Junction Field Effect Transistor (unipolar Transistor) Patents (Class 257/256)
  • Publication number: 20140110753
    Abstract: Devices and methods for providing JFET transistors with improved operating characteristics are provided. Specifically, one or more embodiments of the present invention relate to JFET transistors with a higher diode turn-on voltage. For example, one or more embodiments include a JFET with a PIN gate stack. One or more embodiments also relate to systems and devices in which the improved JFET may be employed, as well as methods of manufacturing the improved JFET.
    Type: Application
    Filed: December 19, 2013
    Publication date: April 24, 2014
    Applicant: Micron Technology, Inc.
    Inventor: Chandra Mouli
  • Patent number: 8704279
    Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: April 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 8698129
    Abstract: An implant free quantum well transistor wherein the doped region comprises an implant region having an increased concentration of dopants with respect to the concentration of dopants of adjacent regions of the substrate, the implant region being substantially positioned at a side of the quantum well region opposing the gate region.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: April 15, 2014
    Assignees: IMEC, Katholieke Universiteit Leuven, KU Leuven R&D
    Inventors: Geert Hellings, Geert Eneman
  • Patent number: 8698246
    Abstract: A high-voltage oxide transistor includes a substrate; a channel layer disposed on the substrate; a gate electrode disposed on the substrate to correspond to the channel layer; a source contacting a first side of the channel layer; and a drain contacting a second side of the channel layer, wherein the channel layer includes a plurality of oxide layers, and none of the plurality of oxide layers include silicon. The gate electrode may be disposed on or under the channel layer. Otherwise, the gate electrodes may be disposed respectively on and under the channel layer.
    Type: Grant
    Filed: July 12, 2012
    Date of Patent: April 15, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-hun Jeon, Chang-jung Kim, I-hun Song
  • Publication number: 20140097469
    Abstract: Embodiments of a Silicon Nitride (SiN) passivation structure for a semiconductor device and methods of fabrication thereof are disclosed. In general, a semiconductor device includes a semiconductor body and a SiN passivation structure over a surface of the semiconductor body. In one embodiment, the SiN passivation structure includes one or more Hydrogen-free SiN layers on, and preferably directly on, the surface of the semiconductor body, a Hydrogen barrier layer on, and preferably directly on, a surface of the one or more Hydrogen-free SiN layers opposite the semiconductor body, and a Chemical Vapor Deposition (CVD) SiN layer on, and preferably directly on, a surface of the Hydrogen barrier layer opposite the one or more Hydrogen-free SiN layers. The Hydrogen barrier layer preferably includes one or more oxide layers of the same or different compositions. Further, in one embodiment, the Hydrogen barrier layer is formed by Atomic Layer Deposition (ALD).
    Type: Application
    Filed: October 4, 2012
    Publication date: April 10, 2014
    Inventors: Helmut Hagleitner, Zoltan Ring
  • Publication number: 20140097478
    Abstract: Representative implementations of devices and techniques provide a reduced charge transistor arrangement. The capacitance and/or charge of a transistor structure may be reduced by minimizing an overlap of a top gate with respect to a drain of the transistor.
    Type: Application
    Filed: October 6, 2012
    Publication date: April 10, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Ralf SIEMIENIEC, Cedric OUVRARD
  • Patent number: 8659081
    Abstract: According to an exemplary embodiment, a method for fabricating a MOS transistor, such as an LDMOS transistor, includes forming a self-aligned lightly doped region in a first well underlying a first sidewall of a gate. The method further includes forming a self-aligned extension region under a second sidewall of the gate, where the self-aligned extension region extends into the first well from a second well. The method further includes forming a drain region spaced apart from the second sidewall of the gate. The method further includes forming a source region in the self-aligned lightly doped region and the first well. The self-aligned lightly doped region and the self-aligned extension region define a channel length of the MOS transistor, such as an LDMOS transistor.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: February 25, 2014
    Assignee: Broadcom Corporation
    Inventors: Xiangdong Chen, Wei Xia, Henry Kuo-Shun Chen
  • Patent number: 8653535
    Abstract: A semiconductor device according to the present invention includes a contact region 201 of a second conductivity type which is provided in a body region 104. The contact region 201 includes a first region 201a in contact with a first ohmic electrode 122 and a second region 201b located at a position deeper than that of the first region 201a and in contact with the body region 104. The first region 201a and the second region 201b each have at least one peak of impurity concentration. The peak of impurity concentration in the first region 201a has a higher value than that of the peak of impurity concentration in the second region 201b.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: February 18, 2014
    Assignee: Panasonic Corporation
