Capacitor Patents (Class 438/239)
  • Patent number: 8481395
    Abstract: The use of a monolayer or partial monolayer sequencing process, such as atomic layer deposition, to form a dielectric layer of hafnium oxide doped with dysprosium and a method of fabricating such a combination produces a reliable structure for use in a variety of electronic devices. Forming the dielectric structure can include depositing hafnium oxide onto a substrate surface using precursor chemicals, followed by depositing dysprosium oxide onto the substrate using precursor chemicals, and repeating to form a thin laminate structure. A dielectric layer of dysprosium doped hafnium oxide may be used as the gate insulator of a MOSFET, as a capacitor dielectric in a DRAM, as a tunnel gate insulator in flash memories, or as a dielectric in NROM devices, because the high dielectric constant (high-k) of the film provides the functionality of a thinner silicon dioxide film, and because the reduced leakage current of the dielectric layer when the percentage of dysprosium doping is optimized improves memory function.
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: July 9, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Kie Y. Ahn, Leonard Forbes
  • Patent number: 8476688
    Abstract: A semiconductor device that prevents the leaning of storage node when forming a capacitor having high capacitance includes a plurality of cylinder-shaped storage nodes formed over a semiconductor substrate; and support patterns formed to fix the storage nodes in the form of an ‘L’ or a ‘+’ when viewed from the top. This semiconductor device having support patterns in the form of an ‘L’ or a ‘+’ reduces stress on the storage nodes when subsequently forming a dielectric layer and plate nodes that prevents the capacitors from leaking.
    Type: Grant
    Filed: October 2, 2008
    Date of Patent: July 2, 2013
    Assignee: Hynix Semiconductor Inc.
    Inventors: Ho Jin Cho, Cheol Hwan Park, Jae Wook Seo, Jong Kuk Kim
  • Patent number: 8470667
    Abstract: A method of manufacturing a semiconductor memory device includes forming a first capacitor using a metal oxide semiconductor (MOS) transistor, forming a second capacitor being a pillar type corresponding to a cell capacitor formed in a cell region, and forming a third capacitor over the first and the second capacitors.
    Type: Grant
    Filed: July 19, 2010
    Date of Patent: June 25, 2013
    Assignee: Hynix Semiconductor Inc
    Inventor: Dong Chul Koo
  • Patent number: 8470680
    Abstract: A process for forming a laminate with capacitance and the laminate formed thereby. The process includes the steps of providing a substrate and laminating a conductive foil on the substrate wherein the foil has a dielectric. A conductive layer is formed on the dielectric. The conductive foil is treated to electrically isolate a region of conductive foil containing the conductive layer from additional conductive foil. A cathodic conductive couple is made between the conductive layer and a cathode trace and an anodic conductive couple is made between the conductive foil and an anode trace.
    Type: Grant
    Filed: July 28, 2008
    Date of Patent: June 25, 2013
    Assignees: Kemet Electronics Corporation, Motorola, Inc.
    Inventors: John D. Prymak, Chris Stolarski, Alethia Melody, Antony P. Chacko, Gregory J. Dunn
  • Patent number: 8466467
    Abstract: An organic light-emitting display apparatus includes: an active layer formed on the substrate; a gate electrode, in which a first insulation layer formed on the active layer, a first conductive layer formed on the first insulation layer and comprising a transparent conductive material, and a second conductive layer comprising a metal are sequentially stacked; a pixel electrode, in which a first electrode layer formed on the first insulation layer to be spaced apart from the gate electrode and comprising a transparent conductive material, a second electrode layer formed of a semi-permeable metal and comprising pores, and a third electrode layer comprising a metal are sequentially stacked; source/drain electrodes electrically connected to the active layer with a second insulation layer covering the gate electrode and the pixel electrode interposed therebetween; an electro-luminescence (EL) layer formed on the pixel electrode; and an opposite electrode formed on the EL layer to face the pixel electrode, wherein
    Type: Grant
    Filed: April 27, 2011
    Date of Patent: June 18, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventor: In-Young Jung
  • Publication number: 20130146954
    Abstract: The present invention provides a memory array including a substrate, an isolation region, a plurality of active regions, a plurality of buried bit lines, a plurality of word lines, a plurality of drain regions and a plurality of capacitors. The isolation region and the active regions are disposed in the substrate and the active regions are encompassed and isolated by the isolation region. The buried bit lines are disposed in the substrate and extend in the second direction. The word lines are disposed in the substrate extend in the first direction. The drain regions are disposed in the active region not covered by the word lines. The capacitors are disposed on the substrate and electrically connected to the drain regions.
