Introduction Of Conductivity Modifying Dopant Into Semiconductive Material Patents (Class 438/510)
- Ionized molecules (Class 438/515)
- Including charge neutralization (Class 438/516)
- Of semiconductor layer on insulating substrate or layer (Class 438/517)
- Of compound semiconductor (Class 438/518)
- Into grooved semiconductor substrate region (Class 438/524)
- Using oblique beam (Class 438/525)
- Forming buried region (Class 438/526)
- Including multiple implantation steps (Class 438/527)
- Including heat treatment (Class 438/530)
- Using shadow mask (Class 438/531)
- Into polycrystalline region (Class 438/532)
- And contact formation (i.e., metallization) (Class 438/533)
- To control carrier lifetime (i.e., deep level dopant) (Class 438/543)
- To solid-state solubility concentration (Class 438/544)
- Forming partially overlapping regions (Class 438/545)
- Plural dopants in same region (e.g., through same mask opening, etc.) (Class 438/546)
- Plural dopants simultaneously in plural regions (Class 438/548)
- Single dopant forming plural diverse regions (e.g., forming regions of different concentrations or of different depths, etc.) (Class 438/549)
- Nonuniform heating (Class 438/550)
- Using multiple layered mask (Class 438/551)
- Using metal mask (Class 438/553)
- Outwardly (Class 438/554)
- Laterally under mask opening (Class 438/555)
- Edge diffusion by using edge portion of structure other than masking layer to mask (Class 438/556)
- From melt (Class 438/557)
- From solid dopant source in contact with semiconductor region (Class 438/558)
- From vapor phase (Class 438/565)