Including Passive Device (e.g., Resistor, Capacitor, Etc.) Patents (Class 438/238)
  • Patent number: 8723154
    Abstract: An integrated circuit device. The integrated circuit device includes a semiconductor substrate having a surface region. A gate dielectric layer overlies the surface region of the substrate. The device includes a MOS device having a p+ active region. The p+ active region forms a first electrode for a resistive switching device. The resistive switching device includes an amorphous silicon switching material overlying the p+ active region and a metal electrode overlies the first metal conductor structure. The metal electrode includes a metal material, upon application of a positive bias to the metal electrode, forms a metal region in the amorphous silicon switching material. The MOS device provides for a select transistor for the integrated circuit device.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: May 13, 2014
    Assignee: Crossbar, Inc.
    Inventors: Sung Hyun Jo, Hagop Nazarian
  • Publication number: 20140124728
    Abstract: A resistive memory device has a structure in which a source, a channel layer, a drain, and a resistive memory layer are sequentially formed in a particular direction, with a gate electrode formed around the channel layer. The source, channel layer, and drain may be vertically stacked on a substrate, and the gate electrode may be formed completely around the channel layer.
    Type: Application
    Filed: March 15, 2013
    Publication date: May 8, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chang-jung KIM, Sung-ho KIM, Young-bae KIM, Seung-ryul LEE, U-in CHUNG
  • Patent number: 8716833
    Abstract: A method of manufacturing a semiconductor device including forming on a substrate an insulating interlayer through which a capacitor contact is interposed; forming on the insulating interlayer a first upper electrode having an opening through which the capacitor contact is exposed; forming a first dielectric layer pattern on a lateral wall of the opening; forming a lower electrode on the first dielectric layer pattern formed in the opening and the capacitor contact; forming a second dielectric layer pattern on the lower electrode formed in the opening and the first dielectric layer pattern; and forming on the second dielectric layer pattern a second upper electrode so as to fill the opening and to contact the first upper electrode. The semiconductor device may prevent a lower electrode of a capacitor from collapsing.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: May 6, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Tae-woong Koo
  • Patent number: 8701283
    Abstract: A method for producing an integrated device including a capacitor. The method includes the steps of providing a functional substrate including functional circuits of the integrated device, forming a first conductive layer including a first plate of the capacitor on the functional substrate, forming a layer of insulating material including a dielectric layer of the capacitor on a portion of the first conductive layer corresponding to the first plate, forming a second conductive layer including a second plate of the capacitor and functional connections to the functional circuits on a portion of the layer of insulating material corresponding to the dielectric layer, forming a protective layer of insulating material covering the second plate and the functional connections, forming a first contact for contacting the first plate, and forming a second contact and functional contacts for contacting the second plate and the functional connections, respectively, through the protective layer.
    Type: Grant
    Filed: December 20, 2010
    Date of Patent: April 22, 2014
    Assignee: STMicroelectronics S.r.l.
    Inventor: Alessandro Dundulachi
  • Patent number: 8703588
    Abstract: A phase change material including a high adhesion phase change material formed on a dielectric material and a low adhesion phase change material formed on the high adhesion phase change material. The high adhesion phase change material includes a greater amount of at least one of nitrogen and oxygen than the low adhesion phase change material. The phase change material is produced by forming a first chalcogenide compound material including an amount of at least one of nitrogen and oxygen on the dielectric material and forming a second chalcogenide compound including a lower percentage of at least one of nitrogen and oxygen on the first chalcogenide compound material. A phase change random access memory device, and a semiconductor structure are also disclosed.
    Type: Grant
    Filed: January 11, 2012
    Date of Patent: April 22, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Keith R. Hampton
  • Publication number: 20140099760
    Abstract: A method for fabricating a semiconductor device, wherein the method comprises steps as follows: A dummy gate with a poly-silicon gate electrode and a passive device having a poly-silicon element layer are firstly provided. A hard mask layer is then formed on the dummy gate and the passive device. Next, a first etching process is performed to remove a portion of the hard mask layer to expose a portion of the poly-silicon element layer. Subsequently, an inner layer dielectric (ILD) is formed on the dummy gate and the poly-silicon element layer, and the ILD is flattened by using the hard mask layer as a polishing stop layer. Thereafter, a second etching process is performed to remove the poly-silicon gate electrode, and a metal gate electrode is formed on the location where the poly-silicon gate electrode was initially disposed.
