Layered Patents (Class 257/750)
  • Patent number: 7847398
    Abstract: A semiconductor device has a semiconductor die having at least one bond pad formed on a first surface thereof. A substrate has at least one bond finger formed on a first surface thereof. A second surface of the semiconductor die is attached to the first surface of the substrate. A conductive wire connects the bond pad of the semiconductor die and the bond finger of the substrate wherein at least one end of the conductive wire has a stack bump. An encapsulant is provided to encapsulate the semiconductor die and the conductive wire.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: December 7, 2010
    Assignee: Amkor Technology, Inc.
    Inventors: Seok Ho Na, Jae Yun Kim, Yoon Joo Kim, Ji Young Chung
  • Publication number: 20100301484
    Abstract: An LGA substrate includes a core (110), having build-up dielectric material (150), at least one metal layer (125), and solder resist (155) formed thereon, an electrically conductive land grid array pad (120) electrically connected to the metal layer, a nickel layer (121) on the electrically conductive land grid array pad, a palladium layer (122) on the nickel layer, and a gold layer (123) on the palladium layer.
    Type: Application
    Filed: July 15, 2010
    Publication date: December 2, 2010
    Inventors: Omar J. Bchir, Munehiro Toyama, Charan Gurumurthy, Tamil Selvy Selvamuniandy
  • Patent number: 7843065
    Abstract: A flash memory device may include a first insulating layer on a base insulating layer on a substrate, a lower wire layer that fills a trench in the first insulating layer, a first insulating interlayer and a second insulating layer stacked in sequence on the first insulating layer and the lower wire layer, a middle wire layer that fills a trench in the second insulating layer, and a second insulating interlayer and an upper wire layer stacked in sequence on the middle wire layer, wherein the lower wire layer. The middle wire layer and the upper wire layer may be electrically connected to each other and the first insulating layer may include a low-k layer in contact with the base insulating layer. In addition, each of the first insulating interlayer, the second insulating layer, and the second insulating interlayer may include an FSG layer.
    Type: Grant
    Filed: September 23, 2008
    Date of Patent: November 30, 2010
    Assignee: Dongbu Hitek Co., Ltd.
    Inventor: Cheon Man Shim
  • Patent number: 7843062
    Abstract: An interconnect and method of making the interconnect. The method includes forming a dielectric layer on a substrate, the dielectric layer having a top surface and a bottom surface; forming a first wire and a second wire in the dielectric layer, the first wire separated from the second wire by a region of the dielectric layer; and forming metallic nanoparticles in or on the top surface of the dielectric layer between the first and second wires, the metallic nanoparticles capable of electrically connecting the first wire and the second wire only while the nanoparticles are heated to a temperature greater than room temperature and a voltage is applied between the first and second wires.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: November 30, 2010
    Assignee: International Business Machines Corporation
    Inventors: Fen Chen, Cathryn Jeanne Christiansen, Michael Anthony Shinosky, Timothy Dooling Sullivan
  • Patent number: 7839003
    Abstract: While a semiconductor device is provided with a plurality of element electrodes 5 formed on a semiconductor element 4 and a plurality of lead terminal electrodes 6 formed on a lead frame, the semiconductor device is equipped with a coupling conductor which electrically connects at least one electrode among the above-described element electrodes 5 to at least one electrode among the above-described lead terminal electrodes 6; the above-described coupling conductor is manufactured by a first conductor 1 and a second conductor 2, the major components of which are metals; the first conductor 1 has been electrically connected to the second conductor 2; and the element electrodes 5 and the lead terminal electrodes 6 have been electrically connected to the second conductor 2 respectively.
    Type: Grant
    Filed: July 31, 2008
    Date of Patent: November 23, 2010
    Assignee: Panasonic Corporation
    Inventors: Mitsuhiro Hamada, Kouichi Tomita
  • Publication number: 20100289144
    Abstract: A method of making 3D integrated circuits and a 3D integrated circuit structure. There is a first semiconductor structure joined to a second semiconductor structure. Each semiconductor structure includes a semiconductor wafer, a front end of the line (FEOL) wiring on the semiconductor wafer, a back end of the line (BEOL) wiring on the FEOL wiring, an insulator layer on the BEOL wiring and a metallic layer on the insulator layer. The first semiconductor structure is aligned with the second semiconductor structure such that the metallic layers of each of the semiconductor structures face each other. The metallic layers of each of the semiconductor structures are in contact with and bonded to each other by a metal to metal bond wherein the bonded metallic layers form an electrically isolated layer.