    Type: Application
    Filed: March 26, 2012
    Publication date: June 13, 2013
    Inventors: Tzung-Han Lee, Chung-Lin Huang, Ron Fu Chu
  • Publication number: 20130146952
    Abstract: A device including a semiconductor on insulator (SOI) substrate including a semiconductor device region and a capacitor device region. A semiconductor device present in the semiconductor device region. The semiconductor device including a gate structure present on a semiconductor on insulator (SOI) layer of the SOI substrate, extension source and drain regions present in the SOI layer on opposing sides of the gate structure, and raised source and drain regions composed of a first portion of an epitaxial semiconductor material on the SOI layer. A capacitor is present in the capacitor device region, said capacitor including a first electrode comprised of a second portion of the epitaxial semiconductor material that has a same composition and crystal structure as the first portion of the epitaxial semiconductor material, a node dielectric layer present on the second portion of the epitaxial semiconductor material, and a second electrode comprised of a conductive material.
    Type: Application
    Filed: December 8, 2011
    Publication date: June 13, 2013
    Applicant: International Business Machines Corporation
    Inventors: THOMAS N. ADAM, Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek
  • Patent number: 8461012
    Abstract: A method for forming a semiconductor structure includes forming an isolation region in a semiconductor substrate; forming a conductive layer over the isolation region; forming a first dielectric layer over the conductive layer; forming a plurality of conductive vias extending through the first dielectric layer to the conductive layer and electrically contacting the conductive layer; forming a second dielectric layer over the first dielectric layer; and forming a conductive ground plane in the second dielectric layer. Each of the plurality of conductive vias is in electrical contact with the conductive ground plane, and the conductive ground plane includes an opening, wherein the opening is located directly over the conductive layer. At least one interconnect layer may be formed over the second dielectric layer and may include a transmission line which transmits a signal having a frequency of at least 30 gigahertz.
    Type: Grant
    Filed: February 26, 2010
    Date of Patent: June 11, 2013
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Vishal P. Trivedi
  • Patent number: 8460995
    Abstract: An embedded memory system includes an array of random access memory (RAM) cells, on the same substrate as an array of logic transistors. Each RAM cell includes an access transistor and a capacitor structure. The capacitor structure is fabricated by forming a metal-insulator-metal capacitor in a dielectric layer. The embedded RAM system includes fewer metal layers in the memory region than in the logic region.
    Type: Grant
    Filed: July 30, 2010
    Date of Patent: June 11, 2013
    Assignee: MoSys, Inc.
    Inventor: Jeong Y. Choi
  • Patent number: 8455316
    Abstract: A vertical semiconductor device, a DRAM device, and associated methods, the vertical semiconductor device including single crystalline active bodies vertically disposed on an upper surface of a single crystalline substrate, each of the single crystalline active bodies having a first active portion on the substrate and a second active portion on the first active portion, and the first active portion having a first width smaller than a second width of the second active portion, a gate insulating layer on a sidewall of the first active portion and the upper surface of the substrate, a gate electrode on the gate insulating layer, the gate electrode having a linear shape surrounding the active bodies, a first impurity region in the upper surface of the substrate under the active bodies, and a second impurity region in the second active portion.
    Type: Grant
    Filed: December 14, 2011
    Date of Patent: June 4, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-Hoon Son, Jong-Wook Lee, Jong-Hyuk Kang
  • Patent number: 8450738
    Abstract: An active matrix substrate includes: pixel regions (5L, 5R, and 5M) provided in line and column direction; scan signal lines (16? and 16?); data signal lines (Sp, Sq, sp, and sq) crossing the scan signal lines at right angles; a gate insulating film covering the scan signal lines; and an interlayer insulating film covering the data signal lines, two of the data signal lines (Sq and sp) being provided (i) so as to overlap a gap between two of the pixel regions (5L and 5R) which are adjacent to each other in the line direction or (ii) so as to overlap a region which extends along the gap, the interlayer insulating film having a hollow part K so that the hollow part K and a gap between the two of the data signal lines (Sq and sp) overlap each other, and part of the hollow part K and the scan signal lines (16? and 16?) overlap each other via the gate insulating film.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: May 28, 2013
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Toshihide Tsubata, Toshinori Sugihara
  • Patent number: 8450806
    Abstract: A silicon-on-insulator (SOI) device and structure having locally strained regions in the silicon active layer formed by increasing the thickness of underlying regions of a buried insulating layer separating the silicon active layer from the substrate. The stress transferred from the underlying thickened regions of the insulating layer to the overlying strained regions increases carrier mobility in these confined regions of the active layer. Devices formed in and on the silicon active layer may benefit from the increased carrier mobility in the spaced-apart strained regions.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: May 28, 2013
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Charles William Koburger, III, James Albert Slinkman
  • Publication number: 20130130450
    Abstract: An analog floating-gate electrode in an integrated circuit, and method of fabricating the same, in which trapped charge can be stored for long durations. The analog floating-gate electrode is formed in a polycrystalline silicon gate level, and includes portions serving as a transistor gate electrode, a plate of a metal-to-poly storage capacitor, and a plate of poly-to-active tunneling capacitors. Silicide-block silicon dioxide blocks the formation of silicide cladding on the electrode, while other polysilicon structures in the integrated circuit are silicide-clad.
