Substrate support for a substrate processing chamber

Description

FIG. 1 is a top isometric view of a substrate support for a substrate processing chamber, showing our new design.

FIG. 2 is a top plan view thereof.

FIG. 3 is the top plan view thereof shown in FIG. 2, further showing section line 9-9.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left elevation view thereof.

FIG. 8 is a right elevation view thereof; and,

FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 3.

The dashed lines in FIGS. 1-9 represent portions of the substrate support for a substrate processing chamber that form no part of the claimed design.

Claims

The ornamental design for a substrate support for a substrate processing chamber, as shown and described.