Field-effect Transistor (epo) Patents (Class 257/E29.242)

  • Patent number: 8710538
    Abstract: A light-emitting device having at least one spacer located at a bottom surface is disclosed. In two other embodiments, an electronic display system and an electronic system having such light-emitting device are disclosed. The light-emitting device comprises a plurality of leads, a light source die, and a body. The body encapsulates a portion of the plurality of leads and the light source die. The body has a least one side surface and a bottom surface. The at least one spacer is located at the bottom surface. In use, the light-emitting device is attached to a top surface of a substrate. The spacer is configured to create an air vent between the bottom surface and the top surface of the substrate when the light-emitting device is attached to, and the spacer is in contact with the substrate.
    Type: Grant
    Filed: October 5, 2011
    Date of Patent: April 29, 2014
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Yi Feng Hwang, Yin Har Cheow
  • Patent number: 8703569
    Abstract: A MOS transistor has a first stress layer formed over a silicon substrate on a first side of a channel region defined by a gate electrode, and a second stress layer formed over the silicon substrate on a second side of the channel region, the first and second stress layers accumulating a tensile stress or a compressive stress depending on a conductivity type of the MOS transistor. The first stress layer has a first extending part rising upward from the silicon substrate near the channel region along a first sidewall of the gate electrode but separated from the first sidewall of the gate electrode, and the second stress layer has a second extending part rising upward from the silicon substrate near the channel region along a second sidewall of the gate electrode but separated from the second sidewall of the gate electrode.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: April 22, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Sergey Pidin
  • Patent number: 8674461
    Abstract: The invention provides combination semiconductor and plasma devices, including transistors and phototransistors. A preferred embodiment hybrid plasma semiconductor device has active solid state semiconductor regions; and a plasma generated in proximity to the active solid state semiconductor regions. Devices of the invention are referred to as hybrid plasma-semiconductor devices, in which a plasma, preferably a microplasma, cooperates with conventional solid state semiconductor device regions to influence or perform a semiconducting function, such as that provided by a transistor. The invention provides a family of hybrid plasma electronic/photonic devices having properties previously unavailable. In transistor devices of the invention, a low temperature, glow discharge is integral to the hybrid transistor. Example preferred devices include hybrid BJT and MOSFET devices.
    Type: Grant
    Filed: July 16, 2013
    Date of Patent: March 18, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Paul A. Tchertchian, Clark J. Wagner, J. Gary Eden
  • Patent number: 8673757
    Abstract: A method is provided that includes forming a high-k dielectric etch stop layer over at least a first conductivity type semiconductor device on a first portion of a substrate and at least a second conductivity type semiconductor device on a second portion of the semiconductor device. A first stress-inducing layer is deposited over the first conductivity type semiconductor device and the second conductivity type semiconductor device. The portion of the first stress-inducing layer that is formed over the second conductivity type semiconductor device is then removed with an etch that is selective to the high-k dielectric etch stop layer to provide an exposed surface of second portion of the substrates that includes at least the second conductivity type semiconductor device. A second stress-inducing layer is then formed over the second conductivity type semiconductor device.
    Type: Grant
    Filed: October 28, 2010
    Date of Patent: March 18, 2014
    Assignee: International Business Machines Corporation
    Inventor: William K. Henson
  • Patent number: 8669145
    Abstract: A method (and structure) of forming an electronic device includes forming at least one localized stressor region within the device.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: March 11, 2014
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Diane C. Boyd, Huilong Zhu
  • Patent number: 8669662
    Abstract: A fastening device is provided that includes a semiconductor body with an integrated circuit, and a dielectric passivation layer formed on the surface of the semiconductor body, and a trace formed underneath the passivation layer, and an oxide layer formed beneath the trace, and a connecting component that forms a frictional connection between a component formed above the passivation layer and the semiconductor body, wherein a formation passing through the passivation layer and the oxide layer and having a bottom surface is formed, and a conductive layer is formed on the bottom surface and the connecting component forms an electrical connection between the conductive layer and the component.