    Type: Application
    Filed: May 14, 2009
    Publication date: November 18, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mukta G. Farooq, Subramanian S. lyer
  • Publication number: 20100288354
    Abstract: A photovoltaic device can include a transparent conductive oxide layer adjacent to a substrate and one or more barrier layers, which can include a silicon oxide or a silicon nitride.
    Type: Application
    Filed: May 18, 2010
    Publication date: November 18, 2010
    Applicant: First Solar, Inc.
    Inventors: Scott Mills, Dale Roberts, Zhibo Zhao, Yu Yang
  • Publication number: 20100276806
    Abstract: A plastic package includes a plurality of terminal members each having an outer terminal, an inner terminal, and a connecting part connecting the outer and the inner terminal; a semiconductor device provided with terminal pads connected to the inner terminals with bond wires; and a resin molding sealing the terminal members, the semiconductor device and the bond wires therein. The inner terminals of the terminal members are thinner than the outer terminals and have contact surfaces. The upper, the lower and the outer side surfaces of the outer terminals, and the lower surfaces of the semiconductor device are exposed outside. The inner terminals, the bond wires, the semiconductor device and the resin molding are included in the thickness of the outer terminals.
    Type: Application
    Filed: June 30, 2010
    Publication date: November 4, 2010
    Applicant: DAI NIPPON PRINTING CO., LTD.
    Inventors: Masachika Masuda, Chikao Ikenaga
  • Patent number: 7825514
    Abstract: A substrate for a semiconductor device includes: a base plate, a plurality of external terminal portions respectively arranged in a plane on the base plate and having external terminal faces respectively facing the base plate; a plurality of internal terminal portions, respectively arranged in the plane on the base plate and having internal terminal faces respectively facing an opposite side to the base plate. The internal terminal portions are connected with the external terminal portions, via wiring portions, respectively. A part of the external terminal portions are located on the base plate in a predetermined arrangement area in which a semiconductor element is arranged.
    Type: Grant
    Filed: December 9, 2008
    Date of Patent: November 2, 2010
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Chikao Ikenaga, Shozo Ishikawa
  • Patent number: 7816780
    Abstract: A technique capable of improving reliability of a semiconductor apparatus is provided. A semiconductor device having a metal electrode on at least one principal surface and a die pad (a metal member) electrically connected to the metal electrode via conductive resin composed of base resin (an organic binder) mixed with a Ag particle (metal powder) including precious metal are provided, and a configuration is made so that a porous nano-particle coat film (a precious metal layer) having an Ag (precious metal) nano particle fired on a metal surface is formed on at least one of mutually opposed surfaces of the metal electrode and the die pad.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: October 19, 2010
    Assignee: Renesas Electronics Corporation
    Inventors: Ryoichi Kajiwara, Kazutoshi Ito
  • Patent number: 7812451
    Abstract: A semiconductor device includes a first wiring layer, a second wiring layer and a third wiring layer. The first wiring layer is formed on a semiconductor substrate. The second and the third wiring layer wiring layers are arranged in a direction intersecting with the first wiring layer on respective sides of the wiring layer. An air bridge wiring intersects the second and third wiring layers sandwiching an air layer above the first wiring layer therewith. The overall shape of the air bridge wiring has an upward convex curvature in an arch shape and the transverse sectional shape of the air bridge wiring is in the form of a downward concave curvature.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: October 12, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takashi Asano
  • Patent number: 7808105
    Abstract: A semiconductor package includes a first semiconductor die; a first redistribution layer coupled to a bonding pad of the first semiconductor die; a first solder bump coupled to the first redistribution layer; a second semiconductor die; a second redistribution layer coupled to a bonding pad of the second semiconductor die; a second solder bump coupled to the second redistribution layer and to the first solder bump; a third redistribution layer coupled to the second redistribution layer; and a solder ball coupled to the third redistribution layer.
    Type: Grant
    Filed: April 13, 2007
    Date of Patent: October 5, 2010
    Assignee: Amkor Technology, Inc.
