Inlet liner for substrate processing apparatus
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Description
The broken line arrow shows the association of the two sides of the cross sectional view in
Claims
The ornamental design for an inlet liner for substrate processing apparatus, as shown and described.
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Patent History
Patent number: D925481
Type: Grant
Filed: Jun 4, 2019
Date of Patent: Jul 20, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Toru Kagaya (Toyama), Shinya Ebata (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/693,715
Type: Grant
Filed: Jun 4, 2019
Date of Patent: Jul 20, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Toru Kagaya (Toyama), Shinya Ebata (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/693,715
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)