Target profile for a physical vapor deposition chamber target
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Description
The dashed lines of the cut line showing the plane upon which
Claims
The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
Referenced Cited
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Patent History
Patent number: D851613
Type: Grant
Filed: Oct 5, 2017
Date of Patent: Jun 18, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: William Johanson (Gilroy, CA), Kirankumar Savandaiah (Bangalore), Anthony Chih-Tang Chan (Sunnyvale, CA), Siew Kit Hoi (Singapore), Prashant Prabhakar Prabhu (Karwar)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/621,221
Type: Grant
Filed: Oct 5, 2017
Date of Patent: Jun 18, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: William Johanson (Gilroy, CA), Kirankumar Savandaiah (Bangalore), Anthony Chih-Tang Chan (Sunnyvale, CA), Siew Kit Hoi (Singapore), Prashant Prabhakar Prabhu (Karwar)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/621,221
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)