    Inventor: Jong Sik Paek
  • Patent number: 7804172
    Abstract: Electrical connections between different materials. An electrical connection system includes electrical components and an electrical connection between the electrical components. The electrical connection includes a functionally graded material. A method of making an electrical connection between different materials includes the steps of: providing an electrical component which includes a material; providing another electrical component which includes another material; and electrically connecting a functionally graded material between the electrical components. An electrical connection system includes an electrical component and a functionally graded material electrically connected to the electrical component. The functionally graded material provides a gradual transition between at least two dissimilar materials.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: September 28, 2010
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Roger L. Schultz, Michael L. Fripp, Haoyue Zhang, Daniel D. Gleitman
  • Publication number: 20100237501
    Abstract: A method for manufacturing a semiconductor device includes forming an insulating film including silicon, oxygen, carbon and hydrogen above a semiconductor substrate, forming a wiring trench in the insulating film, forming a metal film to be a metal wiring on the insulating film such that the metal film is provided in the wiring trench, forming the metal wiring by removing the metal film outside the wiring trench, performing a hydrophobic treatment to the surface of the insulating film after the forming the metal wiring, and forming a metal cap selectively on an upper surface of the metal wiring by plating after the performing the hydrophobic treatment.
    Type: Application
    Filed: March 18, 2010
    Publication date: September 23, 2010
    Inventors: Hideyuki Tomizawa, Noriaki Matsunaga, Tadayoshi Watanabe, Shiro Mishima, Masako Kodera
  • Publication number: 20100237500
    Abstract: A semiconductor substrate includes a first conductive layer formed over the semiconductor substrate. The first conductive layer has first and second portions which are electrically isolated during formation of the first conductive layer. A solder resist layer is formed over the first conductive layer and semiconductor substrate. An opening is formed in the solder resist layer to expose the first conductive layer. A seed layer is formed over the semiconductor substrate and first conductive layer within the opening. A second conductive layer is formed over the seed layer within the opening. The opening may expose the second portion of the first conductive layer due to solder resist registration shifting causing a defect condition. The second conductive layer electrically contacts the first and second portions of the first conductive layer. By testing the first and second portions of the first conductive layer, the defect condition can be identified.
    Type: Application
    Filed: March 20, 2009
    Publication date: September 23, 2010
    Applicant: STATS CHIPPAC, LTD.
    Inventors: ChoongHwan Kwon, SooMoon Park, HeeJo Chi
  • Patent number: 7795736
    Abstract: Embodiments include interconnect of electrically conductive material with a contact surface, and a dielectric layer overlying the contact surface with a trench and via in the dielectric layer, the via extending to the contact surface. An interlock material is in the via with an interlock opening extending through the interlock material and into the interconnect. A layer of electroless material is on the base of the trench and the surfaces of the via, interlock material, and interlock opening. An subsequent interconnect is formed on the electroless material, in the trench, via, and interlock openings. The structure can be repeated to form a stack or column of interconnects that resist delamination.
    Type: Grant
    Filed: March 8, 2007
    Date of Patent: September 14, 2010
    Assignee: Intel Corporation
    Inventors: Jiun Hann Sir, Eng Huat Goh
  • Patent number: 7795732
    Abstract: A ceramic wiring board 10 includes a ceramic substrate 11 and a wiring layer 12 formed on the ceramic substrate 11. The wiring layer 12 includes a wiring part 13 and a connection part 14, the wiring part 13 having a base metal layer 15, a first diffusion preventive layer 16 and a first Au layer 17 which are stacked in sequence on a surface of the ceramic substrate 11, and the connection part 14 having a second diffusion preventive layer 19, a void suppression layer 20 and a solder layer 18 which are stacked in sequence at a desired position on the wiring part 13. The void suppression layer 20 is made of, for example, Au or an Au—Sn alloy containing 85 mass % or more of Au.