    Type: Application
    Filed: December 18, 2012
    Publication date: May 23, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventor: TEXAS INSTRUMENTS INCORPORATED
  • Publication number: 20130126954
    Abstract: The present invention is related to microelectronic technologies, and discloses specifically a dynamic random access memory (DRAM) array and methods of making the same. The DRAM array uses vertical MOS field effect transistors as array devices for the DRAM, and a buried metal silicide layer as buried bit lines for connecting multiple consecutive vertical MOS field effect transistor array devices. Each of the vertical MOS field-effect-transistor array devices includes a double gate structure with a buried layer of metal, which acts at the same time as buried word lines for the DRAM array. The DRAM array according to the present invention provides increased DRAM integration density, reduced buried bit line resistivity, and improved memory performance of the array devices. The present invention also provides a method of making a DRAM array.
    Type: Application
    Filed: January 4, 2011
    Publication date: May 23, 2013
    Applicant: FUDAN UNIVERSITY
    Inventors: Dongping Wu, Shi-Li Zhang, Peng-Fei Wang, Wei Zhang
  • Patent number: 8441097
    Abstract: Methods to form memory devices having a MIM capacitor with a recessed electrode are described. In one embodiment, a method of forming a MIM capacitor with a recessed electrode includes forming an excavated feature defined by a lower portion that forms a bottom and an upper portion that forms sidewalls of the excavated feature. The method includes depositing a lower electrode layer in the feature, depositing an electrically insulating layer on the lower electrode layer, and depositing an upper electrode layer on the electrically insulating layer to form the MIM capacitor. The method includes removing an upper portion of the MIM capacitor to expose an upper surface of the electrode layers and then selectively etching one of the electrode layers to recess one of the electrode layers. This recess isolates the electrodes from each other and reduces the likelihood of a current leakage path between the electrodes.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: May 14, 2013
    Assignee: Intel Corporation
    Inventors: Joseph M. Steigerwald, Nick Lindert, Steven J. Keating, Christopher J. Jezewski, Timothy E. Glassman
  • Publication number: 20130112976
    Abstract: A thin-film transistor array substrate is disclosed. In one embodiment, the substrate includes: i) a thin-film transistor including an active layer, and gate, source and drain electrodes, ii) a lower electrode of a capacitor, iii) an upper electrode of the capacitor formed on the lower electrode iv) a first insulation layer between the lower and upper electrodes, and between the active layer and the gate electrode, and having a gap outside the lower electrode. The substrate may further include i) a second insulation layer formed on the first insulation layer and having the same etching surface as the first insulation layer in the gap, ii) a bridge formed of the same material as the source and drain electrodes, and filling a part of the gap and iii) a third insulation layer covering the source and drain electrodes and exposing a pixel electrode.
    Type: Application
    Filed: June 18, 2012
    Publication date: May 9, 2013
    Applicant: Samsung Mobile Display Co., Ltd.
    Inventors: Byoung-Ki Kim, Dae-Woo Lee, Jong-Hyun Choi
  • Patent number: 8435854
    Abstract: A method for forming a DRAM MIM capacitor stack having low leakage current involves the use of a first electrode that serves as a template for promoting the high k phase of a subsequently deposited dielectric layer. The high k dielectric layer comprises a doped material that can be crystallized after a subsequent annealing treatment. A metal oxide second electrode layer is formed above the dielectric layer. The metal oxide second electrode layer has a crystal structure that is compatible with the crystal structure of the dielectric layer. Optionally, a second electrode bulk layer is formed above the metal oxide second electrode layer.
    Type: Grant
    Filed: November 11, 2011
    Date of Patent: May 7, 2013
    Assignees: Intermolecular, Inc., Elpida Memory, Inc.
    Inventors: Sandra Malhotra, Hanhong Chen, Wim Deweerd, Hiroyuki Ode
  • Patent number: 8426321
    Abstract: A process for making a dielectric material where a precursor polymer selected from poly(phenylene vinylene)polyacetylene, poly(p-phenylene), poly(thienylene vinylene), poly(1,4-naphthylene vinylene), and poly(p-pyridine vinylene) is energized said by exposure by radiation or increase in temperature to a level sufficient to eliminate said leaving groups contained within the precursor polymer, thereby transforming the dielectric material into a conductive polymer. The leaving group in the precursor polymer can be a chloride, a bromide, an iodide, a fluoride, an ester, an xanthate, a nitrile, an amine, a nitro group, a carbonate, a dithiocarbamate, a sulfonium group, an oxonium group, an iodonium group, a pyridinium group, an ammonium group, a borate group, a borane group, a sulphinyl group, or a sulfonyl group.
