Substrate lifter for semiconductor manufacturing equipment
Description
Claims
The ornamental design for a substrate lifter for semiconductor manufacturing equipment, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
D291413 | August 18, 1987 | Uehara |
D366868 | February 6, 1996 | Ohsawa |
D378675 | April 1, 1997 | Iwai |
D378823 | April 15, 1997 | Watanabe |
5752609 | May 19, 1998 | Kato |
D404015 | January 12, 1999 | Honma |
D409158 | May 4, 1999 | Shimazu |
D411176 | June 22, 1999 | Shimazu |
6095806 | August 1, 2000 | Suzuki |
6099302 | August 8, 2000 | Hong |
6099645 | August 8, 2000 | Easley |
6225594 | May 1, 2001 | Zehavi |
6287112 | September 11, 2001 | Van Voorst Vader |
6341935 | January 29, 2002 | Tseng |
6979659 | December 27, 2005 | Zehavi |
D570308 | June 3, 2008 | Sato |
D570309 | June 3, 2008 | Sato |
D580894 | November 18, 2008 | Sato |
7484958 | February 3, 2009 | Kobayashi |
D703161 | April 22, 2014 | Kimura |
D734730 | July 21, 2015 | Yoshida |
D737785 | September 1, 2015 | Yoshida |
D738329 | September 8, 2015 | Yoshida |
D739831 | September 29, 2015 | Takagi |
D740769 | October 13, 2015 | Takagi |
D747279 | January 12, 2016 | Yoshida |
D789310 | June 13, 2017 | Kusakabe |
D791721 | July 11, 2017 | Kusakabe |
D839219 | January 29, 2019 | Yoshida |
D846514 | April 23, 2019 | Yoshida |
D847105 | April 30, 2019 | Okajima |
D893438 | August 18, 2020 | Hasegawa |
D920935 | June 1, 2021 | Sambu |
D940669 | January 11, 2022 | Sambu |
D958093 | July 19, 2022 | Murata |
D965542 | October 4, 2022 | Fujii |
D981971 | March 28, 2023 | Taniguchi |
20020130061 | September 19, 2002 | Hengst |
20020187023 | December 12, 2002 | Araki |
20030024888 | February 6, 2003 | Payne |
1050271 | September 1999 | JP |
- Vertical Column Wafer Boat & Pedestal,https://www.veteksemi.com/vertical-column-wafer-boat-pedestal.html, Copyright © 2024. (Year: 2024).
- Customized Silicon Carbide (SiC) Boat for Wafer Handling,https://www.msesupplies.com/products/customized-silicon-carbide-sic-boat, © 2024. (Year: 2024).
Patent History
Patent number: D1063875
Type: Grant
Filed: Feb 22, 2023
Date of Patent: Feb 25, 2025
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Tatsuki Jinden (Toyama), Shinya Morita (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/885,259
Type: Grant
Filed: Feb 22, 2023
Date of Patent: Feb 25, 2025
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Tatsuki Jinden (Toyama), Shinya Morita (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/885,259
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)