Substrate lifter for semiconductor manufacturing equipment

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Description

FIG. 1 is a front, top and right side perspective view of a substrate lifter for semiconductor manufacturing equipment showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2; and,

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 2.

Claims

The ornamental design for a substrate lifter for semiconductor manufacturing equipment, as shown and described.

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Patent History
Patent number: D1063875
Type: Grant
Filed: Feb 22, 2023
Date of Patent: Feb 25, 2025
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Tatsuki Jinden (Toyama), Shinya Morita (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/885,259