    Type: Grant
    Filed: May 2, 2011
    Date of Patent: April 23, 2013
    Assignee: Sandia Corporation
    Inventors: Shawn M. Dirk, Ross S. Johnson, David R. Wheeler, Gregory R. Bogart
  • Patent number: 8426306
    Abstract: A method of forming a non-volatile memory device. The method forms a vertical stack of first polysilicon material and a second polysilicon material layer isolated by a dielectric material. The polysilicon material layers and the dielectric material are subjected to a first pattern and etch process to form a first wordline associated with a first switching device and a second wordline associated with a second switching device from the first polysilicon material layer, and a third wordline associated with a third switching device and a fourth wordline associated with a fourth switching device from the second polysilicon material. A via opening is formed to separate the first wordline from the second wordline and to separate the third wordline from the fourth wordline. An amorphous silicon switching material is deposited conformably overlying the via opening. A metal material fills the via opening and connects to a common bitline.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 23, 2013
    Assignee: Crossbar, Inc.
    Inventors: Harry Gee, Sung Hyun Jo, Hagop Nazarian, Scott Brad Herner
  • Patent number: 8426271
    Abstract: This invention belongs to semiconductor device manufacturing field and discloses a method for manufacturing a gate-control diode semiconductor storage device. When the floating gate voltage is relatively high, the channel under the floating gate is of n type and the device is of a simple gate-control pn junction structure; by controlling effective n-type concentration of the ZnO film through back-gate control, inverting the n-type ZnO into p-type through the floating gate and using NiO as a p-type semiconductor, an n-p-n-p doping structure is formed. The quantity of charges in the floating gate determines the device threshold voltage, thus realizing the memory functions. This invention features capacity of manufacturing memory devices able to reduce the chip power consumption through advantages of high driving current and small sub threshold swing, is applicable to semiconductor memory devices manufacturing based on flexible substrates and flat panel displays and floating gate memories, etc.
    Type: Grant
    Filed: June 27, 2012
    Date of Patent: April 23, 2013
    Assignee: Fudan University
    Inventors: Pengfei Wang, Chengwei Cao, Qingqing Sun, Wei Zhang
  • Publication number: 20130092991
    Abstract: The NVM device includes a semiconductor substrate having a first region and a second region. The NVM device includes a data-storing structure formed in the first region and designed operable to retain charges. The NVM device includes a capacitor formed in the second region and coupled with the data-storing structure for data operations. The data-storing structure includes a first doped well of a first-type in the semiconductor substrate. The data-storing structure includes a first gate dielectric feature on the first doped well. The data-storing structure includes a first gate electrode disposed on the first gate dielectric feature and configured to be floating. The capacitor includes a second doped well of the first-type. The capacitor includes a second gate dielectric feature on the second doped well. The capacitor also includes a second gate electrode disposed on the second gate dielectric feature and connected to the first gate electrode.
    Type: Application
    Filed: October 14, 2011
    Publication date: April 18, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Ta-Chuan Liao, Chien-Kuo Yang, Ying-Kit Tsui, Shih-Hsien Chen, Liang-Tai Kuo, Chun-Yao Ko
  • Publication number: 20130092989
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell.
    Type: Application
    Filed: October 13, 2011
    Publication date: April 18, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Ting, Kuo-Ching Huang
  • Publication number: 20130095621
    Abstract: A passive implementation of an image reject mixer (IRM), capable of operating at very high frequency, is manufactured in a variety of silicon processes. The IRM comprises a quad MOS multiplier and a lumped-element hybrid, resulting in a passive IRM, operative at radio frequencies (RF) of tens of GHz with an intermediate frequency (IF) of several GHz. The RF+ and RF? signals are provided to two quad MOS multipliers. A local oscillator signal (LO) is used to provide LO+ and LO? signals to one of the multipliers and by providing the LO to a phase shifter, generated are a ninety degree shifted LO+ and LO? signals provided to the other multiplier. Providing the hybrids with the outputs of both multipliers and selecting an appropriate IF signal from each of the hybrids ensures the proper operation of the passive IRM.
    Type: Application
    Filed: December 10, 2012
    Publication date: April 18, 2013
    Applicant: THETA S.A.
