Inner tube of reaction tube for semiconductor manufacturing equipment
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Description
Claims
I claim the ornamental design for an inner tube of reaction tube for semiconductor manufacturing equipment, as shown and described.
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Patent History
Patent number: D1019581
Type: Grant
Filed: Nov 28, 2022
Date of Patent: Mar 26, 2024
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Atsushi Hirano (Toyama)
Primary Examiner: Christy Nemeth
Assistant Examiner: Justin M. Donaldson
Application Number: 29/861,167
Type: Grant
Filed: Nov 28, 2022
Date of Patent: Mar 26, 2024
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Atsushi Hirano (Toyama)
Primary Examiner: Christy Nemeth
Assistant Examiner: Justin M. Donaldson
Application Number: 29/861,167
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)