    Type: Grant
    Filed: January 30, 2006
    Date of Patent: September 14, 2010
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
    Inventors: Miho Nakamura, Yoshiyuki Fukuda
  • Patent number: 7795690
    Abstract: The invention relates to a thin film transistor substrate for use in a liquid crystal display device and a method of fabricating the same, and an object is to provide a thin film transistor substrate which can ensure high reliability even though a low resistance metal is used in a material for a gate electrode and a predetermined wiring and a method of fabricating the same. A TFT substrate has a gate electrode in a multilayer structure configured of an AlN film as a nitrogen containing layer, an Al film as a main wiring layer and an upper wiring layer formed of an MoN film and an Mo film. On the gate electrode whose side surface inclines gently, a gate insulating film of excellent film quality is formed.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: September 14, 2010
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Katsunori Misaki
  • Patent number: 7795731
    Abstract: In one embodiment, a semiconductor device has a topmost or highest conductive layer with at least one opening. The semiconductor device includes a semiconductor substrate having a cell array region and an interlayer insulating layer covering the substrate having the cell array region. The topmost conductive layer is disposed on the interlayer insulating layer in the cell array region. The topmost conductive layer has at least one opening. A method of fabricating the semiconductor device is also provided. The openings penetrating the topmost metal layer help hydrogen atoms reach the interfaces of gate insulating layers of cell MOS transistors and/or peripheral MOS transistors during a metal alloy process, thereby improve a performance (production yield and/or refresh characteristics) of a memory device.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: September 14, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Joo-Sung Park, Ae-Ran Hong
  • Patent number: 7795709
    Abstract: The specification describes a thin film Integrated Passive Device (IPD) design that achieves isolation between conductive runners by shielding the top and bottom regions of a noisy runner with metal shield plates. The shield plates are derived from metal interconnect layers. The invention can be implemented by merely modifying the mask pattern for the metal interconnect layers. No added elements or steps are needed to fabricate the IPDs. The invention is suitable for use in Multi-Chip Modules (MCMs) or other arrangements where digital circuits and RF circuits are in close proximity.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: September 14, 2010
    Assignee: Sychip Inc.
    Inventors: Yinon Degani, Yu Fan, Charley Chunlei Gao, Kunguan Sun, Liguo Sun
  • Patent number: 7790603
    Abstract: A system and method for providing low dielectric constant insulators in integrated circuits is provided. One aspect of this disclosure relates to a method for forming an integrated circuit insulator. The method includes forming an insulating layer using a first structural material upon a substrate, the first structural material having sufficient mechanical characteristics to support metal during chemical-mechanical polishing (CMP). The method also includes depositing a metallic layer upon the insulating layer, the metallic layer adapted to be used as a wiring channel. The method further includes processing the metallic layer to form the wiring channel, where processing includes CMP. In addition, the method includes removing and replacing at least a portion of the first structural material with a second structural material, the second structural material having insufficient mechanical characteristics to support metal during CMP. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: September 7, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7786587
    Abstract: A semiconductor device 100 includes a semiconductor substrate 14, a connection electrode 12 disposed on an upper surface of the semiconductor substrate 14 and connected to an integrated circuit thereon, a through electrode 20 which penetrates the semiconductor substrate 14 and the connection electrode 20, and an insulation portion 30 interposed between the semiconductor substrate 14 and the through electrode 20. The through electrode 20 is integrally formed to protrude outward from upper surfaces of the semiconductor substrate 14 and the connection electrode 12, and connected to the connection electrode 12 in a region where the through electrode 20 penetrates the connection electrode 12.
    Type: Grant
    Filed: July 1, 2008
    Date of Patent: August 31, 2010
    Assignee: Spansion LLC
    Inventors: Masataka Hoshino, Ryoto Fukuyama, Koji Taya
  • Patent number: 7786585
    Abstract: In a semiconductor integrated circuit device having plural layers of buried wirings, it is intended to prevent the occurrence of a discontinuity caused by stress migration at an interface between a plug connected at a bottom thereof to a buried wiring and the buried wiring. For example, in the case where the width of a first Cu wiring is not smaller than about 0.9 ?m and is smaller than about 1.44 ?m, and the width of a second Cu wiring and the diameter of a plug are about 0.18 ?m, there are arranged two or more plugs which connect the first wirings and the second Cu wirings electrically with each other.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: August 31, 2010
    Assignee: Renesas Electronics Corp.
    Inventors: Takako Funakoshi, Eiichi Murakami, Kazumasa Yanagisawa, Kan Takeuchi, Hideo Aoki, Hizuru Yamaguchi, Takayuki Oshima, Kazuyuki Tsunokuni, Kousuke Okuyama
  • Patent number: 7786562
    Abstract: A stackable layer and stacked multilayer module are disclosed. Individual integrated circuit die are tested and processed at the wafer level to create vertical area interconnect vias for the routing of electrical signals from the active surface of the die to the inactive surface. Vias are formed at predefined locations on each die on the wafer at the reticle level using a series of semiconductor processing steps. The wafer is passivated and the vias are filled with a conductive material. The bond pads on the die are exposed and a metallization reroute from the user-selected bond pads and vias is applied. The wafer is then segmented to form thin, stackable layers that can be stacked and vertically electrically interconnected using the conductive vias, forming high-density electronic modules which may, in turn, be further stacked and interconnected to form larger more complex stacks.