    Inventor: Ioannis Papananos
  • Patent number: 8421146
    Abstract: A semiconductor device includes: a semiconductor substrate; a silicon pillar provided perpendicularly to a main surface of the semiconductor substrate; a gate dielectric film that covers a portion of a side surface of the silicon pillar; an insulator pillar that covers remaining portions of the side surface of the silicon pillar; a gate electrode that covers the silicon pillar via the gate dielectric film and the insulator pillar; an interlayer dielectric film provided above the silicon pillar, the gate dielectric film, the insulator pillar, and the gate electrode; and a gate contact plug embedded in a contact hole provided in the interlayer dielectric film, and in contact with the gate electrode and the insulator pillar. A film thickness of the insulator pillar in a lateral direction is thicker than a film thickness of the gate dielectric film in a lateral direction.
    Type: Grant
    Filed: April 10, 2012
    Date of Patent: April 16, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Kazuhiro Nojima
  • Patent number: 8420432
    Abstract: Provided is a method of forming a semiconductor device. The method includes forming an insulating film on a semiconductor substrate, a conductive film on the insulating film, and a first structure and a second structure on the conductive film. The semiconductor substrate has first and second regions. The first and second structures are formed on the first and second regions, respectively. An impurity diffused region is formed in the semiconductor substrate using the first structure as a mask. The impurity diffused region overlaps the first structure. A portion of the first structure, and the conductive film are etched to respectively form a gate structure and a capacitor structure on the first and second regions.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: April 16, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Won Choi, Jun-Seok Yang, Keon-Yong Cheon, Sung-Hyun Yoon
  • Patent number: 8420479
    Abstract: A contact level in a semiconductor device may be used for providing a capacitor that may be directly connected to a transistor, thereby providing a very space-efficient capacitor/transistor configuration. For example, superior dynamic RAM arrays may be formed on the basis of the capacitor/transistor configuration disclosed herein.
    Type: Grant
    Filed: November 9, 2010
    Date of Patent: April 16, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventor: Dmytro Chumakov
  • Patent number: 8415217
    Abstract: A capacitor and an NVM cell are formed in an integrated fashion so that the etching of the capacitor is useful in end point detection of an etch of the NVM cell. This is achieved using two conductive layers over an NVM region and over a capacitor region. The first conductive layer is patterned in preparation for a subsequent patterning step which includes a step of patterning both the first conductive layer and the second conductive layer in both the NVM region and the capacitor region. The subsequent etch provides for an important alignment of a floating gate to the overlying control gate by having both conductive layers etched using the same mask. During this subsequent etch, the fact that first conductive material is being etched in the capacitor region helps end point detection of the etch of the first conductive layer in the NVM region.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: April 9, 2013
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Bradley P. Smith, Mehul D. Shroff
  • Patent number: 8409946
    Abstract: A method of forming a field effect transistor includes forming trench isolation material within a semiconductor substrate and on opposing sides of a semiconductor material channel region along a length of the channel region. The trench isolation material is formed to comprise opposing insulative projections extending toward one another partially under the channel region along the channel length and with semiconductor material being received over the projections. The trench isolation material is etched to expose opposing sides of the semiconductor material along the channel length. The exposed opposing sides of the semiconductor material are etched along the channel length to form a channel fin projecting upwardly relative to the projections. A gate is formed over a top and opposing sides of the fin along the channel length. Other methods and structures are disclosed.
    Type: Grant
    Filed: June 20, 2012
    Date of Patent: April 2, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Paul Grisham, Gordon A. Haller, Sahn D. Tang
  • Patent number: 8410577
    Abstract: The invention provides a semiconductor device which has a capacitor element therein to achieve size reduction of the device, the capacitor element having larger capacitance than conventional. A semiconductor integrated circuit and pad electrodes are formed on the front surface of a semiconductor substrate. A second insulation film is formed on the side and back surfaces of the semiconductor substrate, and a capacitor electrode is formed between the back surface of the semiconductor substrate and the second insulation film, contacting the back surface of the semiconductor substrate. The second insulation film is covered by wiring layers electrically connected to the pad electrodes, and the wiring layers and the capacitor electrode overlap with the second insulation film being interposed therebetween. Thus, the capacitor electrode, the second insulation film and the wiring layers form capacitors.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: April 2, 2013
    Assignees: SANYO Semiconductor Co., Ltd., Semiconductor Components Industries, LLC
    Inventors: Katsu Horikoshi, Hisayoshi Uchiyama, Takashi Noma, Yoshinori Seki, Hiroshi Yamada, Shinzo Ishibe, Hiroyuki Shinogi
  • Patent number: 8399304
    Abstract: Methods for fabricating a capacitor are provided. In the methods, a dielectric may be formed on a metal (e.g. nickel) substrate, and a copper electrode is formed thereon, followed by the thinning of the metal substrate from its non-coated face, and subsequently forming a copper electrode on the thinned, non-coated face of the substrate.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: March 19, 2013
    Assignee: CDA Processing Limited Liability Company
    Inventors: Juan Carlos Figueroa, Damien Francis Reardon
  • Patent number: 8394696