    Type: Application
    Filed: December 11, 2013
    Publication date: April 10, 2014
    Applicant: UNITED MICROELECTRONICS CORPORATION
    Inventors: Chieh-Te CHEN, Shih-Fang TZOU, Jiunn-Hsiung LIAO, Yi-Po LIN
  • Patent number: 8692291
    Abstract: Device structures, design structures, and fabrication methods for passive devices that may be used as electrostatic discharge protection devices in fin-type field-effect transistor integrated circuit technologies. A device structure is formed that includes a well of a first conductivity type in a device region and a doped region of a second conductivity in the well. The device region is comprised of a portion of a device layer of a semiconductor-on-insulator substrate. The doped region and a first portion of the well define a junction. A second portion of the well is positioned between the doped region and an exterior sidewall of the device region. Another portion of the device layer may be patterned to form fins for fin-type field-effect transistors.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: April 8, 2014
    Assignee: International Business Machines Corporation
    Inventors: William F. Clark, Jr., Robert J. Gauthier, Jr., Junjun Li
  • Patent number: 8692334
    Abstract: A method of manufacturing a resistor integrated with a transistor having metal gate includes providing a substrate having a transistor region and a resistor region defined thereon, a transistor is positioned in the transistor region and a resistor is positioned in the resistor region; forming a dielectric layer exposing tops of the transistor and the resistor on the substrate; performing a first etching process to remove portions of the resistor to form two first trenches respectively at two opposite ends of the resistor; forming a patterned protecting layer in the resistor region; performing a second etching process to remove a dummy gate of the transistor to form a second trench in the transistor region; and forming a metal layer filling the first trenches and the second trench.
    Type: Grant
    Filed: July 24, 2013
    Date of Patent: April 8, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chun-Mao Chiou, Ti-Bin Chen, Tsung-Min Kuo, Shyan-Liang Chou, Yao-Chang Wang, Chi-Sheng Tseng, Jie-Ning Yang, Po-Jui Liao
  • Publication number: 20140094010
    Abstract: An electronic component includes a depletion-mode transistor, an enhancement-mode transistor, and a resistor. The depletion-mode transistor has a higher breakdown voltage than the enhancement-mode transistor. A first terminal of the resistor is electrically connected to a source of the enhancement-mode transistor, and a second terminal of the resistor and a source of the depletion-mode transistor are each electrically connected to a drain of the enhancement-mode transistor. A gate of the depletion-mode transistor can be electrically connected to a source of the enhancement-mode transistor.
    Type: Application
    Filed: October 31, 2013
    Publication date: April 3, 2014
    Applicant: Transphorm Inc.
    Inventors: Rakesh L. Lal, Robert Coffie, Yifeng Wu, Primit Parikh, Yuvaraj Dora, Umesh Mishra, Srabanti Chowdhury, Nicholas Fichtenbaum
  • Patent number: 8685818
    Abstract: Forming a polysilicon embedded resistor within the shallow trench isolations separating the active area of two adjacent devices, minimizing the electrical interaction between two devices and reducing the capacitive coupling or leakage therebetween. The precision polysilicon resistor is formed independently from the formation of gate electrodes by creating a recess region within the STI region when the polysilicon resistor is embedded within the STI recess region. The polysilicon resistor is decoupled from the gate electrode, making it immune to gate electrode related processes. The method forms the polysilicon resistor following the formation of STIs but before the formation of the p-well and n-well implants. In another embodiment the resistor is formed following the formation of the STIs but after the formation of the well implants.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: April 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Huiling Shang, Ying Li, Henry K. Utomo
  • Patent number: 8686484
    Abstract: A spin-torque magnetoresistive memory element has a high magnetoresistance and low current density. A free magnetic layer is positioned between first and second spin polarizers. A first tunnel barrier is positioned between the first spin polarizer and the free magnetic layer and a second tunnel barrier is positioned between the second spin polarizer and the free magnetic layer. The magnetoresistance ratio of the second tunnel barrier has a value greater than double the magnetoresistance ratio of the first tunnel barrier.
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: April 1, 2014
    Assignee: EverSpin Technologies, Inc.