    Type: Grant
    Filed: December 2, 2012
    Date of Patent: March 11, 2014
    Assignee: Micronas GmbH
    Inventors: Christoph Wilbertz, Heinz-Peter Frerichs, Tobias Kolleth
  • Patent number: 8664053
    Abstract: A device isolation region is made of a silicon oxide film embedded in a trench, an upper portion thereof is protruded from a semiconductor substrate, and a sidewall insulating film made of silicon nitride or silicon oxynitride is formed on a sidewall of a portion of the device isolation region which is protruded from the semiconductor substrate. A gate insulating film of a MISFET is made of an Hf-containing insulating film containing hafnium, oxygen and an element for threshold reduction as main components, and a gate electrode that is a metal gate electrode extends on an active region, the sidewall insulating film and the device isolation region. The element for threshold reduction is a rare earth or Mg when the MISFET is an n-channel MISFET, and the element for threshold reduction is Al, Ti or Ta when the MISFET is a p-channel MISFET.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: March 4, 2014
    Assignee: Renesas Electronics Corporation
    Inventor: Jiro Yugami
  • Patent number: 8664699
    Abstract: The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: March 4, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Ralph G. Nuzzo, John A. Rogers, Etienne Menard, Keon Jae Lee, Dahl-Young Khang, Yugang Sun, Matthew Meitl, Zhengtao Zhu
  • Patent number: 8664074
    Abstract: A MOS transistor has a first stress layer formed over a silicon substrate on a first side of a channel region defined by a gate electrode, and a second stress layer formed over the silicon substrate on a second side of the channel region, the first and second stress layers accumulating a tensile stress or a compressive stress depending on a conductivity type of the MOS transistor. The first stress layer has a first extending part rising upward from the silicon substrate near the channel region along a first sidewall of the gate electrode but separated from the first sidewall of the gate electrode, and the second stress layer has a second extending part rising upward from the silicon substrate near the channel region along a second sidewall of the gate electrode but separated from the second sidewall of the gate electrode.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: March 4, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Sergey Pidin
  • Patent number: 8658485
    Abstract: There is provided a semiconductor device and a method of fabricating the same. The method of fabricating a semiconductor device according to the present invention comprises: forming a transistor structure including a gate, and source and drain regions on a semiconductor substrate; carrying out a first silicidation to form a first metal silicide layer on the source and drain regions; depositing a first dielectric layer on the substrate, the top of the first dielectric layer being flush with the top of the gate region; forming contact holes at the portions corresponding to the source and drain regions in the first dielectric layer; and carrying out a second silicidation to form a second metal silicide at the gate region and in the contact holes, wherein the first metal silicide layer is formed to prevent silicidation from occurring at the source and drain regions during the second silicidation.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: February 25, 2014
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Zhijiong Luo, Haizhou Yin, Huilong Zhu
  • Publication number: 20140042500
    Abstract: The disclosure relates to a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a cavity below the major surface; a strained material in the cavity, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; a Ge-containing dielectric layer over the strained material; and a metal layer over the Ge-containing dielectric layer.
    Type: Application
    Filed: August 9, 2012
    Publication date: February 13, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Clement Hsingjen Wann, Ling-Yen Yeh, Chi-Yuan Shih, Yen-Yu Chen
  • Publication number: 20140035010
    Abstract: A method for fabricating an integrated circuit includes forming a temporary gate structure on a semiconductor substrate. The temporary gate structure includes a temporary gate material disposed between two spacer structures. The method further includes forming a first directional silicon nitride liner overlying the temporary gate structure and the semiconductor substrate, etching the first directional silicon nitride liner overlying the temporary gate structure and the temporary gate material to form a trench between the spacer structures, while leaving the directional silicon nitride liner overlying the semiconductor substrate in place, and forming a replacement metal gate structure in the trench.
    Type: Application
    Filed: July 31, 2012
    Publication date: February 6, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Xiuyu Cai, Ruilong Xie, Kangguo Cheng, Ali Khakifirooz
  • Publication number: 20140035000
    Abstract: Carbon-doped semiconductor material portions are formed on a subset of surfaces of underlying semiconductor surfaces contiguously connected to a channel of a field effect transistor. Carbon-doped semiconductor material portions can be formed by selective epitaxy of a carbon-containing semiconductor material layer or by shallow implantation of carbon atoms into surface portions of the underlying semiconductor surfaces. The carbon-doped semiconductor material portions can be deposited as layers and subsequently patterned by etching, or can be formed after formation of disposable masking spacers. Raised source and drain regions are formed on the carbon-doped semiconductor material portions and on physically exposed surfaces of the underlying semiconductor surfaces.
