Deposition ring for physical vapor deposition chamber
Latest APPLIED MATERIALS, INC. Patents:
- SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
- CENTERING WAFER FOR PROCESSING CHAMBER
- VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCED ATTENUATION
- Fluid-tight electrical connection techniques for semiconductor processing
- Flexible multi-layered cover lens stacks for foldable displays
Description
The dashed lines in
Claims
The ornamental design for a deposition ring for a physical vapor deposition chamber, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
D244533 | May 31, 1977 | Eidelberg et al. |
D338621 | August 24, 1993 | Balson |
D379588 | June 3, 1997 | Pledger et al. |
5803977 | September 8, 1998 | Tepman et al. |
5863340 | January 26, 1999 | Flanigan |
D491963 | June 22, 2004 | Doba |
D497977 | November 2, 2004 | Engelbrektsson |
7282123 | October 16, 2007 | Kosyachkov |
D557226 | December 11, 2007 | Uchino |
7520969 | April 21, 2009 | Miller |
8221602 | July 17, 2012 | Brown et al. |
D665491 | August 14, 2012 | Goel et al. |
8596870 | December 3, 2013 | Akita et al. |
D699200 | February 11, 2014 | Nagakubo |
D703160 | April 22, 2014 | Tanimura |
D709536 | July 22, 2014 | Yoshimura |
8911601 | December 16, 2014 | Rasheed et al. |
D766849 | September 20, 2016 | Fukushima |
9472443 | October 18, 2016 | Rasheed et al. |
D770992 | November 8, 2016 | Tauchi |
9534286 | January 3, 2017 | Yoshidome et al. |
9689070 | June 27, 2017 | Rasheed et al. |
D793976 | August 8, 2017 | Fukushima |
D797691 | September 19, 2017 | Joubert |
D799437 | October 10, 2017 | Nabeya |
D810705 | February 20, 2018 | Krishnan |
9909206 | March 6, 2018 | Johanson et al. |
9960021 | May 1, 2018 | Riker et al. |
10103012 | October 16, 2018 | Johanson et al. |
D876504 | February 25, 2020 | Lee |
D888903 | June 30, 2020 | Gunther |
D891382 | July 28, 2020 | Koppa |
D933725 | October 19, 2021 | Koppa |
D933726 | October 19, 2021 | Savandaiah |
D937329 | November 30, 2021 | Riker |
D940670 | January 11, 2022 | Kim |
11390945 | July 19, 2022 | Jun |
11396082 | July 26, 2022 | Nishida |
D992615 | July 18, 2023 | Sasaki |
20060090706 | May 4, 2006 | Miller et al. |
20070102286 | May 10, 2007 | Scheible et al. |
20070209931 | September 13, 2007 | Miller |
20070283884 | December 13, 2007 | Tiller et al. |
20080141942 | June 19, 2008 | Brown et al. |
20090260982 | October 22, 2009 | Riker et al. |
20100108500 | May 6, 2010 | Hawrylchak |
20120042825 | February 23, 2012 | Hawrylchak |
20120103257 | May 3, 2012 | Rasheed et al. |
20120263569 | October 18, 2012 | Priddy |
20130206070 | August 15, 2013 | Chen |
20140190822 | July 10, 2014 | Riker et al. |
20140262763 | September 18, 2014 | Rasheed et al. |
20150047563 | February 19, 2015 | Chung et al. |
20160002788 | January 7, 2016 | Nal |
20170002461 | January 5, 2017 | Johanson et al. |
20180010242 | January 11, 2018 | Rasheed et al. |
20200090915 | March 19, 2020 | Kerschbaumer |
206573738 | October 2017 | CN |
207176067 | April 2018 | CN |
223429 | May 1994 | TW |
223430 | May 1994 | TW |
M431893 | June 2012 | TW |
201413868 | April 2014 | TW |
D180764 | January 2017 | TW |
D181803 | March 2017 | TW |
I600108 | September 2017 | TW |
D188898 | March 2018 | TW |
D191626 | July 2018 | TW |
WO 2008/079722 | July 2008 | WO |
- International Search Report and Written Opinion for PCT/US2019/065900 dated Apr. 10, 2020.
- Search Report for Taiwan Design Application No. 108303547, dated Dec. 10, 2019.
Patent History
Patent number: D1040304
Type: Grant
Filed: Jun 25, 2021
Date of Patent: Aug 27, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: David Gunther (San Jose, CA), Cheng-Hsiung Tsai (Cupertino, CA), Kirankumar Neelasandra Savandaiah (Bangalore)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/796,739
Type: Grant
Filed: Jun 25, 2021
Date of Patent: Aug 27, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: David Gunther (San Jose, CA), Cheng-Hsiung Tsai (Cupertino, CA), Kirankumar Neelasandra Savandaiah (Bangalore)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Mark T. Philipps
Application Number: 29/796,739
Classifications