    Inventors: Renu Whig, Jon Slaughter, Nicholas Rizzo, Jijun Sun, Frederick Mancoff, Dimitri Houssameddine
  • Patent number: 8687416
    Abstract: It is an object to provide a signal processing circuit for which a complex manufacturing process is not necessary and whose power consumption can be suppressed. In particular, it is an object to provide a signal processing circuit whose power consumption can be suppressed by stopping the power supply for a short time. The signal processing circuit includes a control circuit, an arithmetic unit, and a buffer memory device. The buffer memory device stores data sent from the main memory device or the arithmetic unit in accordance with an instruction from the control unit; the buffer memory device comprises a plurality of memory cells; and the memory cells each include a transistor including an oxide semiconductor in a channel formation region and a memory element to which charge whose amount depends on a value of the data is supplied via the transistor.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: April 1, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yoshiyuki Kurokawa
  • Patent number: 8685819
    Abstract: A method for making a crossbar array of crossed conductive or semi-conductive access lines on a substrate, the crossbar array including on a crossbar array insulator, in a plane parallel to the substrate, a first level of lines including a plurality of first lines parallel with each other made of a conductive or semi-conductive material; on the first level of lines, a second level of lines including a plurality of second lines parallel with each other made of a conductive or semi-conductive material, the second lines being substantially perpendicular to the first lines. The method includes forming, on the substrate, a first cavity of substantially rectangular shape; forming a second cavity of substantially rectangular shape superimposed to the first cavity, the first and second cavities intersecting each other perpendicularly so as to form a resultant cavity.
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: April 1, 2014
    Assignees: Commissariat a l'Energie Atomique, Centre National de la Recherche Scientifique, Universite Joseph Fourier
    Inventors: Julien Buckley, Karim Aissou, Thierry Baron, Gabriel Molas
  • Patent number: 8685827
    Abstract: A method for manufacturing a semiconductor device, comprising forming a first gate stack portion on a substrate, the first gate stack portion including a first gate oxide layer and a first polysilicon layer on the first gate oxide layer, forming a second gate stack portion on the substrate, the second gate stack portion including a second gate oxide layer and a second polysilicon layer on the second gate oxide layer, forming a resistor portion on the substrate, the resistor portion including a third gate oxide layer and a third polysilicon layer on the third gate oxide layer, covering the resistor portion with a photoresist, removing respective first portions of the first and second polysilicon layers from the first and second gate stack portions, removing the photoresist from the resistor portion, and after removing the photoresist from the resistor portion, removing respective remaining portions of the first and second polysilicon layers from the first and second gate stack portions.
    Type: Grant
    Filed: July 13, 2011
    Date of Patent: April 1, 2014
    Assignee: Samsung Electronics Co., Ltd
    Inventors: Ju Youn Kim, Jedon Kim
  • Patent number: 8679912
    Abstract: A method for forming a semiconductor device includes forming a first plurality of nanocrystals over a surface of a substrate having a first region and a second region, wherein the first plurality of nanocrystals is formed in the first region and the second region and has a first density; and, after forming the first plurality of nanocrystals, forming a second plurality of nanocrystals over the surface of the substrate in the second region and not the first region, wherein the first plurality of nanocrystals together with the second plurality of nanocrystals in the second region result in a second density, wherein the second density is greater than the first density.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: March 25, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Sung-Taeg Kang, Gowrishankar L. Chindalore, Brian A. Winstead, Jane A. Yater
  • Publication number: 20140080272
    Abstract: A three-dimensional array adapted for memory elements that reversibly change a level of electrical conductance in response to a voltage difference being applied across them. Memory elements are formed across a plurality of planes positioned different distances above a semiconductor substrate. Bit lines to which the memory elements of all planes are connected are oriented vertically from the substrate and through the plurality of planes.
    Type: Application
    Filed: November 25, 2013
    Publication date: March 20, 2014
    Applicant: SANDISK 3D LLC
    Inventor: Roy E. Scheuerlein
  • Publication number: 20140061572
    Abstract: This technology relates to a semiconductor device and a method of manufacturing the same. A semiconductor device may include a line layer formed over a substrate, and connection structures each configured to include a first metal layer pattern, a barrier layer pattern, and a second metal layer pattern sequentially stacked over the line layer, for bonding another substrate to the substrate. In accordance with this technology, abnormal silicidation may be prevented because the barrier layer is formed at the bonding interface of the substrates, and the bonding energy of the substrates may be improved by titanium (Ti)-silicon (Si) bonding.
    Type: Application
    Filed: December 19, 2012
    Publication date: March 6, 2014
    Applicant: SK hynix Inc.
    Inventor: Heung-Jae CHO
  • Publication number: 20140062578
    Abstract: A semiconductor structure comprising a substrate, an active device, a field oxide layer and a poly-silicon resistor is disclosed. The active device is formed in a surface area of the substrate. The active device has a first doped area, a second doped area and a third doped area. The second doped area is disposed on the first doped area. The first doped area is between the second and the third doped areas. The first doped area has a first type conductivity. The third doped area has a second type conductivity. The first and the second type conductivities are different. The field oxide layer is disposed on a part of the third doped area. The poly-silicon resistor is disposed on the field oxide layer and is electrically connected to the third doped area.