    Type: Application
    Filed: August 2, 2012
    Publication date: February 6, 2014
    Applicant: International Business Machines Corporation
    Inventors: Viorel Ontalus, Pranita Kulkarni, Donald R. Wall, Zhengmao Zhu
  • Patent number: 8643111
    Abstract: An electrostatic discharge (ESD) protection device is provided. The ESD protection device includes an epitaxy layer disposed on a semiconductor substrate. An isolation pattern is disposed on the epitaxy layer to define a first active region and a second active region, which are surrounded by a first well region. A gate is disposed on the isolation pattern. A first doped region and a second doped region are disposed in the first active region and the second active region, respectively. A drain doped region is disposed in the first doped region. A source doped region and a first pick-up doped region are disposed in the second doped region. A source contact plug having an extended portion connects to the source doped region. A ratio of an area of the extended portion covering the first pick-up doped region to an area of first pick-up doped region is between zero and one.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: February 4, 2014
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Yeh-Ning Jou
  • Patent number: 8643123
    Abstract: A semiconductor device comprises a semiconductor substrate and a select gate structure over a first portion of the semiconductor substrate. The select gate structure comprises a sidewall forming a corner with a second portion of the semiconductor substrate and a charge storage stack over an area comprising the second portion of the semiconductor substrate, the sidewall, and the corner. A corner portion of a top surface of the charge storage stack is non-conformal with the corner, and the corner portion of the top surface of the charge storage stack has a radius of curvature measuring approximately one-third of a thickness of the charge storage stack over the second portion of the substrate or greater. A control gate layer is formed over the charge storage stack. A portion of the control gate layer conforms to the corner portion of the top surface of the charge storage stack.
    Type: Grant
    Filed: April 13, 2011
    Date of Patent: February 4, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Cheong M. Hong, Brian A. Winstead
  • Patent number: 8637941
    Abstract: A dielectric liner is formed on sidewalls of a gate stack and a lower contact-level dielectric material layer is deposited on the dielectric liner and planarized. The dielectric liner is recessed relative to the top surface of the lower contact-level dielectric material layer and the top surface of the gate stack. A dielectric metal oxide layer is deposited and planarized to form a dielectric metal oxide spacer that surrounds an upper portion of the gate stack. The dielectric metal oxide layer has a top surface that is coplanar with a top surface of the planarized lower contact-level dielectric material layer. Optionally, the conductive material in the gate stack may be replaced. After deposition of at least one upper contact-level dielectric material layer, at least one via hole extending to a semiconductor substrate is formed employing the dielectric metal oxide spacer as a self-aligning structure.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: January 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ying Li, Henry K. Utomo
  • Publication number: 20140021517
    Abstract: A semiconductor device and a method for fabricating the semiconductor device are disclosed. An isolation structure is formed in a substrate and a gate stack is formed atop the isolation structure. A spacer is formed adjoining a sidewall of the gate stack and extends beyond an edge of the isolation structure. The disclosed method provides an improved method for protecting the isolation structure by using the spacer. The spacer can prevent the isolation structure from being damaged by chemicals, therefor, to enhance contact landing and upgrade the device performance.
    Type: Application
    Filed: July 17, 2012
    Publication date: January 23, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Fai Cheng, Han-Ting Tsai, An-Shen Chang, Hui-Min Lin
  • Publication number: 20140015104
    Abstract: An embodiment is a method comprising diffusing carbon through a surface of a substrate, implanting carbon through the surface of the substrate, and annealing the substrate after the diffusing the carbon and implanting the carbon through the surface of the substrate. The substrate comprises a first gate, a gate spacer, an etch stop layer, and an inter-layer dielectric. The first gate is over a semiconductor substrate. The gate spacer is along a sidewall of the first gate. The etch stop layer is on a surface of the gate spacer and over a surface of the semiconductor substrate. The inter-layer dielectric is over the etch stop layer. The surface of the substrate comprises a surface of the inter-layer dielectric.
