Abstract: A semiconductor device includes a first electrode, a first semiconductor layer of a first dopant type on the first electrode. A first region of the semiconductor device includes a second semiconductor layer of the second dopant type on the first semiconductor layer, a third semiconductor layer of the first dopant type on the second semiconductor layer, and a second electrode extending though the second and third semiconductor layers and inwardly of the first semiconductor layer. A second region of the semiconductor device includes an insulating layer over the first semiconductor layer, a fourth semiconductor layer of the first or second dopant type on the insulating layer, a fifth semiconductor layer of a different dopant type on the insulating layer and surrounding the fourth semiconductor layer, and a sixth semiconductor layer of the same dopant type on the insulation layer and surrounding the fifth semiconductor layer.

Abstract: In a microelectronic package, a first wire bond wire is coupled to an upper surface of a substrate. A first bond mass is coupled to another end of the first wire bond wire. A second wire bond wire is coupled to the upper surface. A second bond mass is coupled to another end of the second wire bond wire. The first and second wire bond wires laterally jut out horizontally away from the upper surface of the substrate for at least a distance of approximately 2 to 3 times a diameter of both the first wire bond wire and the second wire bond wire. The first wire bond wire and the second wire bond wire are horizontal for the distance with respect to being co-planar with the upper surface within +/?10 degrees.

Abstract: An integrated circuit includes an active zone lying above a semiconductor substrate. A cavity borders the active zone and extends, in an insulating zone, as far as into the vicinity of a semiconductor region. An insulating multilayer is provided and an electrically conductive contact extends within the insulating multilayer to emerging onto the active zone and into the cavity. The insulating multilayer includes a first insulating layer covering the active zone outside the contact and lining the walls of the cavity. An additional insulating layer covers the portion of the first insulating layer lining the walls of the cavity. The contact reaches the additional insulating layer in the cavity. An insulating region lies on top of the first insulating layer and the additional insulating layer made from insulating material around the contact.

Abstract: An efficient method of calculating maximum current limits for library gates in which a current limit includes the impact of self-heating effects associated with the maximum current. A maximum current solution is obtained in a self-consistent fashion, providing a way of determining the self-consistent solution in a rapid fashion without extensive numerical calculations or simulations. The present method provides a practical approach for characterizing a large library of gates for use in CMOS designs.

Abstract: An alternating stack of insulator layers and spacer material layers is formed over a substrate. Stepped surfaces are formed in a contact region in which contact via structures are to be subsequently formed. An epitaxial semiconductor pedestal can be formed by a single epitaxial deposition process that is performed after formation of the stepped surfaces and prior to formation of memory openings, or a combination of a first epitaxial deposition process performed prior to formation of memory openings and a second epitaxial deposition process performed after formation of the memory openings. The epitaxial semiconductor pedestal can have a top surface that is located above a topmost surface of the alternating stack. The spacer material layers are formed as, or can be replaced with, electrically conductive layers. Backside contact via structures can be subsequently formed.

Abstract: A semiconductor device can include a substrate including a plurality of active regions having a long axis in a first direction and a short axis in a second direction, the plurality of active regions being repeatedly and separately positioned along the first and second directions, an isolation film defining the plurality of active regions, a plurality of word lines extending across the plurality of active regions and the isolation film, and a positive fixed charge containing layer covering at least a portion of the plurality of word lines, respectively.

Abstract: In a method of forming a pattern of a semiconductor device, a hard mask layer is formed on a substrate. A photoresist film is coated on the hard mask layer. The photoresist film is exposed and developed to form a first photoresist pattern. A smoothing process is performed on the first photoresist pattern to form a second photoresist pattern having a roughness property lower from that of the first photoresist pattern. In the smoothing process, a surface of the first photoresist pattern is treated with an organic solvent. An ALD layer is formed on a surface of the second photoresist pattern. The ALD layer is anisotropically etched to form an ALD layer pattern on a sidewall of the second photoresist pattern. The hard mask layer is etched using the second photoresist pattern and the ALD layer pattern as an etching mask to form a hard mask pattern.