    Type: Grant
    Filed: June 10, 2005
    Date of Patent: August 31, 2010
    Inventors: Volkan Ozguz, Angel Pepe, James Yamaguchi, W. Eric Boyd, Douglas Albert, Andrew Camien
  • Publication number: 20100201001
    Abstract: A method for manufacturing a semiconductor device includes: a) preparing a structure including a semiconductor substrate, an electrode provided on a first surface of the semiconductor substrate, and an insulation film provided on the first surface and having an opening positioned on a first part of the electrode; b) forming a first metal layer from an upper surface of the first part of the electrode to an upper surface of the insulation film; c) forming a resin layer on a first part of the first metal layer, which is positioned on the first part of the electrode, and on the insulation film after the step b); d) removing at least a second part of the resin layer, which is positioned on the first part of the first metal layer, in a manner to leave a first part of the resin layer so as to form a resin protrusion; and e) forming a second metal layer, which is electrically connected with the electrode, from an upper surface of the first metal layer to an upper surface of the resin protrusion.
    Type: Application
    Filed: January 13, 2010
    Publication date: August 12, 2010
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Tatsuhiko ASAKAWA
  • Patent number: 7768004
    Abstract: In a semiconductor device including a semiconductor substrate and an electrode pad formed over the semiconductor substrate, at least one of test element is formed in a region of the semiconductor substrate beneath the electrode pad. The test element is electrically isolated from upper conductive layers outside of the region and the electrode pad.
    Type: Grant
    Filed: October 24, 2005
    Date of Patent: August 3, 2010
    Assignee: NEC Electronics Corporation
    Inventor: Hideomi Shintaku
  • Patent number: 7763980
    Abstract: A semiconductor device having a redistribution layer, and methods of forming same, are disclosed. After fabrication of semiconductor die on a wafer, a tape assembly is applied onto a surface of the wafer, in contact with the surfaces of each semiconductor die on the wafer. The tape assembly includes a backgrind tape as a base layer, and a film assembly adhered to the backgrind tape. The film assembly in turn includes an adhesive film on which is deposited a thin layer of conductive material. The redistribution layer pattern is traced into the tape assembly, using for example a laser. Thereafter, the unheated portions of the tape assembly may be removed, leaving the heated redistribution layer pattern on each semiconductor die.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: July 27, 2010
    Assignee: SanDisk Corporation
    Inventors: Chien-Ko Liao, Chin-Tien Chiu, Jack Chang Chien, Cheemen Yu, Hem Takiar
  • Publication number: 20100181669
    Abstract: In order to improve a bonding reliability of a semiconductor device, in the semiconductor device, the wiring patterns on the substrate surface and the connection electrodes are electrically connected by face-down mounting. The connection electrodes are formed on the connecting surface of the semiconductor element and made from a conductive material, and a part of the wiring patterns has such a width that allows the connection electrodes formed on the part of said wiring patterns to have a fillet shape.
    Type: Application
    Filed: January 20, 2010
    Publication date: July 22, 2010
    Inventor: Yasuhiko Tanaka
  • Patent number: 7750470
    Abstract: A method and system for improving planarization and uniformity of dielectric layers for providing improved optical efficiency in CCD and CMOS image sensor devices. In various embodiments, a dielectric planarization method for achieving better optical efficiency includes first depositing a first dielectric having an optically transparent property on and around a metal pattern. Optical sensors are formed in or on the substrate in areas between metal features. The metal pattern protects a sensor situated therebetween and thereunder from electromagnetic radiation. After the first dielectric layer is polished using CMP, a slanted or inclined surface is produced but this non-uniformity is eliminated using further planarization processes that produce a uniform total dielectric thickness for the proper functioning of the sensor.
    Type: Grant
    Filed: February 8, 2007
    Date of Patent: July 6, 2010
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yeou-Lang Hsieh, Chin-Min Lin, Jiann-Jong Wang
  • Publication number: 20100164112
    Abstract: A semiconductor device includes a semiconductor layer, an electrode pad that is composed of Au and is provided on the semiconductor layer, a silicon nitride film provided on the semiconductor layer and the electrode pad so that an end portion of the silicon nitride film is located, and a metal layer that contacts a part of a surface of the electrode pad and the end portion of the silicon nitride film and is provided so that another part of the surface of the electrode pad is exposed, the metal layer including any of Ti, Ta and Pt.