    Type: Application
    Filed: September 4, 2012
    Publication date: March 6, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Wing-Chor Chan, Li-Fan Chen
  • Patent number: 8664716
    Abstract: In a lateral-type power MOSFET, high breakdown voltage is achieved with suppressing to increase a cell pitch, and a feedback capacity and an ON resistance are decreased. An n? type silicon region having a high resistance to be a region of maintaining a breakdown voltage is vertically provided with respect to a main surface of an n+ type silicon substrate, and the n? type silicon region having the high resistance is connected to the n+ type silicon substrate. Also, a conductive substance is filled through an insulating substance inside a trench formed to reach the n+ type silicon substrate from the main surface of the n+ type silicon substrate so as to contact with the n? type silicon region having the high resistance, and the conductive substance is electrically connected to a source electrode.
    Type: Grant
    Filed: June 18, 2010
    Date of Patent: March 4, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Takayuki Hashimoto, Takashi Hirao, Noboru Akiyama
  • Patent number: 8664741
    Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: March 4, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 8664064
    Abstract: Example embodiments are directed to a method of forming a field effect transistor (FET) and a field effect transistor (FET) including a source/drain pair that is elevated with respect to the corresponding gate structure.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: March 4, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Keunnam Kim, Makoto Yoshida
  • Patent number: 8658511
    Abstract: Provided are methods for etching resistive switching and electrode layers in resistive random access memory (ReRAM) cells. Both types of layers are etched in the same operation. This approach simplifies processing in comparison to conventional etching, in which each layer is etched individually. The composition of etchants and process conditions are specifically selected to provide robust and effective etching of both types of layers. The two etching rates may be comparable and may be substantially the same, in some embodiments. Plasma etching involving tri-fluoro-methane and oxygen containing etchants may be used on electrode materials, such as titanium nitride, platinum, and ruthenium, and on resistive switching materials, such as oxides of transition metals. For example, a combination of titanium nitride and hafnium oxide may be etched using such processes. In some embodiments, an etched stack includes a third layer, which may function as a current limiter in ReRAM cells.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: February 25, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Frederick Carlos Fulgenico, Vidyut Gopal, Jinhong Tong
  • Patent number: 8658509
    Abstract: In sophisticated semiconductor devices comprising high-k metal gate electrode structures formed on the basis of a replacement gate approach, semiconductor-based resistors may be provided without contributing to undue process complexity in that the resistor region is recessed prior to depositing the semiconductor material of the gate electrode structure. Due to the difference in height level, a reliable protective dielectric material layer is preserved above the resistor structure upon exposing the semiconductor material of the gate electrode structure and removing the same on the basis of selective etch recipes. Consequently, well-established semiconductor materials, such as polysilicon, may be used for the resistive structures in complex semiconductor devices, substantially without affecting the overall process sequence for forming the sophisticated replacement gate electrode structures.
    Type: Grant
    Filed: October 19, 2010
    Date of Patent: February 25, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ralf Richter, Jens Heinrich, Andy Wei
  • Patent number: 8654562
    Abstract: Balanced electrical performance in a static random access memory (SRAM) cell with an asymmetric context such as a buffer circuit. Each memory cell includes a circuit feature, such as a read buffer, that has larger transistor sizes and features than the other transistors within the cell, and in which the feature asymmetrical influences the smaller cell transistors. For best performance, pairs of cell transistors are to be electrically matched with one another. One or more of the cell transistors nearer to the asymmetric feature are constructed differently, for example with different channel width, channel length, or net channel dopant concentration, to compensate for the proximity effects of the asymmetric feature.
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: February 18, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Xiaowei Deng, Wah Kit Loh, Anand Seshadri, Zhonghai Shi
  • Patent number: 8652895
    Abstract: A memory cell of an SRAM has two drive MISFETs and two vertical MISFETs. The p channel vertical MISFETs are formed above the n channel drive MISFETs. The vertical MISFETs respectively mainly include a laminate formed of a lower semiconductor layer, intermediate semiconductor layer and upper semiconductor layer laminated in this sequence, a gate insulating film of silicon oxide formed on the surface of the side wall of the laminate, and a gate electrode formed so as to cover the side wall of the laminate. The vertical MISFETs are perfect depletion type MISFETs.
    Type: Grant
    Filed: July 5, 2011
    Date of Patent: February 18, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Masahiro Moniwa, Hiraku Chakihara, Kousuke Okuyama, Yasuhiko Takahashi
  • Patent number: 8653574
    Abstract: A flash memory and a method for fabricating the same are provided. The flash memory comprises: a semiconductor substrate; a storage medium layer formed on the semiconductor substrate and comprising from bottom to top: a tunneling oxide layer, a silicon nitride layer and a blocking oxide layer; a semiconductor layer formed on the storage medium layer and comprising a channel region and a source region and a drain region located on both sides of the channel region respectively; and a gate stack formed on the channel region and comprising a gate dielectric and a gate formed on the gate dielectric.