Abstract: Disclosed herein, one embodiment of the disclosure is directed to an apparatus for receiving Aeronautical Radio, Incorporated (ARINC) 429 bus signals. The apparatus may comprise: a modulator that modulates the ARINC 429 bus signals onto a carrier signal and generates a modulated signal using only power supplied by the ARINC 429 bus; and a demodulator that recovers ARINC 429 bus baseband binary data from the modulated signal, wherein the modulated signal propagates from the modulator to the demodulator through capacitive coupling.

Abstract: A method of density-controlled floorplan design for integrated circuits having a plurality of blocks includes positioning decoupling capacitor (DCAP) cells at least partially around a pattern density sensitive block. The method also includes changing at least a portion of a pattern density insensitive block adjacent to the pattern density sensitive block according to at least one pattern density rule.

Abstract: Semiconductor devices include a first gate pattern provided on the first active region, a second gate pattern over the first active region, a third gate pattern over the second active region, and a fourth gate pattern over the second active region. The second gate pattern is parallel to the first gate pattern in a first direction. The third gate pattern has an asymmetric shape to the first gate pattern with respect to the first direction, and the fourth gate pattern is parallel to the third gate pattern in the first direction, and has an asymmetric shape to the second gate pattern with respect to the first direction. MOS transistors having good properties may be provided in a narrow horizontal area. The MOS transistors may be used in highly stacked semiconductor devices.

Abstract: Fabricating methods of a semiconductor device are provided. The fabricating methods may include forming a mold layer, forming a catalyst pattern including noble metal on the mold layer and etching the mold layer using the catalyst pattern as a catalyst. Etching the mold layer may include performing a wet etching process.

Abstract: A semiconductor device includes a bit line structure located on a semiconductor substrate, an outer bit line spacer located on a first side surface of the bit line structure, an inner bit line spacer including a first part located between the bit line structure and the outer bit line spacer and a second part located between the semiconductor substrate and the outer bit line spacer, and a block bit line spacer located between the outer bit line spacer and the second part of the inner bit line spacer. A first air-gap is defined by the outer bit line spacer, the inner bit line spacer, and the block bit line spacer.

Abstract: In accordance with an embodiment of the present invention, a method of testing a plurality of semiconductor devices includes applying a stress voltage having a peak voltage on a shield line disposed over a substrate. The substrate has functional circuitry of a semiconductor device. A fixed voltage is applied to a first metal line disposed above the substrate adjacent the shield line. The first metal line is coupled to the functional circuitry and is configured to be coupled to a high voltage node during operation. The peak voltage is greater than a maximum fixed voltage. The shield line separates the first metal line from an adjacent second metal line configured to be coupled to a low voltage node during operation. The method further includes measuring a current through the shield line in response to the stress voltage, determining the current through the shield line of the semiconductor device, and based on the determination, identifying the semiconductor device as passing the test.

Abstract: A manufacturing method for forming a semiconductor structure includes: first, a plurality of fin structures are formed on a substrate and arranged along a first direction, next, a first fin cut process is performed, so as to remove parts of the fin structures which are disposed within at least one first fin cut region, and a second fin cut process is then performed, so as to remove parts of the fin structures which are disposed within at least one second fin cut region, where the second fin cut region is disposed along at least one edge of the first fin cut region.

Abstract: In embodiments of the present invention improved capabilities are described for RFID tags with hardened memory, where the memory comprises a plurality of one time programmable (OTP) non-volatile memory locations for storing data, wherein the plurality of OTP non-volatile memory locations are configured to emulate a hardened memory system that retains data stored in the plurality of OTP non-volatile memory locations, wherein the data stored is retained after exposure of the RFID tag to an ionizing radiation exposure with an exposure level equal to or greater than 25 kGy, wherein the plurality of OTP non-volatile memory locations are configured to emulate at least one multiple time programmable (MTP) memory location for storing the data.

Abstract: A high-voltage vertical power component including a silicon substrate of a first conductivity type, and a first semiconductor layer of the second conductivity type extending into the silicon substrate from an upper surface of the silicon substrate, wherein the component periphery includes: a porous silicon ring extending into the silicon substrate from the upper surface to a depth deeper than the first layer; and a doped ring of the second conductivity type, extending from a lower surface of the silicon surface to the porous silicon ring.

Abstract: A low-noise amplifier (LNA) circuit utilizes the capacitive cross coupling technique with two pairs of NMOS transistors in conjunction with two cross coupled PMOS transistors to obtain a reduced noise figure. By using the cross coupling technique on the PMOS input transistor, the LNA circuit is able to reduce the noise figure below 2 dB without the use of an inductor. This LNA circuit may be used to amplify a signal in the WLAN band or the Bluetooth band, either independently or simultaneously.

