Target profile for a physical vapor deposition chamber target

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a right side plan view thereof.

FIG. 5 is a left side plan view thereof.

FIG. 6 is a front view thereof.

FIG. 7 is a back view thereof; and,

FIG. 8 is an enlarged cross sectional view taken along line 8-8 in FIG. 2.

Claims

The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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Patent History
Patent number: D868124
Type: Grant
Filed: Dec 11, 2017
Date of Patent: Nov 26, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Zheng Wang (Mountain View, CA)
Primary Examiner: Kevin K Rudzinski
Assistant Examiner: Kathleen L Jones
Application Number: 29/629,062