    Inventors: Chiaki Kudou, Masahiko Niwayama, Ryo Ikegami
  • Patent number: 8643065
    Abstract: A JFET is a semiconductor device allowing more reliable implementation of the characteristics essentially achievable by employing SiC as a material and includes a wafer having at least an upper surface made of silicon carbide, and a gate contact electrode formed on the upper surface. The wafer includes a first p-type region serving as an ion implantation region formed so as to include the upper surface. The first p-type region includes a base region disposed so as to include the upper surface, and a protruding region. The base region has a width (w1) in the direction along the upper surface greater than a width (w2) of the protruding region. The gate contact electrode is disposed in contact with the first p-type region such that the gate contact electrode is entirely located on the first p-type region as seen in plan view.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: February 4, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Kazuhiro Fujikawa, Hideto Tamaso, Shin Harada, Yasuo Namikawa
  • Patent number: 8634229
    Abstract: A memory cell is provided with a transistor which includes source and drain electrodes formed in a semiconductor film by respectively N-doped and P-doped areas. The transistor includes first and second devices for generating a potential barrier in the semiconductor film. The two potential barriers are shifted laterally and are opposed to the passage of the charge carriers emitted by the nearest source/drain electrode. One of the devices for generating the potential barrier is electrically connected to the gate. The other of the devices for generating the potential barrier is electrically connected to the counter-electrode. The writing of a high state is carried out by imposing on the P-doped electrode a potential higher than that of the N-doped electrode and charging the capacitor formed between the gate and the semiconductor film. The resetting of the memory cell is obtained by discharging the capacitor.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: January 21, 2014
    Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, Centre National de Recherche Scientifique
    Inventors: Jing Wan, Sorin Cristoloveanu, Cyrille Le Royer, Alexander Zaslavsky
  • Patent number: 8618583
    Abstract: The disclosure relates generally to junction gate field effect transistor (JFET) structures and methods of forming the same. The JFET structure includes a p-type substrate having a p-region therein; an n-channel thereunder; and n-doped enhancement regions within the n-channel, each n-doped enhancement region separated from the p-region.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: December 31, 2013
    Assignee: International Business Machines Corporation
    Inventors: Panglijen Candra, Richard A. Phelps, Robert M. Rassel, Yun Shi
  • Publication number: 20130328110
    Abstract: Junction field effect transistors are provided which include a gate junction located on a surface of a crystalline semiconductor material of a first conductivity type. The gate junction can be selected from one of a doped hydrogenated crystalline semiconductor material layer portion of a second conductivity type which is opposite the first conductivity type, a doped hydrogenated non-crystalline semiconductor material layer portion of a second conductivity type which is opposite the first conductivity type, and a Schottky contact.
    Type: Application
    Filed: March 15, 2013
    Publication date: December 12, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Bahman Hekmatshoar-Tabari, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 8598636
    Abstract: The present invention discloses a heat dissipation structure for a SOI field effect transistor having a schottky source/drain, which relates to a field of microelectronics. The heat dissipation structure includes two holes connected with a drain terminal or with both a source terminal and a drain terminal, which are filled with an N-type material with high thermoelectric coefficient and a P-type material with high thermoelectric coefficient respectively. A metal wire for the N-type material with high thermoelectric coefficient in the vicinity of the drain terminal is applied a high potential with respect to the drain terminal, and a metal wire for the P-type material with high thermoelectric coefficient in the vicinity of the drain terminal is applied a low potential with respect to the drain terminal.
    Type: Grant
    Filed: August 17, 2011
    Date of Patent: December 3, 2013
    Assignee: Peking University
    Inventors: Ru Huang, Xin Huang, Shoubin Xue, Yujie Ai
  • Publication number: 20130313617
    Abstract: A device includes a buried well region and a first HVW region of the first conductivity, and an insulation region over the first HVW region. A drain region of the first conductivity type is disposed on a first side of the insulation region and in a top surface region of the first HVW region. A first well region and a second well region of a second conductivity type opposite the first conductivity type are on the second side of the insulation region. A second HVW region of the first conductivity type is disposed between the first and the second well regions, wherein the second HVW region is connected to the buried well region. A source region of the first conductivity type is in a top surface region of the second HVW region, wherein the source region, the drain region, and the buried well region form a JFET.