Abstract: A method includes forming a first photo resist layer over a base structure and a target feature over the base structure, performing an un-patterned exposure on the first photo resist layer, and developing the first photo resist layer. After the step of developing, a corner portion of the first photo resist layer remains at a corner between a top surface of the base structure and an edge of the target feature. A second photo resist layer is formed over the target feature, the base structure, and the corner portion of the first photo resist layer. The second photo resist layer is exposed using a patterned lithography mask. The second photo resist layer is patterned to form a patterned photo resist.

Abstract: Embodiments of a semiconductor device structure and a method of forming a semiconductor device structure are provided. The semiconductor device structure includes an insulating layer having a top surface, a bottom surface and a side surface. The semiconductor device structure also includes a first semiconductor substrate formed over the bottom surface of the first insulating layer. The semiconductor device structure further includes a conductive feature formed only adjacent to the side surface of the insulating layer on the first semiconductor substrate. In addition, the semiconductor device structure includes a second semiconductor substrate formed over the top surface of the insulating layer. The second semiconductor substrate includes a device-forming region formed directly over the insulating layer such that a projection region of the device-forming region is positioned inside the insulating layer.

Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a semiconductor substrate, a first stacked layer structure including first to nth semiconductor layers (n is a natural number greater than or equal to 2) stacked in a first direction, and extending in a second direction, and first to nth memory cells provided on surfaces of the first to nth semiconductor layers facing a third direction. The ith memory cell (1?i?n) comprises a second stacked layer structure in which a first insulating layer, a charge storage layer, a second insulating layer, and a control gate electrode are stacked. The second insulating layer has an equivalent oxide thickness smaller than that of the first insulating layer.

Abstract: According to example embodiments, a memory device includes a substrate, a channel region on the substrate, a plurality of gate electrode layers stacked on each other on the substrate, and a plurality of contact plugs. The gate electrode layers are adjacent to the channel region and extend in one direction to define a pad region. The gate electrode layers include first and second gate electrode layers. The contact plugs are connected to the gate electrode layers in the pad region. At least one of the contact plugs is electrically insulated from the from the first gate electrode layer and electrically connected to the second gate electrode layer by penetrating through the first gate electrode layer.

Abstract: An integrated semiconductor device which includes a substrate layer, a buffer layer formed on the substrate layer, a gallium nitride layer formed on the buffer layer, and a barrier layer formed on the gallium nitride layer. Ohmic contacts for a plurality of transistor devices are formed on the barrier layer. Specifically, a plurality of first ohmic contacts for the first transistor device are formed on a first portion of the surface of the barrier layer, and a plurality of second ohmic contacts for the second transistor device are formed on a second portion of the surface of the barrier layer. In addition, one or more gate structures formed on a third portion of the surface of the barrier between the first and second transistor devices. Preferably, the one or more gate structures and the spaces between the gate structures and the source contacts of the transistor devices collectively form an isolation region that electrically isolates the first transistor device from the second transistor device.

Abstract: A method includes forming a hard mask over a low-k dielectric layer, and patterning the hard mask to form an opening. A stress tuning layer is formed over the low-k dielectric layer and in physical contact with the hard mask. The stress tuning layer has an inherent stress, wherein the inherent stress is a near-zero stress or a tensile stress. The low-k dielectric layer is etched to form a trench aligned to the opening, wherein the step of etching is performed using the hard mask as an etching mask.

Abstract: A semiconductor device includes word lines and interlayer insulating layers alternately stacked over a substrate, vertical channel layers protruding from the substrate and passing through the word lines and the interlayer insulating layers, a tunnel insulating layer surrounding each of the vertical channel layers, a charge trap layer surrounding the tunnel insulating layer, wherein first regions of the charge trap layer between the tunnel insulating layer and the word lines have a thickness smaller than a thickness of second regions thereof between the tunnel insulating layer and the interlayer insulating layers, and first charge blocking layer patterns surrounding the first regions of the charge trap layer.

