Lower edge ring of a process kit for semiconductor substrate processing

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top plan view of a lower edge ring of a process kit for semiconductor substrate processing, showing our new design.

FIG. 2 is a bottom plan view thereof.

FIG. 3 is a front elevation view thereof, the back, left, and right side elevation views are identical.

FIG. 4 is a top isometric view thereof.

FIG. 5 is a bottom isometric view thereof; and,

FIG. 6 is an enlarged cross-sectional view taken along line 6-6 in FIG. 1.

The design is shown with a symbolic break shown in broken lines in its length to provide an enlarged view of cross-sectional detail of the claimed design. The appearance of any portion of the article between the break lines forms no part of the claimed design.

Claims

The ornamental design for a lower edge ring of a process kit for semiconductor substrate processing, as shown and described.

Referenced Cited
U.S. Patent Documents
5437757 August 1, 1995 Rice et al.
6375748 April 23, 2002 Yudovsky et al.
6390908 May 21, 2002 Chen et al.
6391787 May 21, 2002 Dhindsa
6464794 October 15, 2002 Park
6475336 November 5, 2002 Hubacek et al.
6586343 July 1, 2003 Ho et al.
6824458 November 30, 2004 Ensinger
6913669 July 5, 2005 Ensinger
6964597 November 15, 2005 Khuu
D515675 February 21, 2006 Tremoulet, Jr. et al.
D573236 July 15, 2008 Selvam
D633991 March 8, 2011 Nakagawa
D638522 May 24, 2011 Yoshida et al.
D638523 May 24, 2011 Yoshida et al.
D655401 March 6, 2012 Muramatsu et al.
D655797 March 13, 2012 Muramatsu et al.
8270141 September 18, 2012 Willwerth et al.
8663391 March 4, 2014 Matyushkin et al.
8734664 May 27, 2014 Yang et al.
8740206 June 3, 2014 Arun et al.
8900405 December 2, 2014 Porshnev et al.
8988848 March 24, 2015 Todorow et al.
9412555 August 9, 2016 Augustino et al.
D770992 November 8, 2016 Tauchi
D797691 September 19, 2017 Joubert
D803917 November 28, 2017 Harada et al.
D804556 December 5, 2017 Harada et al.
D810705 February 20, 2018 Krishnan
10017857 July 10, 2018 Nguyen et al.
D827592 September 4, 2018 Ichino
10177050 January 8, 2019 Sadjadi et al.
D840364 February 12, 2019 Ichino
D846095 April 16, 2019 Copeland et al.
D846096 April 16, 2019 Copeland et al.
D846097 April 16, 2019 Copeland et al.
D846098 April 16, 2019 Copeland et al.
D852335 June 25, 2019 Copeland et al.
D852336 June 25, 2019 Copeland
D852935 July 2, 2019 Copeland
D862404 October 8, 2019 Murata et al.
D871561 December 31, 2019 Kang et al.
D871608 December 31, 2019 Okuda et al.
D888903 June 30, 2020 Gunther et al.
D891382 July 28, 2020 Koppa et al.
D895075 September 1, 2020 Kang et al.
D895076 September 1, 2020 Kuroda et al.
D895777 September 8, 2020 Chase et al.
D896353 September 15, 2020 Nakagawa et al.
D909323 February 2, 2021 Yoshida et al.
D927656 August 10, 2021 Kim et al.
D931241 September 21, 2021 Babu
D933031 October 12, 2021 Yoshida
D933032 October 12, 2021 Yoshida
D933033 October 12, 2021 Yoshida et al.
D933619 October 19, 2021 Yoshida et al.
D933725 October 19, 2021 Koppa et al.
D933726 October 19, 2021 Savandaiah et al.
D934315 October 26, 2021 Lavitsky et al.
D983940 April 18, 2023 Tsuji
D983941 April 18, 2023 Tsuji
D986394 May 16, 2023 Weih et al.
D992614 July 18, 2023 Sasaki
D992615 July 18, 2023 Sasaki
D1005245 November 21, 2023 Nakatani
D1049067 October 29, 2024 Rane
20020029745 March 14, 2002 Nagaiwa et al.
20040027781 February 12, 2004 Hanawa
20040074605 April 22, 2004 Takaaki et al.
20050133164 June 23, 2005 Fischer
20070258186 November 8, 2007 Matyushkin et al.
20080227301 September 18, 2008 Fang et al.
20090120367 May 14, 2009 Porshnev et al.
20090186487 July 23, 2009 Chang et al.
20090229759 September 17, 2009 Ogasawara
20100041240 February 18, 2010 Tsujimoto et al.
20130154175 June 20, 2013 Todorow et al.
20130288483 October 31, 2013 Sadjadi et al.
20140235063 August 21, 2014 McMillin et al.
20150001180 January 1, 2015 Doan et al.
20150179412 June 25, 2015 Chhatre et al.
20160135252 May 12, 2016 Matyushkin et al.
20160365228 December 15, 2016 Singh et al.
20170018411 January 19, 2017 Saravanapriyan et al.
20170053820 February 23, 2017 Bosch et al.
20170256435 September 7, 2017 Joubert et al.
20220406573 December 22, 2022 Gunther et al.
Foreign Patent Documents
H09148420 June 1997 JP
D1199310 March 2004 JP
2007300057 November 2007 JP
2011108764 June 2011 JP
10-2007-0031660 March 2007 KR
Patent History
Patent number: D1115720
Type: Grant
Filed: Jul 11, 2022
Date of Patent: Mar 3, 2026
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Muhannad Mustafa (Santa Clara, CA), Muhammad M. Rasheed (San Jose, CA), Yu Lei (Belmont), Avgerinos V. Gelatos (Redwood City, CA), Vikash Banthia (Los Altos, CA), Victor H. Calderon (Sunnyvale, CA), Shi Wei Toh (Sunnyvale, CA), Yung-Hsin Lee (San Jose, CA), Anindita Sen (San Jose, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/845,736