
    Abstract: A memory cell, device, and system include a memory cell having a shared digitline, a storage capacitor, and a plurality of access transistors configured to selectively electrically couple the storage capacitor with the shared digitline. The digitline couples with adjacent memory cells and the plurality of access transistor selects which adjacent memory cell is coupled to the shared digitline. A method of forming the memory cell includes forming a buried digitline in the substrate and a vertical pillar in the substrate immediately adjacent to the buried digitline. A dual gate transistor is formed on the vertical pillar with a first end electrically coupled to the buried digitline and a second end coupled to a storage capacitor formed thereto.
    Type: Application
    Filed: March 17, 2009
    Publication date: July 9, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: H. Montgomery Manning, David H. Wells
  • Publication number: 20090174082
    Abstract: A Three-Dimensional Structure (3DS) Memory allows for physical separation of the memory circuits and the control logic circuit onto different layers such that each layer may be separately optimized. One control logic circuit suffices for several memory circuits, reducing cost. Fabrication of 3DS memory involves thinning of the memory circuit to less than 50 ?m in thickness and bonding the circuit to a circuit stack while still in wafer substrate form Fine-grain high density inter-layer vertical bus connections are used. The 3DS memory manufacturing method enables several performance and physical size efficiencies, and is implemented with established semiconductor processing techniques.
    Type: Application
    Filed: March 17, 2009
    Publication date: July 9, 2009
    Inventor: Glenn J Leedy
  • Patent number: 7557001
    Abstract: The invention includes methods of forming electrically conductive material between line constructions associated with a peripheral region or a pitch region of a semiconductor substrate. The electrically conductive material can be incorporated into an electrically-grounded shield, and/or can be configured to create a magnetic field bias. Also, the conductive material can have electrically isolated segments that are utilized as electrical jumpers for connecting circuit elements. The invention also includes semiconductor constructions comprising the electrically conductive material between line constructions associated with one or both of the pitch region and the peripheral region.
    Type: Grant
    Filed: July 5, 2005
    Date of Patent: July 7, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Mark Fischer, Terrence B. McDaniel
  • Publication number: 20090166702
    Abstract: A trench-type semiconductor device structure is disclosed. The structure includes a semiconductor substrate, a gate dielectric layer and a substrate channel structure. The semiconductor substrate includes a trench having an upper portion and a lower portion. The upper portion includes a conductive layer formed therein. The lower portion includes a trench capacitor formed therein. The gate dielectric layer is located between the semiconductor substrate and the conductive layer. The substrate channel structure with openings, adjacent to the trench, is electrically connected to the semiconductor substrate via the openings.
    Type: Application
    Filed: July 22, 2008
    Publication date: July 2, 2009
    Applicant: NANYA TECHNOLOGY CORP.
    Inventors: Shian-Jyh LIN, Ming-Cheng Chang, Neng Tai Shih, Hung-Chang Liao
  • Publication number: 20090166703
    Abstract: A memory device is provided. The memory device includes a substrate, a trench having an upper portion and a lower portion formed in the substrate, a trench capacitor formed in the lower portion of the trench, a collar dielectric layer formed on a sidewall of the trench capacitor and extending away from a top surface of the substrate, a first doping region formed on a side of the upper portion of the trench in the substrate for serving as source/drain, a conductive layer formed in the trench and electrically connected to the first doping region, a top dielectric layer formed on conductive layer, a gate formed on the top dielectric layer, an epitaxy layer formed on both sides of the gate and on the substrate and a second doping area formed on a top of the epitaxy layer for serving as source/drain.
    Type: Application
    Filed: July 30, 2008
    Publication date: July 2, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Shian-Jyh LIN, Hung-Chang LIAO, Meng-Hung CHEN, Chung-Yuan LEE, Pei-Ing LEE
  • Publication number: 20090166701
    Abstract: In general, in one aspect, a method includes forming a semiconductor fin. A first insulating layer is formed adjacent to the semiconductor fin. A second insulating layer is formed over the first insulating layer and the semiconductor fin. A first trench is formed in the second insulating layer and the first insulating layer therebelow. The first trench is filed with a polymer. A third insulating layer is formed over the polymer. A second trench is formed in the third insulating layer, wherein the second trench is above the first trench and extends laterally therefrom. The polymer is removed from the first trench. A capacitor is formed within the first and the second trenches.
    Type: Application
    Filed: December 28, 2007
    Publication date: July 2, 2009
    Inventors: Brian S. Doyle, Dinesh Somasekhar, Robert S. Chau
  • Publication number: 20090159948
    Abstract: The present invention relates to a semiconductor device that contains a trench metal-insulator-metal (MIM) capacitor and a field effect transistor (FET), and a design structure including the semiconductor device embodied in a machine readable medium. The trench MIM capacitor comprises a first metallic electrode layer located over interior walls of a trench in a substrate, a dielectric layer located in the trench over the first metallic electrode layer, and a second metallic electrode layer located in the trench over the dielectric layer. The FET comprises a source region, a drain region, a channel region between the source and drain regions, and a gate electrode over the channel region. The trench MIM capacitor is connected to the FET by a metallic strap.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 25, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Herbert L. Ho, Subramanian S. Iyer, Vidhya Ramachandran
  • Publication number: 20090159947
    Abstract: The present invention provides a semiconductor structure that includes an active wordline located above a semiconductor memory device and a passive wordline located adjacent to said active wordline and above an active area of a substrate. In accordance with the present invention, the passive wordline is separated from the active area by a pad nitride. The present invention also provides a design structure of the semiconductor structure, wherein the design structure is embodied in a machine readable medium.