Abstract: A method for manufacturing a finFET device is provided. Firstly, a first multiple layer structure and a second multiple layer structure are formed on a substrate in sequence. Then, a first sacrificial pattern is formed on the second multiple layer structure. A first spacer is next formed on a sidewall of the first sacrificial pattern. Subsequently, a portion of the second multiple layer structure is etched so as to form a second sacrificial pattern by using the first spacer as a hard mask. Next, a second spacer is formed on a sidewall of the second sacrificial pattern. After that, the first multiple layer structure is patterned by using the second spacer as a hard mask. Finally, the substrate is etched so as to form at least a first fin structure by using the patterned first multiple layer structure as a hard mask.

Abstract: A method of manufacturing a semiconductor device includes forming a trench that includes a needle defect, depositing a high density plasma oxide over the trench including the needle defect, removing the part of the high density oxide and the liner oxide over the needle defect by applying an oxide etch, and after the step of applying the oxide etch, etching back the needle defect by applying a polysilicon etch.

Abstract: A method of normalizing strain in semiconductor devices and normalized strain semiconductor devices. The method includes: forming first and second field effect transistors of an integrated circuit; forming a stress layer over the first and second field effect transistors, the stress layer inducing strain in channel regions of the first and second field effect transistors; and selectively thinning the stress layer over at least a portion of the second field effect transistor.

Abstract: A wafer includes a plurality of chips, each of the chips being spaced from each other by kerf-line regions including a reduced width.

Abstract: Embodiments of the present invention provide an integrated circuit system including a first active layer fabricated on a front side of a semiconductor die and a second pre-fabricated layer on a back side of the semiconductor die and having electrical components embodied therein, wherein the electrical components include at least one discrete passive component. The integrated circuit system also includes at least one electrical path coupling the first active layer and the second pre-fabricated layer.

Abstract: A semiconductor integrated circuit includes a substrate, a multi-gate transistor device formed on the substrate, and an n-well resistor formed in the substrate. The substrate includes a plurality of first isolation structures and at least a second isolation structure formed therein. A depth of the first isolation structures is smaller than a depth of the second isolation structure. The multi-gate transistor device includes a plurality of fin structures, and the fin structures are parallel with each other and spaced apart from each other by the first isolation structures. The n-well resistor includes at least one first isolation structure. The n-well resistor and the multi-gate transistor device are electrically isolated from each other by the second isolation structure.

Abstract: Pitch multiplied and non-pitch multiplied features of an integrated circuit, e.g., features in the array, interface and periphery areas of the integrated circuit, are formed by processing a substrate through a mask. A photoresist layer is patterned to simultaneously define mask elements in the array, interface and periphery areas. The pattern is transferred to an amorphous carbon layer. Spacers are formed on the sidewalls of the patterned amorphous carbon layer. Protective material is deposited and patterned to expose mask elements in the array region and in parts of the interface or periphery areas. Exposed amorphous carbon is removed, leaving free-standing spacers in the array region. The protective material is removed, leaving a pattern of pitch multiplied spacers in the array region and non-pitch multiplied mask elements in the interface and periphery areas. The pattern is transferred to a hard mask layer, through which the substrate is etched.

Abstract: A variation in electrical characteristics, such as a negative shift of the threshold voltage or an increase in S value, of a fin-type transistor including an oxide semiconductor material is prevented. An oxide semiconductor film is sandwiched between a plurality of gate electrodes with an insulating film provided between the oxide semiconductor film and each of the gate electrodes. Specifically, a first gate insulating film is provided to cover a first gate electrode, an oxide semiconductor film is provided to be in contact with the first gate insulating film and extend beyond the first gate electrode, a second gate insulating film is provided to cover at least the oxide semiconductor film, and a second gate electrode is provided to be in contact with part of the second gate insulating film and extend beyond the first gate electrode.

Abstract: A semiconductor structure includes a semiconductor substrate with a substrate region and a trench extending into the surface region of the semiconductor substrate. The trench includes sidewalls, a bottom and a depth. The semiconductor structure further includes a trench liner overlying the bottom and the sidewalls of the trench. The semiconductor structure also includes a shallow trench isolation structure filling at least the depth of the trench. The shallow trench isolation structure is formed from alternating layers of silicon nitride and high-density plasma oxide.