    Type: Application
    Filed: December 24, 2009
    Publication date: July 1, 2010
    Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
    Inventors: Takeshi Hishida, Tsutomu Igarashi
  • Patent number: 7745933
    Abstract: A circuit structure has a first dielectric layer, a first circuit pattern embedded in the first dielectric layer and having a first via pad, a first conductive via passing through the first dielectric layer and connecting to the first via pad, and an independent via pad disposed on a surface of the first dielectric layer away from the first via pad and connecting to one end of the first conductive via. The circuit structure further has a second dielectric layer disposed over the surface of the first dielectric layer where the independent via pad is disposed, a second conductive via passing through the second dielectric layer and connecting to the independent via pad, and a second circuit pattern embedded in the second dielectric layer, located at a surface thereof away from the independent via pad, and having a second via pad connected to the second conductive via.
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: June 29, 2010
    Assignee: United Microelectronics Corp.
    Inventor: Cheng-Po Yu
  • Patent number: 7745266
    Abstract: The present invention provides a semiconductor device with a fuse part and a method of forming the same. The method includes forming a selective metal layer on a via hole which is connected to a metal line in a semiconductor device, forming a fuse metal layer on the selective metal layer, and forming a fuse metal layer pattern by using a photosensitive layer pattern which is formed on the fuse metal layer.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: June 29, 2010
    Assignee: Dongbu Electronics Co., Ltd.
    Inventor: Se-Yeul Bae
  • Patent number: 7741231
    Abstract: Techniques for electronic device fabrication are provided. In one aspect, an electronic device is provided. The electronic device comprises at least one interposer structure having one or mole vias and a plurality of decoupling capacitors integrated therein, the at least one interposer structure being configured to allow for one or more of the plurality of decoupling capacitors to be selectively deactivated. In another aspect, a method of fabricating an electronic device comprising at least one interposer structure having one or more vias and a plurality of decoupling capacitors integrated therein comprises the following step. One or more of the plurality of decoupling capacitors are selectively deactivated.
    Type: Grant
    Filed: March 27, 2008
    Date of Patent: June 22, 2010
    Assignee: International Business Machines Corporation
    Inventors: Raymond R. Horton, John U. Knickerbocker, Edmund J. Sprogis, Cornelia K. Tsang
  • Patent number: 7737557
    Abstract: In the present invention, a wiring layer comprises wirings respectively having different sheet resistance values, or a contact for connecting opposing wiring layers comprises contacts having different sheet resistance values respectively.
    Type: Grant
    Filed: October 3, 2006
    Date of Patent: June 15, 2010
    Assignee: Panasonic Corporation
    Inventor: Keisuke Kishishita
  • Patent number: 7737025
    Abstract: A method for forming an plurality of paths on a substrate includes drilling an opening for a via to a depth to expose a first pad and a second pad, lining the opening with a conductive material, and insulating a first portion of the lining in the opening from a second portion of the lining in the opening to form a first electrical path contacting the first pad and a second electrical path contacting the second pad.
    Type: Grant
    Filed: January 24, 2007
    Date of Patent: June 15, 2010
    Assignee: Intel Corporation
    Inventors: Todd B Myers, Nicholas R. Watts, Eric C Palmer, Renee M Defeo, Jui Min Lim
  • Patent number: 7737554
    Abstract: An integrated circuit structure includes a semiconductor substrate; a first bottom metallization (M1) layer over the semiconductor substrate; a second M1 layer over the first M1 layer, wherein metal lines in the first and the second M1 layer have widths of greater than about a minimum feature size; and vias connecting the first and the second M1 layers.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: June 15, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jeffrey Junhao Xu
  • Patent number: 7732905
    Abstract: The stack package may have a structure in which unit packages may be inserted into slots of a receiving substrate. The unit package may have a plurality of connecting pads. The receiving substrate may have substrate pads, which may be electrically connected to the connecting pads of the unit packages inserted in the slots by mechanical contact. The slots may be provided at regular vertical intervals so that the unit packages may be stacked in the vertical direction. A semiconductor module may include stack packages installed on at least one surface of a module substrate.
