Ring for an anti-rotation process kit for a substrate processing chamber
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The even dashed broken lines in
Claims
The ornamental design for a ring for an anti-rotation process kit for a substrate processing chamber, as shown and described.
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- Anti Rotation Ring CEC 3836,https://verticalxpress.com/anti-rotation-ring-cec-3836.html,Copyright © 2022 Vertical Express. (Year: 2022).
- Bauer—Anti rotation ring 40×20×5,https://www.irrigationparts.eu/en/product/pumps-parts/pto-pumps-parts/bauer-famos-pumps-parts/bauer-famos-iii-60-pump-parts/3080513_bauer-anti-rotation-ring-40x20x5, 2024. (Year: 2024).
Type: Grant
Filed: Apr 4, 2022
Date of Patent: Oct 29, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Rohan Vijay Rane (Santa Clara, CA), Xue Yang Chang (San Jose, CA), Timothy Joseph Franklin (Campbell, CA), Daniel Sang Byun (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/833,393