Electrode for substrate processing apparatus

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Description

FIG. 1 is a top perspective view of an electrode for substrate processing apparatus showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side elevation view thereof; and,

FIG. 6 is a cross-sectional view, taken along a line 6-6 of FIG. 3.

Claims

The ornamental design for an electrode for substrate processing apparatus, as shown and described.

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Patent History
Patent number: D1023959
Type: Grant
Filed: May 11, 2021
Date of Patent: Apr 23, 2024
Assignee: ASM IP Holding B.V. (Almere)
Inventors: JeongHo Lee (Seoul), JaeHyun Kim (Hwaseong-si), JinHo Shin (Hwaseong-si), HyunSoo Jang (Osan-si)
Primary Examiner: George D. Kirschbaum
Assistant Examiner: Denis Houyoux
Application Number: 29/782,976
Classifications
Current U.S. Class: Electrode (i.e., Grid Or Plate Type) (D13/121)