    Type: Grant
    Filed: January 13, 2006
    Date of Patent: June 8, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Tae-Sung Yoon
  • Patent number: 7728431
    Abstract: Herein disclosed an electronic component having a passivation layer in which an opening that exposes a part of a pad electrode is formed, an underlying metal layer formed on the pad electrode and the passivation layer, and a barrier metal layer formed on the underlying metal layer for an external connection electrode, the electronic component including a recess or/and a projection configured to be provided under the barrier metal layer outside or/and inside the opening, the underlying metal layer being formed on the recess or/and the projection and having a surface shape that follows the recess or/and the projection.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: June 1, 2010
    Assignee: Sony Corporation
    Inventors: Yoshimichi Harada, Akiyoshi Aoyagi, Hiroshi Asami
  • Patent number: 7728319
    Abstract: The present invention discloses a vertical phase-change-memory (PCM) cell, comprising a stack of a bottom electrode (5) contacting a first layer of phase change material (14), a dielectric layer (12) having an opening (13), a second layer of phase change material (6) in contact with the first layer of phase change material through the opening in the dielectric layer and a top electrode (7) contacting this second layer of phase change material.
    Type: Grant
    Filed: December 12, 2006
    Date of Patent: June 1, 2010
    Assignee: NXP B.V.
    Inventors: Ludovic Raymond Andre Goux, Dirk Johan Cecil Christiaan Marie Wouters, Judit Gloria Lisoni Reyes, Thomas Gille
  • Patent number: 7719115
    Abstract: A computer automated design system includes a subject routing module configured to set a first grid area and a first diagonal grid area and route a first wire in the first grid area and a first diagonal wire extending diagonally to a longitudinal direction of the first wire and a next routing module configured to set a second grid area and a second diagonal grid area and route a second wire in the second grid area and a second diagonal wire extending diagonally to a longitudinal direction of the second wire.
    Type: Grant
    Filed: February 25, 2008
    Date of Patent: May 18, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Shoji Seta
  • Patent number: 7719114
    Abstract: An edit structure is disclosed that allows the input of a logic gate to be changed by modifying any one of the metal and via masks that are used to form the metal interconnect structure. As a result, a first permanent logic state provided by a tie-in circuit can be changed to a second permanent logic state by modifying any one of the metal and via masks that are used to form the metal interconnect structure.
    Type: Grant
    Filed: October 17, 2007
    Date of Patent: May 18, 2010
    Assignee: National Semiconductor Corporation
    Inventor: Richard J. Doyon, Jr.
  • Patent number: 7718987
    Abstract: A memory cell for an electrically writeable and erasable memory medium as well as a memory medium thereof is provided. The memory cell comprises a data recording element, the data recording element has a plurality of multiple-layer structure disposed one on top of another; each the multiple-layer structure comprising a plurality of sequentially disposed individual layers. At least one of the plurality of individual layers is capable of changing phase between a crystalline state and an amorphous state in response to an electrical pulse, one of the plurality of individual layers having at least one atomic element which is absent from other one of the plurality of individual layers, and the plurality of multiple-layer structure is of a superlattice-like structure to lower a heat diffusion out of the data recording element to shorten a phase change time of the respective individual layers.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: May 18, 2010
    Assignee: Agency for Science, Technology and Research
    Inventors: Tow Chong Chong, Lu Ping Shi, Rong Zhao, Xiang Shui Miao, Pik Kee Tan, Hao Meng, Kai Jun Yi, Xiang Hu, Ke Bin Li, Ping Luo
  • Patent number: 7714441
    Abstract: A microelectronic topography includes a dielectric layer (DL) with a surface higher than an adjacent bulk metal feature (BMF) and further includes a barrier layer (BL) upon the BMF and extending higher than the DL. Another microelectronic topography includes a BL with a metal-oxide layer having a metal element concentration which is disproportionate relative to concentrations of the element within metal alloy layers on either side of the metal-oxide layer. A method includes forming a BL upon a BMF such that portions of a first DL adjacent to the BMF are exposed, selectively depositing a second DL upon the BL, cleaning the topography thereafter, and blanket depositing a third DL upon the cleaned topography. Another method includes polishing a microelectronic topography such that a metallization layer is coplanar with a DL and further includes spraying a deionized water based fluid upon the polished topography to remove debris from the DL.
    Type: Grant
    Filed: August 9, 2005
    Date of Patent: May 11, 2010
    Assignee: Lam Research
    Inventor: Igor C. Ivanov
  • Patent number: 7714439
    Abstract: A nitride semiconductor device according to the present invention includes a P-type contact layer and a P-type electrode provided on the P-type contact layer. The P-type electrode includes a AuGa film provided on the P-type contact layer, a Au film provided on the AuGa film, a Pt film 4 provided on the Au film, and a Au film provided on the Pt film. The ratio of the thickness of the AuGa film to the total thickness of the AuGa film and the Au film is not less than 12% but not more than 46%.