    Type: Application
    Filed: May 25, 2012
    Publication date: November 28, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jen-Hao Yeh, Chih-Chang Cheng, Ru-Yi Su, Ker Hsiao Huo, Po-Chih Chen, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 8592289
    Abstract: A gallium nitride based semiconductor device is provided which includes a gallium nitride based semiconductor film with a flat c-plane surface provided on a gallium oxide wafer. A light emitting diode LED includes a gallium oxide support base 32 having a primary surface 32a of monoclinic gallium oxide, and a laminate structure 33 of Group III nitride. A semiconductor mesa of the laminate structure 33 includes a low-temperature GaN buffer layer 35, an n-type GaN layer 37, an active layer 39 of a quantum well structure, and a p-type gallium nitride based semiconductor layer 37. The p-type gallium nitride based semiconductor layer 37 includes, for example, a p-type AlGaN electron block layer and a p-type GaN contact layer. The primary surface 32a of the gallium oxide support base 32 is inclined at an angle of not less than 2 degrees and not more than 4 degrees relative to a (100) plane of monoclinic gallium oxide.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: November 26, 2013
    Assignees: Sumitomo Electric Industries, Ltd., KOHA Co., Ltd.
    Inventors: Shin Hashimoto, Katsushi Akita, Shinsuke Fujiwara, Hideaki Nakahata, Kensaku Motoki
  • Patent number: 8587037
    Abstract: A field effect transistor (FET) having a source, a drain and a gate includes a first connection electrically connected to the gate near a first end of the gate, a second connection electrically connected to the gate near the first end of the gate, a third connection electrically connected to the gate near a second end of the gate, and a fourth connection electrically connected to the gate near the second end of the gate. By performing gate resistance measurements at different ambient temperatures, a thermal coefficient of gate resistance can be derived and then used to monitor the gate temperature, which is representative of the channel temperature.
    Type: Grant
    Filed: July 8, 2009
    Date of Patent: November 19, 2013
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Tahir Hussain
  • Publication number: 20130299881
    Abstract: A junction gate field-effect transistor (JFET) for an integrated circuit (IC) chip is provided comprising a source region, a drain region, a lower gate, and a channel, with an insulating shallow trench isolation (STI) region extending from an inner edge of an upper surface of the source region to an inner edge of an upper surface of the drain region, without an intentionally doped region, e.g., an upper gate, coplanar with an upper surface of the IC chip between the source/drain regions. In addition, an asymmetrical quasi-buried upper gate can be included, disposed under a portion of the STI region, but not extending under a portion of the STI region proximate to the drain region. Embodiments of this invention also include providing an implantation layer, under the source region, to reduce Ron. A related method and design structure are also disclosed.
    Type: Application
    Filed: April 25, 2013
    Publication date: November 14, 2013
    Applicant: International Business Machines Corporation
    Inventor: International Business Machines Corporation
  • Patent number: 8581310
    Abstract: The transistor comprises first and second source/drain electrodes formed in a semiconductor film by N-doped and P-doped areas, respectively. A polarization voltage is applied between the two source/drain electrodes in order to impose to the P-doped electrode a potential higher than that of the N-doped electrode. The transistor comprises first and second devices for generating a potential barrier in the semiconductor film. The two potential barriers are opposed to the passage of the charge carriers emitted by the first and second source/drain electrodes, respectively. The two potential barriers are shifted with respect to an axis connecting the two source/drain electrodes. The two devices for generating a potential barrier are configured to generate a potential barrier having a variable amplitude and it are electrically connected to the gate and to the counter electrode.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: November 12, 2013
    Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, Centre Nationale de la Recherche Scientifique
    Inventors: Jing Wan, Sorin Cristoloveanu, Cyrille Le Royer, Alexander Zaslavsky
  • Patent number: 8581298
    Abstract: A semiconductor device includes: a semiconductor layer having a first end portion and a second end portion; a first main electrode provided on the first end portion and electrically connected to the semiconductor layer; a second main electrode provided on the second end portion and electrically connected to the semiconductor layer; a first gate electrode provided via a first gate insulating film in a plurality of first trenches formed from the first end portion toward the second end portion; and a second gate electrode provided via a second gate insulating film in a plurality of second trenches formed from the second end portion toward the first end portion. Spacing between a plurality of the first gate electrodes and spacing between a plurality of the second gate electrodes are 200 nm or less.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: November 12, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Mitsuhiko Kitagawa
  • Patent number: 8564017
    Abstract: A drift layer has a thickness direction throughout which a current flows and has an impurity concentration N1d for a first conductivity type. A body region is provided on a portion of the drift layer, has a channel to be switched by a gate electrode, has an impurity concentration N1b for the first conductivity type, and has an impurity concentration N2b for the second conductivity type greater than the impurity concentration N1b. A JFET region is disposed adjacent to the body region on the drift layer, has an impurity concentration N1j for the first conductivity type, and has an impurity concentration N2j for the second conductivity type smaller than the impurity concentration N1j. N1j?N2j>N1d and N2j<N2b are satisfied.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: October 22, 2013
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Misako Honaga, Takeyoshi Masuda, Keiji Wada, Toru Hiyoshi
  • Publication number: 20130265102
    Abstract: A semiconductor structure and method for manufacturing the same are provided. The semiconductor structure includes a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate and extending down from a surface of the substrate; a first well having the first conductive type formed in the deep well and extending down from the surface of the substrate; and a second well having the second conductive type formed in the deep well and extending down from the surface of the substrate, and the second well adjacent to the first well. The first well includes a block region and plural finger regions joined to one side of the block region, while the second well includes plural channel regions interlaced with the finger regions to separate the finger regions.