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: February 18, 2014
    Assignee: Tsinghua University
    Inventors: Ning Cui, Renrong Liang, Jing Wang, Jun Xu
  • Patent number: 8653596
    Abstract: An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: February 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Terence B. Hook, Ali Khakifirooz, Pranita Kulkarni
  • Patent number: 8652897
    Abstract: Provided are semiconductor memory devices and the methods of fabricating the same. The method may include forming a plurality of diode patterns in each of a plurality of first trenches, each of the plurality of first trenches including at least two active regions, the plurality of diode patterns occupying a plurality of spaces, treating the plurality of diode patterns to form a plurality of semiconductor patterns in each of the plurality of spaces, removing portions of the plurality of semiconductor patterns to form a recess in each of the plurality of spaces, treating the of the plurality of semiconductor patterns to form a plurality of diodes in each of the plurality of spaces, forming a bottom electrode on each of the plurality of diodes, forming a plurality of memory elements on each of the bottom electrodes, and forming a plurality of upper interconnection lines on the plurality of memory elements.
    Type: Grant
    Filed: December 27, 2011
    Date of Patent: February 18, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Youngkuk Kim, Insang Jeon, Youngseok Kim, Young-Lim Park, Ho-Kyun An
  • Publication number: 20140034891
    Abstract: The present invention belongs to the technical field of microelectronic devices, specifically relates to a semiconductor memory structure and its manufacturing method thereof. The semiconductor memory structure which carries out erasing, writing and reading operation on the phase change memory or the resistance change memory through a tunneling field-effect transistor is formed, for one hand, the high current passed through the tunneling field-effect transistor when the p-n junction the biased positively, meeting the high current requirements for erasing of and writing of the phase change memory and the resistance change memory, and on the other hand, Vertical structure of the field-effect transistor can greatly improve the density of memory devices arrays. The present invention also discloses a method, which is very suitable for the memory chips, for the manufacturing of the semiconductor memory structure using self-aligned process.
    Type: Application
    Filed: August 15, 2011
    Publication date: February 6, 2014
    Applicant: FUDAN UNIVERSITY
    Inventors: Pengfei Wang, Xi Lin, Qingqing Sun, Wei Zhang
  • Patent number: 8637363
    Abstract: Methods of manufacturing a semiconductor device are provided. The method includes forming a preliminary mask pattern on an etch target layer. The preliminary mask pattern includes wave line type patterns, and each of the wave line type patterns includes main pattern portions and connection bar pattern portions. Node separation walls are formed on sidewalls of the preliminary mask patterns. The etch target layer is etched using the node separation walls as etch masks to form through holes penetrating the etch target layer. Nodes are formed in respective ones of the through holes.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: January 28, 2014
    Assignee: SK hynix Inc.
    Inventor: Yong Soon Jung
  • Patent number: 8637342
    Abstract: An ovonic threshold switch may be formed of a continuous chalcogenide layer. That layer spans multiple cells, forming a phase change memory. In other words, the ovonic threshold switch may be formed of a chalcogenide layer which extends, uninterrupted, over numerous cells of a phase change memory.
    Type: Grant
    Filed: November 10, 2005
    Date of Patent: January 28, 2014
    Assignee: Ovonyx, Inc.
    Inventors: Ilya V. Karpov, Sean Jong Lee, Yudong Kim, Gregory E. Atwood
  • Publication number: 20140021560
    Abstract: Provided is a high voltage semiconductor device. The high voltage semiconductor device includes a transistor having a gate, a source, and a drain. The source and the drain are formed in a doped substrate and are separated by a drift region of the substrate. The gate is formed over the drift region and between the source and the drain. The transistor is configured to handle high voltage conditions that are at least a few hundred volts. The high voltage semiconductor device includes a dielectric structure formed between the source and the drain of the transistor. The dielectric structure protrudes into and out of the substrate. Different parts of the dielectric structure have uneven thicknesses. The high voltage semiconductor device includes a resistor formed over the dielectric structure. The resistor has a plurality of winding segments that are substantially evenly spaced apart.
