Target profile for a physical vapor deposition chamber target

- APPLIED MATERIALS, INC.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target, according to the new design.

FIG. 2 is a bottom perspective view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a right side elevation view thereof.

FIG. 6 is a left side elevation view thereof.

FIG. 7 is a front elevation view thereof.

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 4.

Dashed lines in FIGS. 1-9 represent features of the target profile for a physical vapor deposition chamber target that form no part of the claimed design.

Claims

We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

Referenced Cited
U.S. Patent Documents
5320728 June 14, 1994 Tepman
D351450 October 11, 1994 Maryska
D363464 October 24, 1995 Fukasawa et al.
D376744 December 24, 1996 Eisenblatter
D381030 July 15, 1997 Tepman
D411516 June 29, 1999 Lmafuku et al.
D423026 April 18, 2000 Shimazu
6086725 July 11, 2000 Abburi et al.
6114216 September 5, 2000 Yieh et al.
D446231 August 7, 2001 Kuraoka et al.
6390905 May 21, 2002 Korovin et al.
6659850 December 9, 2003 Korovin et al.
D487254 March 2, 2004 Suenaga
D496951 October 5, 2004 Brasseur et al.
6815352 November 9, 2004 Tamura et al.
D503729 April 5, 2005 Leeuw et al.
D553104 October 16, 2007 Oohashi et al.
D557226 December 11, 2007 Uchino
D559066 January 8, 2008 Tano et al.
D559993 January 15, 2008 Nagakubo et al.
D559994 January 15, 2008 Nagakubo et al.
D562856 February 26, 2008 Hawley et al.
D570310 June 3, 2008 Sasaki
D571383 June 17, 2008 Ota et al.
D571831 June 24, 2008 Ota et al.
D571833 June 24, 2008 Ota et al.
D572733 July 8, 2008 Ota et al.
7402098 July 22, 2008 Severson et al.
D582949 December 16, 2008 Yamashita
D584591 January 13, 2009 Tano et al.
D592029 May 12, 2009 Tano et al.
D592030 May 12, 2009 Tano et al.
D600660 September 22, 2009 Sato
D600989 September 29, 2009 Tano et al.
D614593 April 27, 2010 Lee et al.
D616389 May 25, 2010 Takahashi
D616390 May 25, 2010 Sato
D633452 March 1, 2011 Namiki et al.
D649126 November 22, 2011 Takahashi
D669509 October 23, 2012 Krink et al.
8371904 February 12, 2013 Jindal et al.
D678745 March 26, 2013 Nguyen
8398833 March 19, 2013 Lee et al.
D683806 June 4, 2013 Dueck
D687790 August 13, 2013 Krishnan et al.
D687791 August 13, 2013 Krishnan et al.
D691974 October 22, 2013 Osada
D694790 December 3, 2013 Matsumoto et al.
D703162 April 22, 2014 Tamaso
D716742 November 4, 2014 Jang et al.
D724553 March 17, 2015 Choi et al.
D732094 June 16, 2015 Jussel et al.
D732145 June 16, 2015 Yamagishi et al.
D733843 July 7, 2015 Yamagishi et al.
D741823 October 27, 2015 Tateno et al.
D741921 October 27, 2015 Jarvius et al.
D750728 March 1, 2016 Kremer
D767234 September 20, 2016 Kirkland et al.
D769200 October 18, 2016 Fukushima et al.
9475996 October 25, 2016 Mandle
D770992 November 8, 2016 Tauchi et al.
D790041 June 20, 2017 Jang et al.
D793572 August 1, 2017 Kozuka et al.
D795208 August 22, 2017 Sasaki et al.
D797067 September 12, 2017 Zhang et al.
D797691 September 19, 2017 Joubert et al.
D798248 September 26, 2017 Hanson et al.
D801942 November 7, 2017 Riker et al.
D808349 January 23, 2018 Fukushima et al.
D810705 February 20, 2018 Krishnan et al.
D813181 March 20, 2018 Okajima et al.
D825504 August 14, 2018 Zhang
D825505 August 14, 2018 Hanson et al.
D830435 October 9, 2018 Wakisaka et al.
D830981 October 16, 2018 Jeong et al.
D836572 December 25, 2018 Riker
D837755 January 8, 2019 Riker et al.
D839224 January 29, 2019 Yamaki et al.
D846514 April 23, 2019 Yoshida et al.
D851613 June 18, 2019 Johanson
10442056 October 15, 2019 Namiki et al.
D869409 December 10, 2019 Riker
D877101 March 3, 2020 Johanson
20040149567 August 5, 2004 Kosyachkov
20050152089 July 14, 2005 Matsuda et al.
20050193952 September 8, 2005 Goodman et al.
20070076345 April 5, 2007 Bang
20080173541 July 24, 2008 Lee et al.
20080308416 December 18, 2008 Allen et al.
20090260982 October 22, 2009 Riker et al.
20100096261 April 22, 2010 Hoffman et al.
20100108500 May 6, 2010 Hawrylchak et al.
20100170786 July 8, 2010 Wang et al.
20120033340 February 9, 2012 Roy et al.
20130316628 November 28, 2013 Jang et al.
20140261180 September 18, 2014 Yoshidome et al.
20150170888 June 18, 2015 Riker et al.
20150357169 December 10, 2015 Yuan et al.
20160002776 January 7, 2016 Nal et al.
20160002788 January 7, 2016 Nal et al.
20160035547 February 4, 2016 Johanson et al.
Foreign Patent Documents
206573738 October 2017 CN
D1420846 August 2011 JP
D1421157 August 2011 JP
D1422692 September 2014 JP
223429 May 1994 TW
223430 May 1994 TW
D146490 April 2012 TW
Other references
  • Search Report for Taiwan Design Application No. 106301373 dated Jun. 20, 2017.
  • Search Report for Taiwan Design Application No. 107305358 dated Feb. 21, 2019.
  • Search Report for Taiwan Design Application No. 1077303086 dated Jul. 6, 2018.
  • Sputtering Targets, posted at Angstrom Sciences, posting date May 5, 2016. Site visited Apr. 1, 2019. URL: <https://web.archive.org/web/20160505015447/https://www.angstromsciences.com/sputtering-targets> (Year: 2016).
  • Sputtering Targets for LSis, posted at JX Nippon Mining & Metals, posting date Mar. 22, 2016. Site visited Apr. 1, 2019. URL: <https://web .archive .org/web/20 160322055046/http :1/www.nmm.jx-group.co.jp/english/products/04_supa/target_adv.html> (Year: 2016).
  • U.S. Appl. No. 29/703,194, filed Aug. 26, 2019.
  • U.S. Appl. No. 29/671,900, filed Nov. 30, 2018.
  • U.S. Appl. No. 29/639,953, filed Mar. 9, 2018.
  • U.S. Appl. No. 29/629,062, filed Dec. 11, 2017.
Patent History
Patent number: D894137
Type: Grant
Filed: May 9, 2019
Date of Patent: Aug 25, 2020
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: William Johanson (Gilroy, CA), Kirankumar Savandaiah (Bangalore), Anthony Chih-Tang Chan (Sunnyvale, CA), Siew Kit Hoi (Singapore), Prashant Prabhakar Prabhu (Karwar)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Suzanne E Tisdell
Application Number: 29/690,617
Classifications
Current U.S. Class: Casing Or Enclosure Not Elsewhere Specified (D13/184)