    Type: Application
    Filed: July 13, 2012
    Publication date: January 16, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Chen Su, Huang-Ming Chen, Chun-Feng Nieh, Pei-Chao Su
  • Patent number: 8629480
    Abstract: A hetero-junction tunneling transistor having a first layer of p++ silicon germanium which forms a source for the transistor at one end. A second layer of n+ silicon material is deposited so that a portion of the second layer overlies the first layer and forms the drain for the transistor. An insulating layer and metallic gate for the transistor is deposited on top of the second layer so that the gate is aligned with the overlying portions of the first and second layers. The gate voltage controls the conduction between the source and the drain and the conduction between the first and second layers occurs by vertical tunneling between the layers.
    Type: Grant
    Filed: May 24, 2012
    Date of Patent: January 14, 2014
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Osama M. Nayfeh, Madan Dubey
  • Publication number: 20140008726
    Abstract: A semiconductor structure fabricating method includes the following steps. Firstly, a silicon substrate is provided. The silicon substrate has a first surface and a second surface. In addition, a first semiconductor structure is formed on the first surface of the silicon substrate. Then, the second surface of the silicon substrate is textured as a rough surface. Then, a first electrode layer is formed on the rough surface.
    Type: Application
    Filed: July 4, 2012
    Publication date: January 9, 2014
    Inventors: Yu-Jen HSIAO, Ting-Jen HSUEH, Jia-Min SHIEH, Yu-Ming YEH, Chee-Wee LIU, Bau-Tong DAI, Fu-Liang YANG
  • Publication number: 20140001552
    Abstract: A drift layer of a super junction semiconductor device includes first portions of a first conductivity type and second portions of a second conductivity type opposite to the first conductivity type. The first and second portions are formed both in a cell area and in an edge area surrounding the cell area, wherein an on-state or forward current through the drift layer flows through the first portions in the cell area. At least one of the first and second portions other than the first portions in the cell area includes an auxiliary structure or contains auxiliary impurities to locally reduce the avalanche rate. Locally reducing the avalanche rate increases the total voltage blocking capability of the super junction semiconductor device.
    Type: Application
    Filed: July 2, 2012
    Publication date: January 2, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Franz Hirler, Hans Weber, Hans-Joachim Schulze, Uwe Wahl
  • Publication number: 20140001557
    Abstract: Transistor devices which include semiconductor layers with integrated hole collector regions are described. The hole collector regions are configured to collect holes generated in the transistor device during operation and transport them away from the active regions of the device. The hole collector regions can be electrically connected or coupled to the source, the drain, or a field plate of the device. The hole collector regions can be doped, for example p-type or nominally p-type, and can be capable of conducting holes but not electrons.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 2, 2014
    Applicant: TRANSPHORM INC.
    Inventors: Umesh Mishra, Srabanti Chowdhury, Ilan Ben-Yaacov
  • Publication number: 20140001547
    Abstract: A semiconductor device includes a doped layer which contains a first dopant of a first conductivity type. In the doped layer, a counter-doped zone is formed in an edge area that surrounds an element area of the semiconductor device. The counter-doped zone contains at least the first dopant and a second dopant of a second conductivity type, which is the opposite of the first conductivity type. A concentration of the second dopant is at least 20% and at most 100% of a concentration of the first dopant. The dopants in the counter-doped zone decrease charge carrier mobility and minority carrier lifetime such that the dynamic robustness of the semiconductor device is increased.
    Type: Application
    Filed: July 2, 2012
    Publication date: January 2, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Hans-Joachim Schulze, Anton Mauder, Franz Hirler
  • Publication number: 20130341685
    Abstract: A manufacturing method for a semiconductor device includes providing a substrate having at least a gate structure formed thereon and a first spacer formed on sidewalls of the gate structure, performing an ion implantation to implant dopants into the substrate, forming a disposal spacer having at least a carbon-containing layer on the sidewalls of the gate structure, the carbon-containing layer contacting the first spacer, and performing a thermal treatment to form a protecting layer between the carbon-containing layer and the first spacer.
    Type: Application
    Filed: June 20, 2012
    Publication date: December 26, 2013
    Inventors: Ling-Chun Chou, I-Chang Wang, Ching-Wen Hung
  • Publication number: 20130341638
    Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from bottom to top. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.