    Type: Application
    Filed: April 9, 2012
    Publication date: October 10, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chen-Yuan Lin, Cheng-Chi Lin, Ching-Lin Chan, Shih-Chin Lien, Shyi-Yuan Wu
  • Patent number: 8552474
    Abstract: A junction field effect transistor structure includes a grid electrode, a source electrode, a drain electrode and a substrate. The grid electrode includes a polysilicon layer and a P-type implanted layer. The source electrode includes an N-type implanted layer, an N-type well layer and a heavy-implanted N-type well layer. The drain electrode includes the N-type implanted layer, the N-type well layer and the heavy-implanted N-type well layer. The substrate is connected with a substrate connecting end by the P-type implanted layer, a P-type well layer, a heavy-implanted P-type well layer and a P-type buried layer. The junction field effect transistor structure of the present invention can be manufactured without adding any masking step based on the existing technologies, and has the high-voltage resistant characteristic to meet the requirements in practical applications. Furthermore, it has the compact structure and compatible technology.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: October 8, 2013
    Assignee: IPGoal Microelectronics (SiChuan) Co., Ltd.
    Inventor: Rongwei Yu
  • Patent number: 8552476
    Abstract: A semiconductor layer has a second impurity concentration. First trenches are formed in the semiconductor layer to extend downward from an upper surface of the semiconductor layer. Each of insulation layers is formed along each of the inner walls of the first trenches. Each of conductive layers is formed to bury each of the first trenches via each of the insulation layers, and extends downward from the upper surface of the semiconductor layer to a first position. A first semiconductor diffusion layer reaches a second position from the upper surface of the semiconductor layer, is positioned between the first trenches, and has a third impurity concentration lower than the second impurity concentration. A length from the upper surface of the semiconductor layer to the second position is equal to or less than half a length from the upper surface of the semiconductor layer to the first position.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: October 8, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tsuyoshi Ohta, Masatoshi Arai, Miwako Suzuki
  • Publication number: 20130248944
    Abstract: According to one embodiment, a junction type field effect transistor includes a first conductive type semiconductor substrate, a first conductive type drift layer, a second conductive type gate region, a first conductive type channel layer, a first conductive type source region, a source electrode, a drain electrode, a second conductive type gate contact layer, and a gate electrode. The drift layer is provided on a first main surface of the semiconductor substrate. The gate region is provided on a surface of the drift layer. The channel layer is provided on the drift layer and the gate region. The source region is provided on a surface of the channel layer to face the gate region, and has an impurity concentration higher than the channel layer. The source electrode is provided on the channel layer with Schottky contact and on the source region with ohmic contact.
    Type: Application
    Filed: August 31, 2012
    Publication date: September 26, 2013
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Kohei MORIZUKA
  • Patent number: 8530903
    Abstract: A FET includes a first and second set of finger arrays that each include a source, gate and drain. A first source pad is electrically coupled to source electrodes in the first set of finger arrays. A second source pad is electrically coupled to the source electrodes in the second set of finger arrays. A common drain pad is electrically coupled to drain electrodes in the first and second set of finger arrays. A first gate pad is electrically coupled to gate electrodes in the first set of finger arrays. A second gate pad is electrically coupled to gate electrodes in the second set of finger arrays. A substrate is also provided on which are disposed the first and second set of finger arrays, the first and second source pads, the common drain pad, and the first and second gate pads.