Abstract: The power conversion apparatus includes semiconductor modules and a circuit board on which a control circuit is formed. Each semiconductor module includes signal terminals electrically connected to the circuit board. The signal terminals of each semiconductor module are arranged in a line so as to form a terminal row along a first direction. The semiconductor modules are grouped into upper arm semiconductor modules and lower arm semiconductor modules each connected to a corresponding one of the upper arm semiconductor module. Upper arm terminal rows as the terminal rows of the upper arm semiconductor modules and lower arm terminal rows as the terminal rows of the lower arm semiconductor modules are arranged in a staggered manner along a second direction perpendicular to the first direction and to a third direction in which the signal terminals of the semiconductor modules project, the first, second and third directions being perpendicular to one another.

Abstract: A semiconductor device includes a bit line disposed over a semiconductor substrate, a supporting film being perpendicular to the bit line, a first storage node contact disposed at a lower part of a region disposed between the bit line and the supporting film, and a second storage node contact having a line shape, disposed over the first storage node contact and the bit line, isolated by the supporting film, and patterned in a diagonal direction across the bit line.

Abstract: Systems, apparatuses, and methods related to the design, fabrication, and manufacture of gallium arsenide (GaAs) integrated circuits are disclosed. Copper can be used as the contact material for a GaAs integrated circuit. Metallization of the wafer and through-wafer vias can be achieved through copper plating processes disclosed herein. To avoid warpage, the tensile stress of a conductive layer deposited onto a GaAs substrate can be offset by depositing a compensating layer having negative stress over the GaAs substrate. GaAs integrated circuits can be singulated, packaged, and incorporated into various electronic devices.

Abstract: A hard mask composition includes a solvent and an aromatic ring-containing compound represented by the following Chemical Formula 1:

Abstract: This document refers to apparatus and methods for a device layer of a microelectromechanical system (MEMS) sensor having vias with reduced shunt capacitance. In an example, a device layer can include a substrate having a pair of trenches separated in a horizontal direction by a portion of the substrate, wherein each trench of the pair of trenches includes first and second vertical layers including dielectric, the first and second vertical layers separated by a third vertical layer including polysilicon.

Abstract: Systems for communicating over a communication interface are provided. An integrated circuit includes circuitry for monitoring a current flowing between two terminals of the integrated circuit. The integrated circuit also includes a voltage driver circuit for modulating a voltage between two terminals of the integrated circuit. The voltage driver modulates the voltage across the two terminals of the integrated circuit to encode data according to the Highway Addressable Remote Transducer protocol.

Abstract: A power module includes a semiconductor chip, a first coupling conductor with one main surface coupled to one main surface of the semiconductor chip, a second coupling conductor with one main surface coupled to the other main surface of the semiconductor chip, a coupling terminal supplied with electrical power from the direct current power source, and resin material to seal the semiconductor chip, and in which the resin member has a protruding section that protrudes from the space where the first and second coupling conductors are formed opposite each other, and the coupling terminal is clamped on the protruding section, and at least one of the first or second coupling conductors is coupled to a coupling terminal by way of a metallic material that melts at a specified temperature.

Abstract: A packaged device includes a first die, a second die, and specially spaced and positioned sets of package terminals. The first die includes a pulse-width modulator (PWM), a processor, a timer, high-side drivers, low-side drivers, and a fault protection circuit. The second die includes ultra-high voltage high-side drivers. In an ultra-high voltage application, the PWM and external circuitry together form a switching power supply that generates a high voltage. The high voltage powers external high-side transistors. The processor and timer control the ultra-high voltage high-side drivers, that in turn supply drive signals to the external high-side transistors through the package terminals. External low-side transistors are driven directly by low-side drivers of the first die. If the fault protection circuit detects an excessive current, then the fault protection circuit supplies a disable signal to high-side and low-side drivers of both dice.

Abstract: In a semiconductor integrated circuit device including a digital circuit region in which a digital circuit is formed, and an analog circuit region in which an analog circuit is formed, the analog circuit region is separated into an active element region in which an active element of the analog circuit is formed, and a resistive and capacitive element region in which a resistor or a capacitor of the analog circuit is formed, the resistive and capacitive element region is arranged in a region adjacent to the digital circuit region, and the active element region is arranged in a region separated from the digital circuit region.

