Boat for wafer processing apparatus

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Description

FIG. 1 is a front, top and right side perspective view of a boat for wafer processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged portion view taken from the portion labeled FIG. 8 in FIG. 2;

FIG. 9 is a cross-sectional view in the direction of the arrows along line 9-9 in FIG. 2;

FIG. 10 is a cross-sectional view in the direction of the arrows along line 10-10 in FIG. 2;

FIG. 11 is a perspective view of FIG. 8 with the cylindrical device shown in broken lines removed for ease of illustration;

FIG. 12 is a front elevational view of FIG. 11;

FIG. 13 is a right side elevational view of FIG. 11;

FIG. 14 is a left side elevational view of FIG. 11;

FIG. 15 is a rear elevational view of FIG. 11;

FIG. 16 is a top plan view of FIG. 11; and,

FIG. 17 is a bottom plan view of FIG. 11.

For clarity, due to the nature and size of the portions of the article that form no part of the claimed design in FIGS. 9 and 10, hatching to indicate the cut sections is not shown in FIGS. 9 and 10.

The dashed-dot-dashed lines represent the boundary lines of the claimed design in FIGS. 1-5 and 8. The even dashed broken lines showing a full or portions of a cylindrical device in FIGS. 1-10 are included for the purpose of illustrating environment and form no part of the claimed design. The dot-dash broken line of the box showing the enlarged portion view of FIG. 8 in FIG.2 shows the bounds of the enlarged portion view and forms no part of the claimed design.

Claims

The ornamental design for a boat for wafer processing apparatus, as shown and described.

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Patent History
Patent number: D939459
Type: Grant
Filed: Dec 10, 2019
Date of Patent: Dec 28, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hironori Shimada (Toyama), Daigi Kamimura (Toyama), Tomoshi Taniyama (Toyama), Shuhei Saido (Toyama), Takafumi Sasaki (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/716,458