Ring for an anti-rotation process kit for a substrate processing chamber
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The even dashed broken lines in
Claims
The ornamental design for a ring for an anti-rotation process kit for a substrate processing chamber, as shown and described.
D404372 | January 19, 1999 | Ishii |
6068548 | May 30, 2000 | Vote |
D557226 | December 11, 2007 | Uchino |
7459057 | December 2, 2008 | Zuniga |
8617672 | December 31, 2013 | Bhatnagar |
D709536 | July 22, 2014 | Yoshimura |
D709537 | July 22, 2014 | Kuwabara |
D709538 | July 22, 2014 | Mizukami |
D709539 | July 22, 2014 | Kuwabara |
D717746 | November 18, 2014 | Lau |
D738451 | September 8, 2015 | Olson |
D767234 | September 20, 2016 | Kirkland |
D770992 | November 8, 2016 | Tauchi |
D783922 | April 11, 2017 | Kirkland |
D793976 | August 8, 2017 | Fukushima |
D797691 | September 19, 2017 | Joubert |
D810705 | February 20, 2018 | Krishnan |
D830435 | October 9, 2018 | Wakisaka |
D840364 | February 12, 2019 | Ichino |
D862404 | October 8, 2019 | Murata |
D870314 | December 17, 2019 | Isozaki |
D871609 | December 31, 2019 | Isozaki |
D891382 | July 28, 2020 | Koppa |
D895777 | September 8, 2020 | Chase |
D933725 | October 19, 2021 | Koppa |
D933726 | October 19, 2021 | Savandaiah et al. |
D934315 | October 26, 2021 | Lavitsky |
D941372 | January 18, 2022 | Lavitsky |
D954986 | June 14, 2022 | Nakatani |
D979524 | February 28, 2023 | Perry |
D992615 | July 18, 2023 | Sasaki |
D1005245 | November 21, 2023 | Nakatani |
20040077167 | April 22, 2004 | Willis |
20050277375 | December 15, 2005 | Young |
20060057826 | March 16, 2006 | De Boer |
20090050272 | February 26, 2009 | Rosenberg |
20120263569 | October 18, 2012 | Priddy |
20140262193 | September 18, 2014 | Im |
20160133504 | May 12, 2016 | Chu |
20180142340 | May 24, 2018 | Johanson |
20210005502 | January 7, 2021 | Wagatsuma et al. |
307054816 | January 2022 | CN |
D1644757 | November 2019 | JP |
3009725750000 | September 2018 | KR |
3010932300000 | January 2021 | KR |
D215402 | November 2021 | TW |
WO2021108178 | June 2021 | WO |
WO2021194468 | September 2021 | WO |
- Anti Rotation Ring CEC 3836,https://verticalxpress.com/anti-rotation-ring-cec-3836.html,Copyright © 2022 Vertical Express. (Year: 2022).
- Bauer—Anti rotation ring 40×20×5,https://www.irrigationparts.eu/en/product/pumps-parts/pto-pumps-parts/bauer-famos-pumps-parts/bauer-famos-iii-60-pump-parts/3080513_bauer-anti-rotation-ring-40x20x5, 2024. (Year: 2024).
Type: Grant
Filed: Apr 4, 2022
Date of Patent: Oct 29, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Rohan Vijay Rane (Santa Clara, CA), Xue Yang Chang (San Jose, CA), Timothy Joseph Franklin (Campbell, CA), Daniel Sang Byun (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/833,393