Boat for wafer processing apparatus
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For clarity, due to the nature and size of the portions of the article that form no part of the claimed design in
The dashed-dot-dashed lines represent the boundary lines of the claimed design in
Claims
The ornamental design for a boat for wafer processing apparatus, as shown and described.
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Type: Grant
Filed: Dec 10, 2019
Date of Patent: Dec 28, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hironori Shimada (Toyama), Daigi Kamimura (Toyama), Tomoshi Taniyama (Toyama), Shuhei Saido (Toyama), Takafumi Sasaki (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/716,458