    Abstract: A semiconductor device includes a capacitance, the numerical value of which is relevant for a device function. The capacitance is formed from a parallel connection of at least a first and a second capacitor element, wherein the first and second capacitor elements are formed in respective manufacturing steps that exhibit uncorrelated process fluctuations.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: March 12, 2013
    Assignee: Infineon Technologies AG
    Inventors: Peter Baumgartner, Philipp Riess, Thomas Benetik
  • Patent number: 8384143
    Abstract: This semiconductor device according to the present invention includes a plurality of cylindrical lower electrodes aligned densely in a memory array region; a plate-like support which is contacted on the side surface of the cylindrical lower electrodes, and links to support the plurality of the cylindrical lower electrodes; a pore portion provided in the plate-like support; a dielectric film covering the entire surface of the cylindrical lower electrodes and the plate-like support in which the pore portion is formed; and an upper electrode formed on the surface of the dielectric film, wherein the boundary length of the part on the side surface of the cylindrical lower electrode which is exposed on the pore portion is shorter than the boundary length of the part on the side surface of the cylindrical lower electrode which is not exposed on the pore portion.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: February 26, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Toshiyuki Hirota
  • Patent number: 8373215
    Abstract: A zero temperature coefficient (ZTC) capacitor including a silicon dioxide dielectric layer with a phosphorus density between 1.7×1020 atoms/cm3 and 2.3×1020 atoms/cm3. An integrated circuit containing a ZTC capacitor including a silicon dioxide dielectric layer with a phosphorus density between 1.7×1020 atoms/cm3 and 2.3×1020 atoms/cm3. A process of forming an integrated circuit containing a ZTC capacitor including a silicon dioxide dielectric layer with a phosphorus density between 1.7×1020 atoms/cm3 and 2.3×1020 atoms/cm3.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: February 12, 2013
    Assignee: Texas Instruments Incorporated
    Inventors: Weidong Tian, Imran Khan
  • Patent number: 8368175
    Abstract: Provided is a capacitor that realizes a capacitance insulation film having a large relative permittivity and has sufficient capacitance even if an occupied space is small with a reduced amount of leakage current. A capacitor includes: a capacitance insulation film; and an upper electrode and lower electrode each formed on both sides of the capacitance insulation film. The capacitance insulation film is a complex oxide whose main ingredients are Zr, Al and O with the composition ratio of Zr to Al being set at (1?x): x (0.01?x?0.15) and is composed of a dielectric substance having a crystal structure. The lower electrode is composed of a conductor whose surface contiguous to at least the dielectric film has an amorphous structure.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: February 5, 2013
    Assignee: NEC Corporation
    Inventors: Takashi Nakagawa, Kaoru Mori, Nobuyuki Ikarashi, Makiko Oshida
  • Patent number: 8367428
    Abstract: The present invention provides a semiconductor device which is characterized as follows. The semiconductor device includes: an interlayer insulating film formed above a semiconductor substrate and provided with a hole above an impurity diffusion region; a conductive plug formed in the hole and electrically connected to the impurity diffusion region; a conductive oxygen barrier film formed on the conductive plug and the interlayer insulating film around the conductive plug; a conductive anti-diffusion film formed on the conductive oxygen barrier film; and a capacitor that has a lower electrode which is formed on the conductive anti-diffusion film and which exposes platinum or palladium on the upper surface, a capacitor dielectric film made of a ferroelectric material, and an upper electrode. The conductive anti-diffusion film is made of a non-oxide conductive material for preventing the diffusion of the constituent element of the capacitor dielectric film.
    Type: Grant
    Filed: January 4, 2012
    Date of Patent: February 5, 2013
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Wensheng Wang
  • Patent number: 8361860
    Abstract: A method of manufacturing a semiconductor device may include forming a first interlayer insulation layer on a substrate including at least one gate structure formed thereon, the substrate having a plurality of source/drain regions formed on both sides of the at least one gate structure, forming at least one buried contact plug on at least one of the plurality of source/drain regions and in the first interlayer insulation layer, forming a second interlayer insulation layer on the first interlayer insulation layer and the at least one buried contact plug, exposing the at least one buried contact plug in the second interlayer insulation layer by forming at least one contact hole, implanting ions in the at least one contact hole in order to create an amorphous upper portion of the at least one buried contact plug, depositing a lower electrode layer on the second interlayer insulation layer and the at least one contact hole, and forming a metal silicide layer in the amorphous upper portion of the at least one buri
    Type: Grant
    Filed: January 19, 2010
    Date of Patent: January 29, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-bum Kim, Wook-je Kim, Kwan-heum Lee, Yu-gyun Shin, Sun-ghil Lee
  • Patent number: 8357936
    Abstract: An array substrate for an LCD device includes a gate line crossing a data line to define a pixel region. A thin film transistor (TFT) includes a gate electrode connected to the gate line, insulating and active layers on the gate electrode, a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode. An auxiliary common electrode includes a horizontal portion disposed in the pixel region. A metal layer overlaps the insulating layer and contacts the horizontal portion of the auxiliary common electrode through a contact hole defined through the insulating layer. A passivation layer is disposed on the TFT and the metal layer. A pixel electrode has a horizontal portion overlapping the metal layer with the passivation layer therebetween to form a storage capacitor, the pixel electrode connected to the drain electrode through a second contact hole defined through the passivation layer.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: January 22, 2013
    Assignee: LG Display Co., Ltd.