    Type: Application
    Filed: June 22, 2012
    Publication date: December 26, 2013
    Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
  • Patent number: 8614466
    Abstract: An apparatus and method are disclosed for electrically directly detecting biomolecular binding in a semiconductor. The semiconductor can be based on electrical percolation of nanomaterial formed in the gate region. In one embodiment of an apparatus, a semiconductor includes first and second electrodes with a gate region there between. The gate region includes a multilayered matrix of electrically conductive material with capture molecules for binding target molecules, such as antibody, receptors, DNA, RNA, peptides and aptamer. The molecular interactions between the capture molecules and the target molecules disrupts the matrix's continuity resulting in a change in electrical resistance, capacitance or impedance. The increase in resistance, capacitance or impedance can be directly measured electronically, without the need for optical sensors or labels.
    Type: Grant
    Filed: November 18, 2009
    Date of Patent: December 24, 2013
    Assignees: The United States of America, as Represented by the Secretary, Department of Health and Human Services, University of Maryland, Baltimore County, University of Maryland, College Park
    Inventors: Avraham Rasooly, Minghui Yang, Hugh A. Bruck, Yordan Kostov
  • Publication number: 20130334602
    Abstract: Arbitrarily and continuously scalable on-currents can be provided for fin field effect transistors by providing two independent variables for physical dimensions for semiconductor fins that are employed for the fin field effect transistors. A recessed region is formed on a semiconductor layer over a buried insulator layer. A dielectric cap layer is formed over the semiconductor layer. Disposable mandrel structures are formed over the dielectric cap layer and spacer structures are formed around the disposable mandrel structures. Selected spacer structures can be structurally damaged during a masked ion implantation. An etch is employed to remove structurally damaged spacer structures at a greater etch rate than undamaged spacer structures. After removal of the disposable mandrel structures, the semiconductor layer is patterned into a plurality of semiconductor fins having different heights and/or different width. Fin field effect transistors having different widths and/or heights can be subsequently formed.
    Type: Application
    Filed: June 14, 2012
    Publication date: December 19, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Yang Liu, Chengwen Pei, Yue Tan
  • Patent number: 8604512
    Abstract: A bidirectional switch includes a semiconductor element and a substrate potential stabilizer. The semiconductor element includes a first ohmic electrode and a second ohmic electrode, and a first gate electrode and a second gate electrode, which are sequentially formed on the first ohmic electrode between the first ohmic electrode and the second ohmic electrode. The substrate potential stabilizer sets a potential of the substrate lower than higher one of a potential of the first ohmic electrode or a potential of the second ohmic electrode.
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: December 10, 2013
    Assignee: Panasonic Corporation
    Inventor: Tatsuo Morita
  • Patent number: 8604550
    Abstract: A semiconductor device includes a semiconductor substrate having at least two oblique side surfaces and a first bottom surface in a recessed portion. A gate insulating layer is formed on the recessed portion. A gate electrode is formed on the gate insulating layer. A channel region is formed below the gate electrode. Gate spacers are formed on side surfaces of the gate electrode.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: December 10, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kwang-Wook Lee, Jae-Jik Baek, In-Seak Hwang, Seok-Woo Nam
  • Patent number: 8603872
    Abstract: The field effect device comprises a sacrificial gate electrode having side walls covered by lateral spacers formed on a semiconductor material film. The source/drain electrodes are formed in the semiconductor material film and are arranged on each side of the gate electrode. A diffusion barrier element is implanted through the void left by the sacrificial gate so as to form a modified diffusion area underneath the lateral spacers. The modified diffusion area is an area where the mobility of the doping impurities is reduced compared with the source/drain electrodes.
    Type: Grant
    Filed: January 24, 2012
    Date of Patent: December 10, 2013
    Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
    Inventors: Laurent Grenouillet, Yannick Le Tiec, Nicolas Posseme, Maud Vinet
  • Publication number: 20130320429
    Abstract: Methods of depositing epitaxial material using a repeated deposition and etch process. The deposition and etch processes can be repeated until a desired thickness of silicon-containing material is achieved. During the deposition process, a doped silicon film can be deposited. The doped silicon film can be selectively deposited in a trench on a substrate. The trench can have a liner comprising silicon and carbon prior to depositing the doped silicon film. The doped silicon film may also contain germanium. Germanium can promote uniform dopant distribution within the doped silicon film.
    Type: Application
    Filed: May 31, 2012
    Publication date: December 5, 2013
    Applicant: ASM IP HOLDING B.V.