    Type: Grant
    Filed: October 19, 2012
    Date of Patent: September 10, 2013
    Assignee: Power Integrations, Inc.
    Inventors: LinLin Liu, Milan Pophristic, Boris Peres
  • Patent number: 8519485
    Abstract: A method of forming a memory device. The method provides a semiconductor substrate having a surface region. A first dielectric layer is formed overlying the surface region of the semiconductor substrate. A bottom wiring structure is formed overlying the first dielectric layer and a second dielectric material is formed overlying the top wiring structure. A bottom metal barrier material is formed to provide a metal-to-metal contact with the bottom wiring structure. The method forms a pillar structure by patterning and etching a material stack including the bottom metal barrier material, a contact material, a switching material, a conductive material, and a top barrier material. The pillar structure maintains a metal-to-metal contact with the bottom wiring structure regardless of the alignment of the pillar structure with the bottom wiring structure during etching. A top wiring structure is formed overlying the pillar structure at an angle to the bottom wiring structure.
    Type: Grant
    Filed: May 7, 2012
    Date of Patent: August 27, 2013
    Assignee: Crossbar, Inc.
    Inventor: Scott Brad Herner
  • Patent number: 8519410
    Abstract: A vertical-sidewall dual-mesa static induction transistor (SIT) structure includes a silicon carbide substrate having a layer arrangement formed thereon. Laterally spaced ion implanted gate regions are defined in the layer arrangement. Source regions are defined in the layer arrangement. Each of the source regions can include a channel mesa having a source mesa disposed thereon. The source mesa includes upright sidewalls relative to a principal plane of the substrate defining a horizontal dimension thereof. The channel mesa includes upright sidewalls relative to the source mesa and the principal plane of the substrate. Also disclosed is a method of fabricating a vertical-sidewall dual-mesa SiC transistor device. The method includes implanting ions at an angle relative to a principal plane of the substrate to form gate junctions in upper portions of the substrate and lateral portions of the upright channel mesas.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: August 27, 2013
    Assignee: Microsemi Corporation
    Inventors: Bruce Odekirk, Francis K. Chai, Edward William Maxwell, Douglas C. Thompson, Jr.
  • Publication number: 20130214333
    Abstract: An electrostatic discharge (ESD) protection circuit is disclosed. The circuit includes a first terminal (200), a first power supply terminal (Vdd), and a second power supply terminal (Vss). The circuit further includes a junction field effect transistor (JFET) having a current path coupled between the first terminal and the second power supply terminal. The JFET has a control terminal (202) coupled to the first power supply terminal.
    Type: Application
    Filed: February 20, 2013
    Publication date: August 22, 2013
    Inventor: Robert Newton Rountree
  • Patent number: 8513675
    Abstract: Semiconductor devices and methods of making the devices are described. The devices can be junction field-effect transistors (JFETs). The devices have raised regions with sloped sidewalls which taper inward. The sidewalls can form an angle of 5° or more from vertical to the substrate surface. The devices can have dual-sloped sidewalls in which a lower portion of the sidewalls forms an angle of 5° or more from vertical and an upper portion of the sidewalls forms an angle of <5° from vertical. The devices can be made using normal (i.e., 0°) or near normal incident ion implantation. The devices have relatively uniform sidewall doping and can be made without angled implantation.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: August 20, 2013
    Assignee: Power Integrations, Inc.
    Inventors: David C. Sheridan, Andrew P. Ritenour
  • Patent number: 8513713
    Abstract: A junction field effect transistor having a drain and a source, each defined by regions of a first type of semiconductor interconnected by a channel, and in which a dopant profile at a side of the drain facing the channel is modified so as to provide a region of reduced doping compared to a body region of the drain. The region of reduced doping and the body region can be defined by the same mask and doping step, but the mask is shaped to provide a lesser amount and thus less depth of doping for the region of reduced doping.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: August 20, 2013
    Assignee: Analog Devices, Inc.
    Inventors: Paul Malachy Daly, Andrew David Bain, Derek Frederick Bowers, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson, William Allan Lane
  • Patent number: 8513712
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Grant
    Filed: September 28, 2009
    Date of Patent: August 20, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
  • Patent number: 8502282
    Abstract: Wide bandgap semiconductor devices including normally-off VJFET integrated power switches are described. The power switches can be implemented monolithically or hybridly, and may be integrated with a control circuit built in a single- or multi-chip wide bandgap power semiconductor module. The devices can be used in high-power, temperature-tolerant and radiation-resistant electronics components. Methods of making the devices are also described.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: August 6, 2013
    Assignee: Power Integrations, Inc.