    Inventors: Il-Man Choi, Ho-June Kim
  • Patent number: 8357600
    Abstract: A method for fabricating a semiconductor device is provided, the method includes forming a plug conductive layer over an entire surface of a substrate, etching the plug conductive layer to form landing plugs, etching the substrate between the landing plugs to form a trench, forming a gate insulation layer over a surface of the trench and forming a buried gate partially filling the trench over the gate insulation layer.
    Type: Grant
    Filed: November 6, 2009
    Date of Patent: January 22, 2013
    Assignee: Hynix Semiconductor Inc.
    Inventors: Jong-Han Shin, Jum-Yong Park
  • Publication number: 20130016570
    Abstract: In an embodiment of the invention, a method of fabricating a floating-gate NMOSFET (n-type metal-oxide semiconductor field-effect transistor) is disclosed. A silicide blocking layer (e.g. oxide, nitride) is used not only to block areas from being silicided but to also form an insulator on top of a poly-silicon gate. The insulator along with a top electrode (control gate) forms a capacitor on top of the poly-silicon gate. The poly-silicon gate also serves as the bottom electrode of the capacitor. The capacitor can then be used to capacitively couple charge to the poly-silicon gate. Because the poly-silicon gate is surrounded by insulating material, the charge coupled to the poly-silicon gate may be stored for a long period of time after a programming operation.
    Type: Application
    Filed: February 6, 2012
    Publication date: January 17, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Shanjen Pan, Allan T. Mitchell, Jack G. Qian
  • Patent number: 8354317
    Abstract: According to one aspect of the invention, a memory device is disclosed. The memory device comprises a substantially linear active area comprising a source and at least two drains defining a first axis. The memory device further comprises at least two substantially parallel word lines, at least a portion of a first word line located between a first drain and the source, and at least a portion of a second word line located between a second drain and the source, which word lines define a second axis. The memory device further comprises a digit line coupled to the source, wherein the digit line forms a substantially zig-zag pattern.
    Type: Grant
    Filed: March 10, 2011
    Date of Patent: January 15, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Anton P. Eppich
  • Publication number: 20130009225
    Abstract: A semiconductor device containing an extended drain MOS transistor with an integrated snubber formed by forming a drain drift region of the MOS transistor, forming a snubber capacitor including a capacitor dielectric layer and capacitor plate over the extended drain, and forming a snubber resistor over a gate of the MOS transistor so that the resistor is connected in series between the capacitor plate and a source of the MOS transistor.
    Type: Application
    Filed: July 3, 2012
    Publication date: January 10, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Christopher Boguslaw KOCON
  • Publication number: 20130009227
    Abstract: A semiconductor device with a dynamic gate drain capacitance. One embodiment provides a semiconductor device. The device includes a semiconductor substrate, a field effect transistor structure including a source region, a first body region, a drain region, a gate electrode structure and a gate insulating layer. The gate insulating layer is arranged between the gate electrode structure and the body region. The gate electrode structure and the drain region partially form a capacitor structure including a gate-drain capacitance configured to dynamically change with varying reverse voltages applied between the source and drain regions. The gate-drain capacitance includes at least one local maximum at a given threshold or a plateau-like course at given reverse voltage.
    Type: Application
    Filed: September 13, 2012
    Publication date: January 10, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Anton Mauder, Hans-Joachim Schulze, Carolin Tolksdorf, Winfried Kaindl, Armin Willmeroth
  • Patent number: 8350307
    Abstract: Provided is a semiconductor memory device including a capacitor structure extending over core and peripheral areas of a substrate. Respective portions of the capacitor structure function as memory cell capacitors in the core area and as first and second capacitors in the peripheral area. A combination of the first and second capacitors functions as a first power decoupling capacitor, and a transistor disposed in the peripheral area functions as a second power decoupling capacitor.