    Inventor: Shawn Thomas
  • Patent number: 8598668
    Abstract: A standard cell has gate patterns extending in Y direction and arranged at an equal pitch in X direction. End portions of the gate patterns are located at the same position in Y direction, and have an equal width in X direction. A diode cell is located next to the standard cell in Y direction, and includes a plurality of opposite end portions formed of gate patterns that are opposed to the end portions, in addition to a diffusion layer which functions as a diode.
    Type: Grant
    Filed: February 14, 2013
    Date of Patent: December 3, 2013
    Assignee: Panasonic Corporation
    Inventors: Tomoaki Ikegami, Kazuyuki Nakanishi, Masaki Tamaru
  • Patent number: 8592799
    Abstract: A graphene electronic device and a method of fabricating the graphene electronic device are provided. The graphene electronic device may include a graphene channel layer formed on a hydrophobic polymer layer, and a passivation layer formed on the graphene channel layer. The hydrophobic polymer layer may prevent or reduce adsorption of impurities to transferred graphene, and a passivation layer may also prevent or reduce adsorption of impurities to a heat-treated graphene channel layer.
    Type: Grant
    Filed: May 19, 2011
    Date of Patent: November 26, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hee-jun Yang, Sun-ae Seo, Sung-hoon Lee, Hyun-jong Chung, Jin-seong Heo
  • Publication number: 20130307031
    Abstract: According to an embodiment, a semiconductor structure includes a first monocrystalline semiconductor portion having a first lattice constant in a reference direction; a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion; and a metal layer formed on and in contact with the second monocrystalline semiconductor portion.
    Type: Application
    Filed: May 16, 2012
    Publication date: November 21, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Mathias Plappert, Hans-Joachim Schulze
  • Patent number: 8587039
    Abstract: A semiconductor device is formed in a semiconductor layer. A gate stack is formed over the semiconductor layer and comprises a first conductive layer and a second layer over the first layer. The first layer is more conductive and provides more stopping power to an implant than the second layer. A species is implanted into the second layer. Source/drain regions are formed in the semiconductor layer on opposing sides of the gate stack. The gate stack is heated after the step of implanting to cause the gate stack to exert stress in the semiconductor layer in a region under the gate stack.
    Type: Grant
    Filed: May 20, 2011
    Date of Patent: November 19, 2013
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Brian A. Winstead, Konstantin V. Loiko, Voon-Yew Thean
  • Patent number: 8586427
    Abstract: A thin film transistor includes a layer structure having a gate electrode, a gate insulation layer and a channel layer. A source line may contact the channel layer, and may extend along a direction crossing over the gate electrode. The source line may partially overlap the gate electrode so that both sides of the source line overlapping the gate electrode may be entirely positioned between both sides of the gate electrode. A drain line may make contact with the channel layer and may be spaced apart from the source line by a channel length. The drain line may have a structure symmetrical to that of the source line. Overlap areas among the gate electrode, the source line and the drain line may be reduced, so that the thin film transistor may ensure a high cut-off frequency.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: November 19, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-Hun Jeon, Moon-Sook Lee, Byeong-Ok Cho
  • Publication number: 20130299782
    Abstract: Graphene transistor devices and methods of their fabrication are disclosed. One such graphene transistor device includes source and drain electrodes and a gate structure including a dielectric sidewall spacer that is disposed between the source and drain electrodes. The device further includes a graphene layer that is adjacent to at least one of the source and drain electrodes, where an interface between the source/drain electrode(s) and the graphene layer maintains a consistent degree of electrical conductivity throughout the interface.
    Type: Application
    Filed: June 8, 2012
    Publication date: November 14, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: ALI AFZALI-ARDAKANI, PHAEDON AVOURIS, DAMON B. FARMER, YU-MING LIN, YU ZHU
  • Publication number: 20130299884
    Abstract: A memory device includes a substrate, first and second trench isolations, a plurality of line-type isolations, a first word line, and a second word line. The substrate comprises an active area having source and drain regions. The first and second trench isolations extend parallel to each other. The line-type isolations define the active area together with the first and second trench isolations. The first word line extends across the active area and is formed in the substrate adjacent to the first trench isolation defining a first segment of the active area with the first trench isolation. The second word line extends across the active area and is formed in the substrate adjacent to the second trench isolation defining a second segment of the active area with the second trench isolation. The size of the first segment is substantially equal to the size of the second segment.