    Inventors: Igor Sankin, Joseph Neil Merrett
  • Patent number: 8497527
    Abstract: A device comprising a two-dimensional electron gas that includes an active region located in a portion of the electron gas is disclosed. The active region comprises an electron concentration less than an electron concentration of a set of non-active regions of the electron gas. The device includes a controlling terminal located on a first side of the active region. The device can comprise, for example, a field effect transistor (FET) in which the gate is located and used to control the carrier injection into the active region and define the boundary condition for the electric field distribution within the active region. The device can be used to generate, amplify, filter, and/or detect electromagnetic radiation of radio frequency (RF) and/or terahertz (THz) frequencies.
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: July 30, 2013
    Assignee: Sensor Electronic Technology, Inc.
    Inventors: Alexei Koudymov, Michael Shur, Remigijus Gaska
  • Patent number: 8492803
    Abstract: A semiconductor structure is fabricated with reduced gate capacitance by thinning of a gate electrode to provide a reduced thickness gate electrode. The gate electrode is thinned after forming a spacer layer adjoining the gate electrode. In addition, the height of the spacer layer may also be reduced. The spacer layer thus has an enhanced horizontal width desired for locating an intrinsic source/drain with respect to an extension region and in particular, an enhanced horizontal width relative to the spacer height. The reduced thickness gate electrode may be fully silicided to provide decreased gate resistance. A raised source/drain layer may be located upon the intrinsic source/drain region. The raised source/drain layer may have a top surface higher than the reduced thickness gate electrode. In addition, the raised source/drain layer may have a top surface higher than the reduced height spacer layer.
    Type: Grant
    Filed: November 20, 2008
    Date of Patent: July 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ricky S. Amos, Wesley C. Natzle, Siddhartha Panda, Brian L. Tessier
  • Patent number: 8482029
    Abstract: A semiconductor device includes a source metallization and a semiconductor body. The semiconductor body includes a first field-effect structure including a source region of a first conductivity type electrically coupled to the source metallization. The semiconductor body also includes a second field-effect structure including a source region of the first conductivity type electrically coupled to the source metallization. A voltage tap including a semiconductor region within the semiconductor body is electrically coupled to a first gate electrode of the first field-effect structure by an intermediate inverter structure.
    Type: Grant
    Filed: May 27, 2011
    Date of Patent: July 9, 2013
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Joachim Weyers
  • Patent number: 8481372
    Abstract: In accordance with the present techniques, there is provided a JFET device structures and methods for fabricating the same. Specifically, there is provided a transistor including a semiconductor substrate having a source and a drain. The transistor also includes a doped channel formed in the semiconductor substrate between the source and the drain, the channel configured to pass current between the source and the drain. Additionally, the transistor has a gate comprising a semiconductor material formed over the channel and dielectric spacers on each side of the gate. The source and the drain are spatially separated from the gate so that the gate is not over the drain and source.
    Type: Grant
    Filed: December 11, 2008
    Date of Patent: July 9, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Chandra Mouli
  • Publication number: 20130168741
    Abstract: The disclosure relates to a complementary junction field effect transistor (c-JFET) and its gate-last fabrication method. The method of fabricating a semiconductor device includes: forming a dummy gate on a first conductivity type wafer, forming sidewall spacers on opposite sides of the dummy gate, forming a source and a drain regions on the opposite sides of the dummy gate, removing the dummy gate, forming a first semiconductor region of a second conductivity type in an opening exposed through the removing the dummy gate, and forming a gate electrode in the opening.
    Type: Application
    Filed: September 25, 2012
    Publication date: July 4, 2013
    Applicants: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (Beijing), Semiconductor Manufacturing International Corporation (Shanghai)
    Inventors: Semiconductor Manufacturing International (Shanghai), SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (Beijing)
  • Publication number: 20130161706
    Abstract: A method of fabricating a semiconductor device that includes forming a replacement gate structure on a portion of a semiconductor substrate, wherein source regions and drain regions are formed in opposing sides of the replacement gate structure. A dielectric is formed on the semiconductor substrate having an upper surface that is coplanar with an upper surface of the replacement gate structure. The replacement gate structure is removed to provide an opening to an exposed portion of the semiconductor substrate. A functional gate conductor is epitaxially grown within the opening in direct contact with the exposed portion of the semiconductor substrate. The method is applicable to planar metal oxide semiconductor field effect transistors (MOSFETs) and fin field effect transistors (finFETs).