    Type: Application
    Filed: July 17, 2012
    Publication date: January 23, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Ker Hsiao Huo, Jen-Hao Yeh, Chun-Wei Hsu
  • Publication number: 20140024183
    Abstract: A method of forming a semiconductor structure is provided. A substrate having a cell area and a periphery area is provided. An oxide material layer and a first conductive material layer are sequentially formed on the substrate in the cell and periphery areas. A patterning step is performed to form first and second stacked structures on the substrate respectively in the cell and periphery areas. First and second spacers are formed respectively on sidewalls of the first and second stacked structures. At least two first doped regions are formed in the substrate beside the first stacked structure, and two second doped regions are formed in the substrate beside the second stacked structure. A dielectric layer and a second conductive layer are formed at least on the first stacked structure. The first stacked structure, the dielectric layer, and the second conductive layer in the cell area constitute a charge storage structure.
    Type: Application
    Filed: October 1, 2012
    Publication date: January 23, 2014
    Inventors: Chen-Chiu Hsu, Tung-Ming Lai, Kai-An Hsueh, Ming-De Huang
  • Publication number: 20140021428
    Abstract: A semiconductor device comprises a first transistor including a first diffusion region, a first body region, and a second diffusion region, formed to align in a direction orthogonal to a main surface; a second transistor including a third diffusion region, a second body region, and a fourth diffusion region, formed to align in a direction orthogonal to the main surface; a first variable resistance element provided in the second diffusion region of the first transistor; a second variable resistance element provided in the fourth diffusion region of the second transistor; a bit line commonly connected to the first variable resistance element and the second variable resistance element; a first word line arranged on a first side of the first body region; a second word line arrange between a second side of the first body region and a first side of the second body region; and a third word line arranged on a second side of the second body region.
    Type: Application
    Filed: July 17, 2013
    Publication date: January 23, 2014
    Inventors: Tomoyasu KAKEGAWA, Takao Adachi, Yoshinori Tanaka
  • Patent number: 8633549
    Abstract: A semiconductor device comprises a metal gate electrode, a passive device and a hard mask layer. The passive device has a poly-silicon element layer. The hard mask layer is disposed on the metal gate electrode and the passive electrode and has a first opening and a second opening substantially coplanar with each other, wherein the metal gate electrode and the poly-silicon element layer are respectively exposed via the first opening and the second opening; and there is a distance between the first opening and the metal gate electrode substantially less than the distance between the second opening and the poly-silicon element layer.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: January 21, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chieh-Te Chen, Shih-Fang Tzou, Jiunn-Hsiung Liao, Yi-Po Lin
  • Publication number: 20140017863
    Abstract: Methods of manufacturing a semiconductor device including metal gates are provided. The method may include forming a resistor pattern and a dummy gate electrode, which include polysilicon, and forming an impurity region adjacent to the dummy gate electrode. The method may further include replacing the dummy gate electrode with a gate electrode and then forming metal silicide patterns on the resistor pattern and the impurity region.
    Type: Application
    Filed: June 14, 2013
    Publication date: January 16, 2014
    Inventors: Yoon-Seok Lee, Yoon-Hae Kim, Hong-Seong Kang, Sung-Ho Son, JunJie Xiong, You-Shin Choi
  • Patent number: 8624352
    Abstract: An IC capacitor bank includes a plurality of high-k metal-insulator-metal (MIM) capacitors connected to a pair of conductive traces. A fusible trace located on an end of one of the pair of conductive traces forms a capacitor column connected between supply lines, such that failure of a dielectric in the MIM capacitors causes the fusible trace to at least partially open thereby limiting a fault current in the capacitor column. Additionally, a method of manufacturing an IC capacitor bank includes providing a plurality of high-k metal-insulator-metal (MIM) capacitors connected to a pair of conductive traces and locating a fusible trace on an end of the pair of conductive traces to form a capacitor column that is connected between supply lines, such that failure of a dielectric in the MIM capacitors causes the fusible trace to at least partially open thereby limiting a fault current in the capacitor column.
    Type: Grant
    Filed: November 24, 2010
    Date of Patent: January 7, 2014
    Assignee: LSI Corporation
    Inventors: Bonnie E. Weir, Edward B. Harris, Ramnath Venkatraman
  • Patent number: 8618586
    Abstract: An object is to provide a memory device which does not need a complex manufacturing process and whose power consumption can be suppressed, and a semiconductor device including the memory device. A solution is to provide a capacitor which holds data and a switching element which controls storing and releasing charge in the capacitor in a memory element. In the memory element, a phase-inversion element such as an inverter or a clocked inverter includes the phase of an input signal is inverted and the signal is output. For the switching element, a transistor including an oxide semiconductor in a channel formation region is used. In the case where application of a power supply voltage to the phase-inversion element is stopped, the data is stored in the capacitor, so that the data is held in the capacitor even when the application of the power supply voltage to the phase-inversion element is stopped.