    Type: Grant
    Filed: August 12, 2009
    Date of Patent: January 8, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Sunghoon Kim
  • Patent number: 8349683
    Abstract: The present invention relates to a method for producing a capacitor comprising, as one electrode, an electric conductor having formed on the surface thereof a dielectric layer and, as the other electrode, a semiconductor layer formed on the electric conductor by energization using the electric conductor as the anode, wherein fine protrusions are formed on the dielectric layer before energization; a capacitor produced by the method thereof having a good capacitance appearance factor and a low ESR; and an electronic circuit and an electronic device using the capacitor.
    Type: Grant
    Filed: September 24, 2004
    Date of Patent: January 8, 2013
    Assignee: Showa Denko K.K.
    Inventor: Kazumi Naito
  • Publication number: 20130001664
    Abstract: Integrated circuits with decoupling capacitor circuitry are provided. The decoupling capacitor circuitry may include density-compliance structures. The density-compliance structures may be strapped to metal paths driven by power supply lines. Strapping density-compliance dummy structures in this way may increase the capacitance per unit area of the decoupling capacitor circuitry. Strapping density-compliance dummy structures in this way may shield the decoupling capacitor from nearby noisy signal sources.
    Type: Application
    Filed: July 1, 2011
    Publication date: January 3, 2013
    Inventor: Chin Hieang Khor
  • Patent number: 8343831
    Abstract: In a semiconductor device, the semiconductor device may include a first active structure, a first gate insulation layer, a first gate electrode, a first impurity region, a second impurity region and a contact structure. The first active structure may include a first lower pattern in a first region of a substrate and a first upper pattern on the first lower pattern. The first gate insulation layer may be formed on a sidewall of the first upper pattern. The first gate electrode may be formed on the first gate insulation layer. The first impurity region may be formed in the first lower pattern. The second impurity region may be formed in the first upper pattern. The contact structure may surround an upper surface and an upper sidewall of the first upper pattern including the second impurity region. Accordingly, the contact resistance between the contact structure and the second impurity region may be decreased and structural stability of the contact structure may be improved.
    Type: Grant
    Filed: April 5, 2011
    Date of Patent: January 1, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kang-Uk Kim, Jae-Man Yoon, Yong-Chul Oh, Hui-Jung Kim, Hyun-Woo Chung, Hyun-Gi Kim
  • Patent number: 8344435
    Abstract: To realize a semiconductor memory device whose capacitance value per unit area in a memory cell is increased without increase in the area of the memory cell. The memory cell includes a transistor, a memory element, a first capacitor, and a second capacitor. The first capacitor includes a semiconductor film, a gate insulating film, and a gate electrode which are included in the transistor and is formed at the same time as the transistor. The second capacitor includes an electrode which is included in the memory element and an insulating film and an electrode which are formed over the electrode. Further, the second capacitor is formed over the first capacitor. In this manner, the first capacitor and the second capacitor which are connected in parallel with the memory element are formed.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: January 1, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Toshihiko Saito
  • Patent number: 8338871
    Abstract: A group III nitride-based transistor capable of achieving terahertz-range cutoff and maximum frequencies of operation at relatively high drain voltages is provided. In an embodiment, two additional independently biased electrodes are used to control the electric field and space-charge close to the gate edges.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: December 25, 2012
    Assignee: Sensor Electronic Technology, Inc.
    Inventors: Grigory Simin, Michael Shur, Remigijus Gaska
  • Patent number: 8329534
    Abstract: The present invention is generally directed to a method of forming contacts for a memory device. In one illustrative embodiment, the method includes forming a layer of insulating material above an active area of a dual bit memory cell, forming a hard mask layer above the layer of insulating material, the hard mask layer having an original thickness, performing at least two partial etching processes on the hard mask layer to thereby define a patterned hard mask layer above the layer of insulating material, wherein each of the partial etching processes is designed to etch through less than the original thickness of the hard mask layer, the hard mask layer having openings formed therein that correspond to a digitline contact and a plurality of storage node contacts for the dual bit memory cell, and performing at least one etching process to form openings in the layer of insulating material for the digitline contact and the plurality of storage node contacts using the patterned hard mask layer as an etch mask.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: December 11, 2012
    Assignee: Micron Technology, Inc.
    Inventor: Jonathan Doebler
  • Patent number: 8329533
    Abstract: A stacked capacitor for double-poly flash memory is provided. The stacked capacitor is formed by a lower electrode, a lower dielectric layer, a central electrode, an upper dielectric layer, and an upper electrode, wherein the lower electrode is a doped region in a substrate. The manufacturing process of this stacked capacitor can be fully integrated in to the manufacturing process of the double-poly flash memory cell.
    Type: Grant
    Filed: May 17, 2010
    Date of Patent: December 11, 2012
    Assignee: Chingis Technology Corporation
    Inventors: Julian Chang, An-Xing Shen, Soon-Won Kang