Gas supply plate for semiconductor manufacturing apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a perspective view of a gas supply plate for semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged view of the portion labeled “FIG. 8” indicated in FIG. 6;

FIG. 9 is an enlarged view of the portion labeled “FIG. 9” indicated in FIG. 7; and,

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 9.

The even dashed broken lines shown in the drawings represent portions of the gas supply plate for semiconductor manufacturing apparatus that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary between the claimed portions and unclaimed portions of the claimed design. The claimed portion is directed to the solid circles shown within the dashed-dot-dashed lines, which appear at the center region of the gas supply plate.

Claims

The ornamental design for a gas supply plate for semiconductor manufacturing apparatus, as shown and described.

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Patent History
Patent number: D880437
Type: Grant
Filed: May 3, 2018
Date of Patent: Apr 7, 2020
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hak Joo Lee (Gyeonggi-do), Jeong Jun Woo (Chungcheongnam-do), Jong Hyun Ahn (Gyeonggi-do), Yoon Ki Min (Seoul)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/646,377