Ring for an anti-rotation process kit for a substrate processing chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top, front, right isometric view of a ring for an anti-rotation process kit for a substrate processing chamber, showing our new design.

FIG. 2 is a bottom, left, back isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left elevation view thereof.

FIG. 8 is a right elevation view thereof; and,

FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 3 with the enlargements taken from the dashed-dot encircled portions labeled, “FIG. 9,” in FIG. 3.

The even dashed broken lines in FIG. 9 represent unclaimed environment and form no part of the claimed design. The dash-dot lines represent the boundary lines of the enlarged portion view of FIG. 9 shown in FIGS. 3 and 9 and form no part of the claimed design.

Claims

The ornamental design for a ring for an anti-rotation process kit for a substrate processing chamber, as shown and described.

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Other references
  • Anti Rotation Ring CEC 3836,https://verticalxpress.com/anti-rotation-ring-cec-3836.html,Copyright © 2022 Vertical Express. (Year: 2022).
  • Bauer—Anti rotation ring 40×20×5,https://www.irrigationparts.eu/en/product/pumps-parts/pto-pumps-parts/bauer-famos-pumps-parts/bauer-famos-iii-60-pump-parts/3080513_bauer-anti-rotation-ring-40x20x5, 2024. (Year: 2024).
Patent History
Patent number: D1049067
Type: Grant
Filed: Apr 4, 2022
Date of Patent: Oct 29, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Rohan Vijay Rane (Santa Clara, CA), Xue Yang Chang (San Jose, CA), Timothy Joseph Franklin (Campbell, CA), Daniel Sang Byun (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/833,393