    Type: Application
    Filed: May 10, 2012
    Publication date: November 14, 2013
    Applicant: Nanya Technology Corporation
    Inventors: Shian Jyh Lin, Jen Jui Huang
  • Publication number: 20130292701
    Abstract: Techniques for fabricating a field effect transistor (FET) device having a doped core and an undoped or counter-doped epitaxial shell are provided. In one aspect, a method of fabricating a FET device is provided. The method includes the following steps. A wafer is provided having a semiconductor material selected from the group consisting of silicon, silicon germanium and silicon carbon. At least one fin core is formed in the wafer. Ion implantation is used to dope the fin core. Corners of the fin core are reshaped to make the corners rounded or faceted. An epitaxial shell is grown surrounding the fin core, wherein the epitaxial shell includes a semiconductor material selected from the group consisting of silicon, silicon germanium and silicon carbon.
    Type: Application
    Filed: May 2, 2012
    Publication date: November 7, 2013
    Applicant: International Business Machines Corporation
    Inventors: Sarunya Bangsaruntip, Siyuranga O. Koswatta, Chung-Hsun Lin, Jeffrey W. Sleight
  • Publication number: 20130292744
    Abstract: An integrated circuit includes a first replacement gate structure. The first replacement gate structure includes a layer of a first barrier material that is less than 20 ? in thickness and a layer of a p-type workfunction material. The replacement gate structure is less than about 50 nm in width.
    Type: Application
    Filed: May 2, 2012
    Publication date: November 7, 2013
    Inventors: Hoon Kim, Kisik Choi
  • Patent number: 8575672
    Abstract: A nonvolatile semiconductor memory device includes a plurality of pillars protruding upward from a semiconductor substrate and having respective top surfaces and opposing sidewalls, a bit line on the top surfaces of the pillars and connecting a row of the pillars along a first direction, a pair of word lines on the opposing sidewalls of one of the plurality of pillars and crossing beneath the bit line, and a pair of memory layers interposed between respective ones of the pair of word lines and the one of the plurality of pillars. Methods of fabricating a nonvolatile semiconductor memory device include selectively etching a semiconductor substrate to form pluralities of stripes having opposing sidewalls and being arranged along a direction, forming memory layers and word lines along the sidewalls of the stripes selectively etching the stripes to form a plurality of pillars, and forming a bit line connecting the pillars and crossing above the word lines.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: November 5, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ki-whan Song, Byung-Gook Park
  • Patent number: 8575656
    Abstract: According to one embodiment, a semiconductor device having a semiconductor substrate, first to fourth semiconductor layers of nitride, first to third electrodes and a gate electrode is provided. The first semiconductor layer is provided directly on the semiconductor substrate or on the same via a buffer layer. The second semiconductor layer is provided so as to be spaced apart from the first semiconductor layer. The third semiconductor layer is provided on the second semiconductor layer and has a band gap wider than that of the second semiconductor layer. The fourth semiconductor layer insulates the first and second semiconductor layers. The first electrode forms an ohmic junction with the first to the third semiconductor layers. The second electrode is provided on the third semiconductor layer. The gate electrode is provided between the first and the second electrodes. The third electrode forms a Schottky junction with the first semiconductor layer.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: November 5, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Akira Yoshioka, Yasunobu Saito, Wataru Saito
  • Patent number: 8569741
    Abstract: Methods for fabricating passivated silicon nanowires and an electronic arrangement thus obtained are described. Such arrangements may comprise a metal-oxide-semiconductor (MOS) structure such that the arrangements may be utilized for MOS field-effect transistors (MOSFETs) or opto-electronic switches.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: October 29, 2013
    Assignee: California Institute of Technology
    Inventors: Axel Scherer, Sameer Walavalkar, Michael D. Henry, Andrew P. Homyk
  • Patent number: 8569124
    Abstract: A compound semiconductor device includes a substrate; a compound semiconductor layer formed on the substrate; a first insulating film formed on the compound semiconductor layer; a second insulating film formed on the first insulating film; and a gate electrode, a source electrode, and a drain electrode, each being formed on the compound semiconductor layer, wherein the gate electrode is formed of a first opening filled with a first conductive material via at least a gate insulator, and the first opening is formed in the first insulating film and configured to partially expose the compound semiconductor layer, and wherein the source electrode and the drain electrode are formed of a pair of second openings filled with at least a second conductive material, and the second openings are formed in at least the second insulating film and the first insulating film and configured to partially expose the compound semiconductor layer.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: October 29, 2013
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Shinichi Akiyama, Kenji Nukui, Mutsumi Katou, Yoshitaka Watanabe, Tetsuya Itou, Yoichi Fujisawa, Toshiya Sato, Tsutomu Hosoda, Yuuichi Satou
  • Publication number: 20130277746
    Abstract: Methods for forming integrated circuits and integrated circuits are disclosed. The integrated circuits comprise gate structures overlying and transverse to one or more fins that are delineated by trenches formed in a semiconductor substrate. Protruding portions are formed in the trenches in between the gate electrode structure on exposed sidewall surfaces of the one or more fins. The trenches are filled with an insulating material between the protruding portions and the gate structures.