    Type: Application
    Filed: February 21, 2013
    Publication date: June 27, 2013
    Applicant: International Business Machines Corporation
    Inventor: International Business Machines Corporation
  • Patent number: 8450119
    Abstract: An MTJ MRAM cell is formed by using a reactive ion etch (RIE) to pattern an MTJ stack on which there has been formed a bilayer Ta/TaN hard mask. The hard mask is formed by patterning a masking layer that has been formed by depositing a layer of TaN over a layer of Ta on the MTJ stack. After the stack is patterned, the TaN layer serves at least two advantageous purposes: 1) it protects the Ta layer from oxidation during the etching of the stack and 2) it serves as a surface having excellent adhesion properties for a subsequently deposited dielectric layer.
    Type: Grant
    Filed: March 17, 2006
    Date of Patent: May 28, 2013
    Assignee: MagIC Technologies, Inc.
    Inventors: Chyu-Jiuh Torng, Wei Cao, Terry Ko
  • Publication number: 20130119442
    Abstract: Junction field-effect transistors, methods for fabricating junction field-effect transistors, and design structures for a junction field-effect transistor. A source and a drain of the junction field-effect transistor are comprised of a semiconductor material grown by selective epitaxy and in direct contact with a top surface of a semiconductor layer. A gate is formed that is aligned with a channel laterally disposed in the semiconductor layer between the source and the drain. The source, the drain, and the semiconductor layer are each comprised of a second semiconductor material having an opposite conductivity type from a first semiconductor material comprising the gate.
    Type: Application
    Filed: November 11, 2011
    Publication date: May 16, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, John J. Ellis-Monaghan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Patent number: 8436403
    Abstract: One object is to provide a semiconductor device that includes an oxide semiconductor and is reduced in size with favorable characteristics maintained. The semiconductor device includes an oxide semiconductor layer, a source electrode and a drain electrode in contact with the oxide semiconductor layer, a gate electrode overlapping with the oxide semiconductor layer; and a gate insulating layer between the oxide semiconductor layer and the gate electrode. The source electrode or the drain electrode includes a first conductive layer and a second conductive layer having a region extended in a channel length direction from an end face of the first conductive layer. The sidewall insulating layer has a length of a bottom surface in the channel length direction smaller than a length in the channel length direction of the extended region of the second conductive layer and is provided over the extended region.
    Type: Grant
    Filed: January 26, 2011
    Date of Patent: May 7, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hiromichi Godo, Hideomi Suzawa, Shinya Sasagawa, Motomu Kurata, Mayumi Mikami
  • Patent number: 8421127
    Abstract: A semiconductor device and a method for fabricating the same are described. The semiconductor device includes a well of a first conductive type, first doped regions of a second conductive type, gates of the second conductive type, second doped regions of the first conductive type, and isolation structures. The well is disposed in a substrate. The first doped regions are disposed in the well. The first doped regions are arranged in parallel and extend along a first direction. The gates are disposed on the substrate. The gates are arranged in parallel and extend along a second direction different from the first direction. One of the first doped regions is electrically connected to one of the gates. Each of the second doped regions is disposed in the first doped regions between two adjacent gates. Each of the isolation structures is disposed in the substrate between two adjacent first doped regions.
    Type: Grant
    Filed: July 15, 2011
    Date of Patent: April 16, 2013
    Assignee: Windbond Electronics Corp.
    Inventor: Wen-Yueh Jang
  • Patent number: 8406575
    Abstract: An optoelectronic apparatus for controlling a signal includes an optical waveguide having a variable refractive index; an active device formed within the waveguide, the device having three electrodes, a drain, a source and a gate; and wherein the device is located within the waveguide so that current flowing from the drain to the source changes the refractive index.
    Type: Grant
    Filed: August 4, 2009
    Date of Patent: March 26, 2013
    Assignee: International Business Machines Corporation
    Inventors: William Michael John Green, Yurii A. Vlasov
  • Publication number: 20130069122
    Abstract: The transistor comprises first and second source/drain electrodes formed in a semiconductor film by N-doped and P-doped areas, respectively. A polarization voltage is applied between the two source/drain electrodes in order to impose to the P-doped electrode a potential higher than that of the N-doped electrode. The transistor comprises first and second devices for generating a potential barrier in the semiconductor film. The two potential barriers are opposed to the passage of the charge carriers emitted by the first and second source/drain electrodes, respectively. The two potential barriers are shifted with respect to an axis connecting the two source/drain electrodes. The two devices for generating a potential barrier are configured to generate a potential barrier having a variable amplitude and it are electrically connected to the gate and to the counter electrode.
