Substrate support for a substrate processing chamber
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Description
The dashed lines in
Claims
The ornamental design for a substrate support for a substrate processing chamber, as shown and described.
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Patent History
Patent number: D1071886
Type: Grant
Filed: Jan 20, 2022
Date of Patent: Apr 22, 2025
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Zhixiu Liang (Fremont, CA), Michael Sterling Jackson (Sunnyvale, CA), Jiang Lu (Milpitas, CA), Cheng-Hsiung Matthew Tsai (Cupertino, CA), Tomoharu Matsushita (Chiba), Zubin Huang (Santa Clara, CA)
Primary Examiner: Brett Miller
Assistant Examiner: Russell Carnell Smith, Jr.
Application Number: 29/823,917
Type: Grant
Filed: Jan 20, 2022
Date of Patent: Apr 22, 2025
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Zhixiu Liang (Fremont, CA), Michael Sterling Jackson (Sunnyvale, CA), Jiang Lu (Milpitas, CA), Cheng-Hsiung Matthew Tsai (Cupertino, CA), Tomoharu Matsushita (Chiba), Zubin Huang (Santa Clara, CA)
Primary Examiner: Brett Miller
Assistant Examiner: Russell Carnell Smith, Jr.
Application Number: 29/823,917
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)