Deposition ring for physical vapor deposition chamber

- APPLIED MATERIALS, INC.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a perspective view of a deposition ring for a physical vapor deposition chamber, according to the novel design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a left side elevation view thereof.

FIG. 7 is a right side elevation view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.

The dashed lines in FIGS. 1-8 represent unclaimed environment forming no part of the claimed design.

Claims

The ornamental design for a deposition ring for a physical vapor deposition chamber, as shown and described.

Referenced Cited
U.S. Patent Documents
D244533 May 31, 1977 Eidelberg et al.
D338621 August 24, 1993 Balson
D379588 June 3, 1997 Pledger et al.
5803977 September 8, 1998 Tepman et al.
5863340 January 26, 1999 Flanigan
D491963 June 22, 2004 Doba
D497977 November 2, 2004 Engelbrektsson
7282123 October 16, 2007 Kosyachkov
D557226 December 11, 2007 Uchino
7520969 April 21, 2009 Miller
8221602 July 17, 2012 Brown et al.
D665491 August 14, 2012 Goel et al.
8596870 December 3, 2013 Akita et al.
D699200 February 11, 2014 Nagakubo
D703160 April 22, 2014 Tanimura
D709536 July 22, 2014 Yoshimura
8911601 December 16, 2014 Rasheed et al.
D766849 September 20, 2016 Fukushima
9472443 October 18, 2016 Rasheed et al.
D770992 November 8, 2016 Tauchi
9534286 January 3, 2017 Yoshidome et al.
9689070 June 27, 2017 Rasheed et al.
D793976 August 8, 2017 Fukushima
D797691 September 19, 2017 Joubert
D799437 October 10, 2017 Nabeya
D810705 February 20, 2018 Krishnan
9909206 March 6, 2018 Johanson et al.
9960021 May 1, 2018 Riker et al.
10103012 October 16, 2018 Johanson et al.
D876504 February 25, 2020 Lee
D888903 June 30, 2020 Gunther
D891382 July 28, 2020 Koppa
D933725 October 19, 2021 Koppa
D933726 October 19, 2021 Savandaiah
D937329 November 30, 2021 Riker
D940670 January 11, 2022 Kim
11390945 July 19, 2022 Jun
11396082 July 26, 2022 Nishida
D992615 July 18, 2023 Sasaki
20060090706 May 4, 2006 Miller et al.
20070102286 May 10, 2007 Scheible et al.
20070209931 September 13, 2007 Miller
20070283884 December 13, 2007 Tiller et al.
20080141942 June 19, 2008 Brown et al.
20090260982 October 22, 2009 Riker et al.
20100108500 May 6, 2010 Hawrylchak
20120042825 February 23, 2012 Hawrylchak
20120103257 May 3, 2012 Rasheed et al.
20120263569 October 18, 2012 Priddy
20130206070 August 15, 2013 Chen
20140190822 July 10, 2014 Riker et al.
20140262763 September 18, 2014 Rasheed et al.
20150047563 February 19, 2015 Chung et al.
20160002788 January 7, 2016 Nal
20170002461 January 5, 2017 Johanson et al.
20180010242 January 11, 2018 Rasheed et al.
20200090915 March 19, 2020 Kerschbaumer
Foreign Patent Documents
206573738 October 2017 CN
207176067 April 2018 CN
223429 May 1994 TW
223430 May 1994 TW
M431893 June 2012 TW
201413868 April 2014 TW
D180764 January 2017 TW
D181803 March 2017 TW
I600108 September 2017 TW
D188898 March 2018 TW
D191626 July 2018 TW
WO 2008/079722 July 2008 WO
Other references
  • International Search Report and Written Opinion for PCT/US2019/065900 dated Apr. 10, 2020.
  • Search Report for Taiwan Design Application No. 108303547, dated Dec. 10, 2019.
Patent History
Patent number: D1040304
Type: Grant
Filed: Jun 25, 2021
Date of Patent: Aug 27, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: David Gunther (San Jose, CA), Cheng-Hsiung Tsai (Cupertino, CA), Kirankumar Neelasandra Savandaiah (Bangalore)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/796,739