    Type: Application
    Filed: September 12, 2012
    Publication date: March 21, 2013
    Applicants: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Jing WAN, Sorin CRISTOLOVEANU, Cyrille LE ROYER, Alexander ZASLAVSKY
  • Publication number: 20130056801
    Abstract: A junction field effect transistor comprising: a semiconductor substrate having a first conductivity type; a channel region having a second conductivity type different from the first conductivity type, and being formed in a surface of the semiconductor substrate; a first buried region having the second conductivity type, being formed within the channel region, and having an impurity concentration higher than the channel region; a first gate region having the first conductivity type, and being formed in a surface of the channel region; and first drain/source region and a second drain/source region both having the second conductivity type, which are formed each on an opposite side of the first gate region in the surface of the channel region, in which the first buried region is not formed below the second drain/source region, but is formed below the first drain/source region.
    Type: Application
    Filed: October 24, 2012
    Publication date: March 7, 2013
    Applicant: PANASONIC CORPORATION
    Inventor: PANASONIC CORPORATION
  • Patent number: 8390039
    Abstract: A field effect transistor having a drain, a gate and a source, where the drain and source are formed by semiconductor regions of a first type, and in which a further doped region is provided intermediate the gate and the drain. Field gradients around the drain are thereby reduced.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: March 5, 2013
    Assignee: Analog Devices, Inc.
    Inventors: Derek Frederick Bowers, Andrew David Bain, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson, William Allan Lane
  • Patent number: 8390038
    Abstract: A MIM capacitor device and method of making the device. The device includes an upper plate comprising one or more electrically conductive layers, a dielectric block comprising one or more dielectric layers, a lower plate comprising one or more electrically conductive layer; and a spreader plate comprising one or more electrically conductive layers.
    Type: Grant
    Filed: June 5, 2008
    Date of Patent: March 5, 2013
    Assignee: International Business Machines Corporation
    Inventors: Douglas Duane Coolbaugh, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel
  • Publication number: 20130043487
    Abstract: A FET includes a first and second set of finger arrays that each include a source, gate and drain. A first source pad is electrically coupled to source electrodes in the first set of finger arrays. A second source pad is electrically coupled to the source electrodes in the second set of finger arrays. A common drain pad is electrically coupled to drain electrodes in the first and second set of finger arrays. A first gate pad is electrically coupled to gate electrodes in the first set of finger arrays. A second gate pad is electrically coupled to gate electrodes in the second set of finger arrays. A substrate is also provided on which are disposed the first and second set of finger arrays, the first and second source pads, the common drain pad, and the first and second gate pads.
    Type: Application
    Filed: October 19, 2012
    Publication date: February 21, 2013
    Applicant: POWER INTEGRATIONS, INC.
    Inventor: POWER INTEGRATIONS, INC.
  • Patent number: 8373208
    Abstract: A lateral super junction JFET is formed from stacked alternating P type and N type semiconductor layers over a P-epi layer supported on an N+ substrate. An N+ drain column extends down through the super junction structure and the P-epi to connect to the N+ substrate to make the device a bottom drain device. N+ source column and P+ gate column extend through the super junction but stop at the P-epi layer. A gate-drain avalanche clamp diode is formed from the bottom the P+ gate column through the P-epi to the N+ drain substrate.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: February 12, 2013
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Madhur Bobde, Lingpeng Guan, Anup Bhalla, Hamza Yilmaz
  • Patent number: 8373207
    Abstract: A semiconductor device includes: a rectifying element; an electrode pad electrically connected to the rectifying element; and a resistance and a depletion transistor arranged between the rectifying element and the electrode pad, and electrically connected to each other. The semiconductor device has a configuration in which the rectifying element, the resistance, the depletion transistor, and the electrode pad are serially connected. The semiconductor device is configured to generate a gate potential of the depletion transistor based on a difference in potential across the resistance and to produce a depletion layer in a channel of the depletion transistor based on the gate potential. As a result, a semiconductor device having reasonably large current at low voltage and small current at high voltage can be obtained.
    Type: Grant
    Filed: October 11, 2010
    Date of Patent: February 12, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shigeru Kusunoki, Shinichi Ishizawa