    Type: Application
    Filed: April 24, 2012
    Publication date: October 24, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Tim Baldauf, Tom Herrmann, Stefan Flachowsky, Ralf Illgen
  • Publication number: 20130277765
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a substrate; and a gate structure disposed directly on the substrate, the gate structure including: a graded region with a varied material concentration profile; and a metal layer disposed on the graded region.
    Type: Application
    Filed: April 23, 2012
    Publication date: October 24, 2013
    Applicants: GLOBALFOUNDRIES INC., INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael P. Chudzik, Min Dai, Jinping Liu, Joseph F. Shepard, JR., Keith Kwong Hon Wong
  • Publication number: 20130277686
    Abstract: A metal gate process comprises the steps of providing a substrate, forming a dummy gate on said substrate, forming dummy spacers on at least one of the surrounding sidewalls of said dummy gate, forming a source and a drain respectively in said substrate at both sides of said dummy gate, performing a replacement metal gate process to replace said dummy gate with a metal gate, removing said dummy spacers, and forming low-K spacers to replace said dummy spacers.
    Type: Application
    Filed: April 23, 2012
    Publication date: October 24, 2013
    Inventors: An-Chi Liu, Chun-Hsien Lin
  • Patent number: 8564102
    Abstract: A semiconductor device and a method of fabricating a semiconductor device. The semiconductor device includes an interlayer insulation layer pattern, a metal wire pattern exposed by a passage formed by a via hole formed in the interlayer insulation layer pattern to input and output an electrical signal, and a plated layer pattern directly contacting the metal wire pattern and filling the via hole. The method includes forming an interlayer insulation layer having a metal wire pattern to input and output an electrical signal formed therein, forming a via hole to define a passage that extends through the interlayer insulation layer until at least a part of the metal wire pattern is exposed, and forming a plated layer pattern to fill the via hole and to directly contact the metal wire pattern by using the metal wire pattern exposed through the via hole as a seed metal layer.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: October 22, 2013
    Assignee: SAMSUNG Electronics Co., Ltd.
    Inventors: Ju-il Choi, Jae-hyun Phee, Kyu-ha Lee, Ho-jin Lee, Son-kwan Hwang
  • Publication number: 20130270613
    Abstract: A method of trimming spacers includes etching a silicon oxide spacer when forming an outmost spacer, so that a silicon carbon nitride spacer contacting the gate electrode exposes an area. The exposure area of the silicon carbon nitride spacer can then be partly removed by phosphate acid. At the end of the semiconductor process, at least part of the top surface of the silicon carbon nitride spacer will be lower than the top surface of a gate electrode.
    Type: Application
    Filed: April 16, 2012
    Publication date: October 17, 2013
    Inventors: Shyan-Liang Chou, Tsung-Min Kuo, Po-Wen Su, Chun-Mao Chiou, Feng-Mou Chen
  • Publication number: 20130270611
    Abstract: A semiconductor structure including a semiconductor wafer. The semiconductor wafer includes a gate structure, a first trench in the semiconductor wafer adjacent to a first side of the gate structure and a second trench adjacent to a second side of the gate structure, the first and second trenches filled with a doped epitaxial silicon to form a source in the filled first trench and a drain in the filled second trench such that each of the source and drain are recessed and have an inverted facet. In a preferred exemplary embodiment, the epitaxial silicon is doped with boron.
    Type: Application
    Filed: April 13, 2012
    Publication date: October 17, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Thomas N. Adam, Kangguo Cheng, Ali Khakifirooz, Jinghong Li, Alexander Reznicek