    Type: Grant
    Filed: August 24, 2007
    Date of Patent: May 11, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventors: Katsuomi Shiozawa, Hitoshi Sakuma, Kazushige Kawasaki, Toshihiko Shiga, Toshiyuki Oishi
  • Patent number: 7714435
    Abstract: A method for fabricating a three dimensional type capacitor is provided. The method includes forming a first insulation layer including first contact layers over a substrate, forming a second insulation layer over the first insulation layer, forming second contact layers by using a material having an etch selectivity different from the first contact layers such that the second contact layers are connected with the first contact layers within the second insulation layer, forming an etch stop layer over the second insulation layer and the second contact layers, forming a third insulation layer over the etch stop layer, etching the third insulation layer and the etch stop layer to form first contact holes exposing the second contact layers, etching the exposed second contact layers to form second contact holes exposing the first contact holes, and forming bottom electrodes over the inner surface of the second contact holes.
    Type: Grant
    Filed: January 14, 2009
    Date of Patent: May 11, 2010
    Assignee: Hynix Semiconductor Inc.
    Inventors: Sung-Kwon Lee, Myung-Ok Kim
  • Publication number: 20100109016
    Abstract: Provided is a power semiconductor module in which two components are bonded by a Bi based solder material. A Cu layer is provided on the surfaces thereof to be bonded by the Bi based solder material on the two-component. Two components, i.e., the components to be bonded, are a combination of a semiconductor element and an insulating part, or a combination of an insulating part and a radiator plate. The insulating part is composed of a Cu/SiNx/Cu laminated body.
    Type: Application
    Filed: April 17, 2008
    Publication date: May 6, 2010
    Applicant: Toyota Jidosha Kabushiki Kaisha
    Inventors: Yuji Yagi, Yasushi Yamada, Ikuo Nakagawa, Takashi Atsumi, Mikio Shirai, Ikuo Ohnuma, Kiyohito Ishida, Yoshikazu Takaku
  • Patent number: 7709955
    Abstract: A semiconductor device includes an interlayer insulation film, an underlying line provided in the interlayer insulation film, a liner film overlying the interlayer insulation film, an interlayer insulation film overlying the liner film. The underlying line has a lower hole and the liner film and the interlayer insulation film have an upper hole communicating with the lower hole, and the lower hole is larger in diameter than the upper hole. The semiconductor device further includes a conductive film provided at an internal wall surface of the lower hole, a barrier metal provided along an internal wall surface of the upper hole, and a Cu film filling the upper and lower holes. The conductive film contains a substance identical to a substance of the barrier metal. A highly reliable semiconductor device can thus be obtained.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: May 4, 2010
    Assignee: Renesas Technology Corp.
    Inventors: Kazuyoshi Maekawa, Kenichi Mori
  • Patent number: 7709958
    Abstract: One or more embodiments of the present invention relate to structures obtained by methods (a) for growing a film by an intermixing growth process, or (b) by depositing a film, which film includes chalcogenides of copper and/or silver (but excluding oxides), such as, for example, copper sulfide (CuSX and/or Cu2SX, where 0.7?X?1.3; and X=1.0 for stoichiometric compounds).
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: May 4, 2010
    Inventor: Uri Cohen
  • Patent number: 7709866
    Abstract: In one embodiment of the invention, contact patterning may be divided into two or more passes which may allow designers to control the gate height critical dimension relatively independent from the contact top critical dimension.
    Type: Grant
    Filed: June 26, 2007
    Date of Patent: May 4, 2010
    Assignee: Intel Corporation
    Inventors: Nadia Rahhal-Orabi, Charles H. Wallace, Alison Davis, Swaminathan Sivakumar
  • Patent number: RE41538
    Abstract: A method for making an integrated circuit device includes forming at least one interconnect structure adjacent a substrate by forming at least one barrier layer, forming a doped copper seed layer on the at least one barrier layer, and forming a copper layer on the doped copper seed layer. The method may further include annealing the integrated circuit device after forming the copper layer to diffuse the dopant from the doped copper seed layer into grain boundaries of the copper layer. The doped copper seed layer may include at least one of calcium, cadmium, zinc, neodymium, tellurium, and ytterbium as a dopant to provide the enhanced electromigration resistance. Forming the copper layer may comprise plating the copper layer. In addition, forming the copper layer may comprise forming the copper layer to include at least one of calcium, cadmium, zinc, neodymium, tellurium, and ytterbium as a dopant.
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: August 17, 2010
    Inventor: James A. Cunningham