    Type: Application
    Filed: December 19, 2007
    Publication date: June 25, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Deok-kee Kim, Ramachandra Divakaruni, Carl J. Radens, Dea-Gyu Park
  • Publication number: 20090152608
    Abstract: A method for forming a memory device. The method provides a protective layer overlying a surface region of a substrate before threshold voltage implant. The method then includes depositing a photo resist layer and patterning the photo resist by selectively removing a portion of the photo resist to expose the protective layer overlying a first region while maintaining the photo resist overlying a second region. The method includes implanting impurities for threshold voltage adjustment into the first region while the second region is substantially free of the impurities for threshold voltage adjustment. The method also includes forming a source region and a drain region. The method further includes providing a conductive structure over the source region. A junction between the conductive structure and the source region is substantially within the second region. The method then provides a storage capacitor in electrical contact with the source region via the conductive structure.
    Type: Application
    Filed: September 26, 2008
    Publication date: June 18, 2009
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: JoBong Choi
  • Patent number: 7547936
    Abstract: A semiconductor memory device may include a substrate having a plurality of active regions and a field isolation layer on the substrate surrounding the active regions of the substrate. Each of the plurality of active regions may have a length in a direction of a first axis and a width in a direction of a second axis, and the length may be greater than the width. The plurality of active regions may be provided in a plurality of columns of active regions in the direction of the second axis, and active regions of adjacent columns may be offset in the direction of the second axis.
    Type: Grant
    Filed: October 6, 2005
    Date of Patent: June 16, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Doo-Hoon Goo, Han-Ku Cho, Joo-Tae Moon, Sang-Gyun Woo, Gi-Sung Yeo, Kyoung-Yun Baek
  • Publication number: 20090146254
    Abstract: This semiconductor device according to the present invention includes a plurality of cylindrical lower electrodes aligned densely in a memory array region; a plate-like support which is contacted on the side surface of the cylindrical lower electrodes, and links to support the plurality of the cylindrical lower electrodes; a pore portion provided in the plate-like support; a dielectric film covering the entire surface of the cylindrical lower electrodes and the plate-like support in which the pore portion is formed; and an upper electrode formed on the surface of the dielectric film, wherein the boundary length of the part on the side surface of the cylindrical lower electrode which is exposed on the pore portion is shorter than the boundary length of the part on the side surface of the cylindrical lower electrode which is not exposed on the pore portion.
    Type: Application
    Filed: May 6, 2008
    Publication date: June 11, 2009
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Toshiyuki HIROTA
  • Publication number: 20090147580
    Abstract: Disclosed herein is a one-transistor (1T) floating-body Dynamic Random Access Memory (DRAM) cell device with a non-volatile function for implementing the high integration/high performance DRAM. The 1T floating-body DRAM cell device includes a floating body for storing information of the DRAM cell device, a source and a drain formed on respective sides of the floating body, a gate insulating layer formed on a top of the floating body, a gate electrode formed on a top of the gate insulating layer, a gate stack formed under the floating body and configured to have a charge storage node for storing electric charges, and a control electrode formed on a lower side of the gate stack or partially or completely surrounded by the gate stack. The DRAM cell device performs “write0” and “write1” operations or a read operation. The DRAM cell device performs a non-volatile program operation or a non-volatile erase operation.
    Type: Application
    Filed: November 19, 2008
    Publication date: June 11, 2009
    Applicant: KYUNGPOOK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
    Inventor: Jong-Ho Lee
  • Publication number: 20090140308
    Abstract: A semiconductor device includes a silicon substrate, a capacitor element having a lower electrode, a capacitor dielectric film, a TiN film, and a W film, and an interlayer insulation film covering the end and a portion of the upper surface of the lower electrode and disposed with a concave portion at a position corresponding to the lower electrode. The lower electrode is disposed selectively at the bottom of the concave portion, the upper surface of the lower electrode is exposed from the interlayer insulation film in the region for forming the concave portion, the side wall for the concave portion of the interlayer insulation film situates to the inner side of the lower electrode from the end of the lower electrode, and the capacitor dielectric film is disposed so as to cover the upper surface of the lower electrode and cover the interlayer insulation from the side wall for the concave portion to the upper surface of the interlayer insulation film.
    Type: Application
    Filed: November 12, 2008
    Publication date: June 4, 2009
    Applicant: NEC Electronics Corporation
    Inventors: Ken Inoue, Tomoko Inoue
  • Patent number: 7541616
    Abstract: A semiconductor integrated circuit device, such as a memory device or radiation detector, is disclosed, in which data storage cells are formed on a substrate. Each of the data storage cells includes a field effect transistor having a source, drain, and gate, and a body arranged between the source and drain for storing electrical charge generated in the body. The magnitude of the net electrical charge in the body can be adjusted by input signals applied to the transistor, and the adjustment of the net electrical charge by the input signals can be at least partially cancelled by applying electrical voltage signals between the gate and the drain and between the source and the drain.
    Type: Grant
    Filed: October 22, 2007
    Date of Patent: June 2, 2009
    Assignee: Innovative Silicon ISi SA
    Inventors: Pierre Fazan, Serguei Okhonin
  • Patent number: 7541633
    Abstract: A PRAM and a fabricating method thereof are provided. The PRAM includes a transistor and a data storage capability. The data storage capability is connected to the transistor. The data storage includes a top electrode, a bottom electrode, and a porous PCM layer. The porous PCM layer is interposed between the top electrode and the bottom electrode.
    Type: Grant
    Filed: November 23, 2005
    Date of Patent: June 2, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-mock Lee, Jin-heong Yim, Yoon-ho Khang, Jin-seo Noh, Dong-seok Suh