    Type: Grant
    Filed: January 18, 2013
    Date of Patent: December 31, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Jun Koyama, Shunpei Yamazaki
  • Publication number: 20130341697
    Abstract: The invention relates to the technical field of semiconductor memories, in particular to a tunnel transistor structure integrated with a resistance random access memory and a manufacturing method thereof. The tunnel transistor structure in the present invention comprises a semiconductor substrate, and a tunnel transistor and a resistance random access memory formed on the semiconductor substrate, wherein the gate dielectric layer of the tunnel transistor extends to the surface of a drain region of the tunnel transistor; the part of the gate dielectric layer on the surface of the drain region of the tunnel transistor forms the resistance-variable storage layer of the resistance random access memory.
    Type: Application
    Filed: October 29, 2012
    Publication date: December 26, 2013
    Applicant: FUDAN UNIVERSITY
    Inventors: Xi Lin, Pengfei Wang, Qingqing Sun, Wei Zhang
  • Publication number: 20130341696
    Abstract: The present invention belongs to the technical field of semiconductor memories, in particular to a metal oxide semiconductor (MOS) transistor structure integrated with a resistance random access memory (RRAM). The MOS transistor structure comprises a MOS transistor and a RRAM formed on a substrate, wherein a gate dielectric layer of said MOS transistor extends to the surface of a drain region of said MOS transistor; and the part of the gate dielectric layer on the surface of the drain region of said MOS transistor faults a resistance-variable storage layer of said RRAM. In this invention, the high-quality dielectric layer of the MOS transistor and the resistance-variable storage layer of the RRAM are obtained by primary atomic layer deposition which integrates the RRAM and MOS transistor together without increasing steps.
    Type: Application
    Filed: October 29, 2012
    Publication date: December 26, 2013
    Applicant: FUDAN UNIVERSITY
    Inventors: Xi Lin, Pengfei Wang, Qingqing Sun, Wei Zhang
  • Publication number: 20130337622
    Abstract: A semiconductor process is provided, including following steps. A polysilicon layer is formed on a substrate. An asymmetric dual-side heating treatment is performed to the polysilicon layer, wherein a power for a front-side heating is different from a power for a backside heating.
    Type: Application
    Filed: August 20, 2013
    Publication date: December 19, 2013
    Applicant: United Microelectronics Corp.
    Inventors: Chan-Lon Yang, Ching-Nan Hwang, Chi-Heng Lin, Chun-Yao Yang, Ger-Pin Lin, Ching-I Li
  • Patent number: 8609439
    Abstract: The present disclosure concerns memory device comprising magnetic tunnel junction comprising a tunnel barrier layer between a first ferromagnetic layer having a first magnetization with a fixed orientation and a second ferromagnetic layer having a second magnetization being freely orientable, and a polarizing layer having a polarizing magnetization substantially perpendicular to the first and second magnetization; the first and second ferromagnetic layers being annealed such that a tunnel magnetoresistance of the magnetic tunnel junction is equal or greater than about 150%. Also disclosed is a method of forming the MRAM cell.
    Type: Grant
    Filed: January 12, 2012
    Date of Patent: December 17, 2013
    Assignee: Crocus Technology SA
    Inventors: Ioan Lucian Prejbeanu, Ricardo Sousa
  • Patent number: 8609523
    Abstract: A memory array with staggered local data/bit lines extending generally in a first direction formed in an upper surface of a substrate and memory cell access transistors extending generally upward and aligned generally atop a corresponding local data/bit line. Selected columns of the memory cell access transistors are sacrificed to define local data/bit access transistors which are interconnected with overlying low resistance global data/bit lines. The global data/bit lines provide selectable low resistance paths between memory cells and sense amplifiers. The sacrificed memory cell access transistors and staggered local data/bit lines provide increased footprints for sense amplifiers to facilitate increased circuit integration.
    Type: Grant
    Filed: December 5, 2012
    Date of Patent: December 17, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Leonard Forbes
  • Patent number: 8609457
    Abstract: Generally, the present disclosure is directed to a semiconductor device with DRAM bit lines made from the same material as the gate electrodes in non-memory regions of the device, and methods of making the same. One illustrative method disclosed herein comprises forming a semiconductor device including a memory array and a logic region. The method further comprises forming a buried word line in the memory array and, after forming the buried word line, performing a first common process operation to form at least a portion of a conductive gate electrode in the logic region and to form at least a portion of a conductive bit line in the memory array.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: December 17, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Peter Baars, Till Schloesser, Frank Jakubowski
  • Patent number: 8604532
    Abstract: A dynamic random access memory cell is disclosed that comprises a capacitive storage device and a write access transistor. The write access transistor is operatively coupled to the capacitive storage device and has a gate stack that comprises a high-K dielectric, wherein the high-K dielectric has a dielectric constant greater than a dielectric constant of silicon dioxide. Also disclosed are a memory array using the cells, a computing apparatus using the memory array, a method of storing data, and a method of manufacturing.
