Plasma confinement tray for plasma processing chamber

-
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a top isometric view of a plasma confinement tray for plasma processing chamber, according to one embodiment of the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left elevation view thereof.

FIG. 8 is a right elevation view thereof; and,

FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 3. The plasma confinement tray for plasma processing chambers is shown in FIG. 9 with a symbolic break in its length. The appearance of any portion of the article between the break lines forms no part of the claimed design.

Claims

The ornamental design for a plasma confinement tray for plasma processing chamber, as shown and described.

Referenced Cited
U.S. Patent Documents
3295559 January 1967 Beasley
D225434 December 1972 Cleeland
6129808 October 10, 2000 Wicker et al.
6156151 December 5, 2000 Komino et al.
6224472 May 1, 2001 Lai
D453670 February 19, 2002 Levinson
6464843 October 15, 2002 Wicker et al.
6506254 January 14, 2003 Bosch et al.
6506685 January 14, 2003 Li et al.
6710611 March 23, 2004 Saulnier
D494551 August 17, 2004 Doba
7267741 September 11, 2007 Ren
7552521 June 30, 2009 Fink
7585384 September 8, 2009 Bera et al.
7754997 July 13, 2010 Bera et al.
7802539 September 28, 2010 Bosch
7837826 November 23, 2010 Marakhtanov et al.
7972467 July 5, 2011 Bera et al.
8075728 December 13, 2011 Balakrishna
8298046 October 30, 2012 Frank, Jr. et al.
8485128 July 16, 2013 Kellogg et al.
8517803 August 27, 2013 Sather et al.
D694790 December 3, 2013 Matsumoto et al.
D694791 December 3, 2013 Matsumoto et al.
D695325 December 10, 2013 Becker
D697038 January 7, 2014 Matsumoto et al.
8622021 January 7, 2014 Taylor et al.
D699200 February 11, 2014 Nagakubo
D709536 July 22, 2014 Yoshimura et al.
D709537 July 22, 2014 Kuwabara et al.
D709538 July 22, 2014 Mizukami
D709539 July 22, 2014 Kuwabara et al.
D713363 September 16, 2014 Funk et al.
8826855 September 9, 2014 Kellogg et al.
8893702 November 25, 2014 Stumpf et al.
8900398 December 2, 2014 Dhindsa et al.
D729730 May 19, 2015 Gillespie-Brown et al.
D734376 July 14, 2015 Lefas
9123661 September 1, 2015 Kellogg
9184029 November 10, 2015 Dhindsa et al.
9330927 May 3, 2016 Dhindsa et al.
D766849 September 20, 2016 Fukushima et al.
D768743 October 11, 2016 Yamamoto
D770992 November 8, 2016 Tauchi et al.
9508530 November 29, 2016 Dhindsa et al.
D793976 August 8, 2017 Fukushima et al.
D797691 September 19, 2017 Joubert et al.
9779916 October 3, 2017 Dhindsa et al.
D809033 January 30, 2018 Wakisaka
D810705 February 20, 2018 Krishnan et al.
D836573 December 25, 2018 Ichino et al.
D840364 February 12, 2019 Ichino et al.
10269614 April 23, 2019 Chu
D865690 November 5, 2019 Sakamoto
D871609 December 31, 2019 Isozaki et al.
D873782 January 28, 2020 Garcia
D876504 February 25, 2020 Lee et al.
10672629 June 2, 2020 Kim et al.
D891382 July 28, 2020 Koppa et al.
D891636 July 28, 2020 Isozaki
10720314 July 21, 2020 Dhindsa et al.
D895777 September 8, 2020 Chase et al.
D931241 September 21, 2021 Babu
D942516 February 1, 2022 Koppa et al.
D943539 February 15, 2022 Perry
D947802 April 5, 2022 Sakata et al.
D947914 April 5, 2022 Rao et al.
D971167 November 29, 2022 Babu
D986190 May 16, 2023 Perry
D1037186 July 30, 2024 Daigo
D1052547 November 26, 2024 Suzuki
D1059311 January 28, 2025 Dunn
D1071887 April 22, 2025 Yoshida
D1112390 February 10, 2026 Kimtee
D1114752 February 24, 2026 Kido
D1115720 March 3, 2026 Mustafa
D1126933 May 19, 2026 Mustafa
D1130341 June 16, 2026 Kido
20030092278 May 15, 2003 Fink
20040075036 April 22, 2004 Saulnier
20060162657 July 27, 2006 Cirigliano
20060283551 December 21, 2006 Son
20080023029 January 31, 2008 Ren
20080110567 May 15, 2008 Miller et al.
20090188625 July 30, 2009 Carducci et al.
20100304571 December 2, 2010 Larson et al.
20110100553 May 5, 2011 Dhindsa et al.
20110226739 September 22, 2011 Allen et al.
20120000608 January 5, 2012 Kellogg
20120273130 November 1, 2012 Drewery et al.
20140113453 April 24, 2014 Shih et al.
20140116338 May 1, 2014 He et al.
20150329955 November 19, 2015 Sun et al.
20150364322 December 17, 2015 Kellogg
20160002788 January 7, 2016 Nal et al.
20160158910 June 9, 2016 Lee et al.
20180061618 March 1, 2018 Nichols
20190013232 January 10, 2019 Yan
20200075295 March 5, 2020 Canniff
20210066050 March 4, 2021 Babu et al.
20220068613 March 3, 2022 Bae
20220351947 November 3, 2022 Yoon
20220415621 December 29, 2022 Cho
20230317424 October 5, 2023 Singh
20250054735 February 13, 2025 Kwon
20260040889 February 5, 2026 Lin
20260097465 April 9, 2026 Kim
20260162944 June 11, 2026 Mae
Foreign Patent Documents
106898534 June 2017 CN
306671442 July 2021 CN
2011040461 February 2011 JP
2011099956 May 2011 JP
2015022150 February 2015 JP
D1686348 May 2021 JP
200467561 July 2004 KR
201803064 October 2018 KR
2040281 November 2019 KR
3010422090000 January 2020 KR
D195951 February 2019 TW
234668-0001 November 2024 TW
WO 2004/059716 July 2004 WO
Other references
  • Search Report for Taiwan Design Application No. 110303814, dated Oct. 29, 2021.
  • International Search Report for PCT/US2021/021986, dated Jun. 28, 2021.
Patent History
Patent number: D1156335
Type: Grant
Filed: Jun 28, 2023
Date of Patent: Nov 3, 2026
Assignee:
Inventors: Devi Raghavee Veerappan (Eindhoven), Varun Haresh Rupchandani (San Jose, CA)
Primary Examiner: Christian P. Mclean
Application Number: 29/896,010