Abstract: A semiconductor device includes a semiconductor substrate. The semiconductor substrate includes a first surface, a second surface, and a through hole that extends through the semiconductor substrate from the first surface to the second surface. An insulating layer covers the first surface and includes an opening at a location facing the through hole. An insulating film covers an inner wall of the through hole and an inner wall of the opening. A through electrode is formed in the through hole and the opening that are covered by the insulating film. A first connecting terminal is formed integrally with the through electrode to cover one end of the through electrode exposed from the insulating layer. The first connecting terminal has a larger size than the through electrode as viewed from above.

Abstract: A method and system to map density and temperature of a chip, in situ, is disclosed. The method includes measuring a propagation time that a mechanical propagation wave travels along at least one predefined path in a substrate. The method further includes calculating an average substrate density and temperature along the at least one predefined path as a function of the propagation time and distance. The method further includes determining a defect or unauthorized modification in the substrate based on the average substrate density being different than a baseline substrate density.

Abstract: A semiconductor substrate having an isolation region and method of forming the same. The method includes the steps of providing a substrate having a substrate layer, a buried oxide (BOX), a silicon on insulator (SOI) layer, a pad oxide layer, and a pad nitride layer, forming a shallow trench region, etching the pad oxide layer to form ears and etching the BOX layer to form undercuts, depositing a liner on the shallow trench region, depositing a soft mask over the surface of the shallow trench region, filling the shallow trench region, etching the soft mask so that it is recessed to the top of the BOX layer, etching the liner off certain regions, removing the soft mask, and filling and polishing the shallow trench region. The liner prevents shorting of the semiconductor device when the contacts are misaligned.

Abstract: A semiconductor device includes a substrate having a plurality of active regions defined by a device isolation region, a plurality of conductive patterns on the plurality of active regions, each of the conductive patterns having side walls, a conductive line that faces the side walls of the conductive patterns with an air spacer therebetween on the active regions, the conductive line extending in a first direction, and a first insulating film covering the side walls of the conductive patterns between the air spacer and the conductive pattern. A lower portion of the first insulating film that is near the substrate protrudes toward the air spacer.

Abstract: According to one embodiment, a semiconductor memory device includes a semiconductor substrate and a memory array. The semiconductor substrate has a first face. The memory array region is provided on the first face and includes a plurality of semiconductor pillars. The semiconductor pillars extend in a first direction perpendicular to the first face. Each of the semiconductor pillars includes a plurality of memory cells connected in series. Each of the semiconductor pillars is disposed at the nodes of a honeycomb shape when viewed in the first direction. When the semiconductor pillars are projected onto a first plane along the first and second directions perpendicular to the first direction, a component in the second direction of an interval between the semiconductor pillars has first and second intervals repeated alternately. The second interval is an integer multiple of the first interval greater than or equal to 2.

Abstract: A MEMS logic device comprising agate which pivots on a torsion hinge, two conductive channels on the gate, one on each side of the torsion hinge, source and drain landing pads under the channels, and two body bias elements under the gate, one on each side of the torsion hinge, so that applying a threshold bias between one body bias element and the gate will pivot the gate so that one channel connects the respective source and drain landing pad, and vice versa. An integrated circuit with MEMS logic devices on the dielectric layer, with the source and drain landing pads connected to metal interconnects of the integrated circuit. A process of forming the MEM switch.

Abstract: An integrated circuit having a semiconductor component arrangement and production method is provided. The integrated circuit includes a semiconductor material region having a surface region and being laterally subdivided into a central region and into an edge region. The integrated circuit includes a passivation layer region, an oxide layer, and a VLD zone. The passivation layer region is formed on the surface region in the edge region and is configured to realize a field distribution at the edge of the semiconductor component arrangement. The oxide layer region is provided as a protection against oxidation on and in direct contact with the surface region of the semiconductor material region in the edge region. The oxide layer region or a part of the oxide layer region is formed in direct contact with a channel stopper region formed in the edge region.

Abstract: According to an embodiment, a method for fabricating a pattern includes forming a mask covering a first layer, and a second layer selectively provided on the first layer, and forming a groove dividing the first layer and the second layer using the mask. The mask includes a first portion formed on a region of the first layer on a first side of the second layer, a second portion formed on a region of the first layer on a second side of the second layer opposite to the first side, first extending parts extending over the second layer from the first portion toward the second portion, and second extending parts extending over the second layer from the second portion toward the first portion. Each of the second extending parts is located between the first extending parts adjacent to each other.