    Type: Grant
    Filed: August 18, 2009
    Date of Patent: December 10, 2013
    Assignee: International Business Machines Corporation
    Inventors: Win K. Luk, Jin Cai
  • Patent number: 8603876
    Abstract: A dynamic random access memory cell is disclosed that comprises a capacitive storage device and a write access transistor. The write access transistor is operatively coupled to the capacitive storage device and has a gate stack that comprises a high-K dielectric, wherein the high-K dielectric has a dielectric constant greater than a dielectric constant of silicon dioxide. Also disclosed are a memory array using the cells, a computing apparatus using the memory array, a method of storing data, and a method of manufacturing.
    Type: Grant
    Filed: August 18, 2009
    Date of Patent: December 10, 2013
    Assignee: International Business Machines Corporation
    Inventors: Win K. Luk, Jin Cai
  • Patent number: 8598004
    Abstract: A method for fabricating a semiconductor integrated circuit and resulting structure. The method includes providing a semiconductor substrate with an overlying dielectric layer and forming a polysilicon gate layer and an overlying capping layer. The gate layer is overlying the dielectric layer. The method also includes patterning the polysilicon gate layer to form a gate structure and a local interconnect structure. The gate structure and the local interconnect structure include a contact region defined therebetween. The gate structure also includes the overlying capping layer. The method includes forming sidewall spacers on the gate structure and the local interconnect structure and removing the sidewall spacer on the local interconnect structure. The method also includes forming contact polysilicon on the contact region and implanting a dopant impurity into the contact polysilicon.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: December 3, 2013
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Tzu Yin Chiu
  • Publication number: 20130316504
    Abstract: A semiconductor device having a core device with a high-k gate dielectric and an I/O device with a silicon dioxide or other non-high-k gate dielectric, and a method of fabricating such a device. A core well and an I/O well are created in a semiconductor substrate and separated by an isolation structure. An I/O device is formed over the I/O well and has a silicon dioxide or a low-k gate dielectric. A resistor may be formed on an isolation structure adjacent to the core well. A core-well device such as a transistor is formed over the core well, and has a high-k gate dielectric. In some embodiments, a p-type I/O well and an n-type I/O well are created. In a preferred embodiment, the I/O device or devices are formed prior to forming the core device and protected with a sacrificial layer until the core device is fabricated.
    Type: Application
    Filed: May 10, 2013
    Publication date: November 28, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Taiwan Semiconductor Manufacturing Company, Ltd.
  • Publication number: 20130307074
    Abstract: An electrical device is provided that includes a substrate having an upper semiconductor layer, a buried dielectric layer and a base semiconductor layer. At least one isolation region is present in the substrate that defines a semiconductor device region and a resistor device region. The semiconductor device region includes a semiconductor device having a back gate structure that is present in the base semiconductor layer. Electrical contact to the back gate structure is provided by doped epitaxial semiconductor pillars that extend through the buried dielectric layer. An epitaxial semiconductor resistor is present in the resistor device region. Undoped epitaxial semiconductor pillars extending from the epitaxial semiconductor resistor to the base semiconductor layer provide a pathway for heat generated by the epitaxial semiconductor resistor to be dissipated to the base semiconductor layer. The undoped and doped epitaxial semiconductor pillars are composed of the same epitaxial semiconductor material.
    Type: Application
    Filed: May 16, 2012
    Publication date: November 21, 2013
    Applicant: International Business Machines Corporation
    Inventors: Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek, Thomas N. Adam
  • Patent number: 8587224
    Abstract: Provided are a variable field effect transistor (FET) designed to suppress a reduction of current between a source and a drain due to heat while decreasing a temperature of the FET, and an electrical and electronic apparatus including the variable gate FET. The variable gate FET includes a FET and a gate control device that is attached to a surface or a heat-generating portion of the FET and is connected to a gate terminal of the FET so as to vary a voltage of the gate terminal. A channel current between the source and drain is controlled by the gate control device that varies the voltage of the gate terminal when the temperature of the FET increases above a predetermined temperature.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: November 19, 2013
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Hyun-Tak Kim, Bongjun Kim