Abstract: The present invention discloses a ferroelectric transistor having a conductive oxide in the place of the gate dielectric. The conductive oxide gate ferroelectric transistor can have a three-layer metal/ferroelectric/metal or a two-layer metal/ferroelectric on top of the conductive oxide gate. By replacing the gate dielectric with a conductive oxide, the bottom gate of the ferroelectric layer is conductive through the conductive oxide to the silicon substrate, thus minimizing the floating gate effect. The memory retention degradation related to the leakage current associated with the charges trapped within the floating gate is eliminated. The fabrication of the ferroelectric transistor by a gate etching process or a replacement gate process is also disclosed.

Abstract: A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each of the devices is extremely compact, both laterally and vertically, and can be fully isolated from all other devices in the substrate.

Abstract: A control electrode is provided via an insulating film on one main surface of a semiconductor substrate having a first conductivity type. A pair of dopant diffusion regions are formed, with the control electrode therebetween, in a surface layer region of the semiconductor substrate. Resistance variation sections are formed in the surface layer region of the semiconductor substrate between the control electrode and the dopant diffusion regions. The resistance variation sections are of the second conductivity type and have a dopant concentration lower than that of the dopant diffusion regions. First and second main electrodes are provided on the dopant diffusion regions of the semiconductor substrate. A first charge storage section is provided between the first main electrode and control electrode on the semiconductor substrate. A second charge storage section is provided between the second main electrode and control electrode on the semiconductor substrate.

Abstract: A lateral field effect transistor for high switching frequencies having a source region layer (4) and a drain region layer (5) laterally spaced and of highly doped first conductivity type, a first-conductivity-type channel layer (6) of lower doping concentration extending laterally and interconnecting the source region layer (4) and the drain region layer (5). The transistor has a gate electrode (7) arranged to control the properties of the channel layer (6), and a highly doped second-conductivity-type base layer (8) arranged under the channel layer (6) at least partially overlapping the gate electrode (7) and at a lateral distance to the drain region layer (5), the highly doped second-conductivity-type base layer (8) being shorted to the source region layer (4).

Abstract: A method for fabricating a semiconductor structure is described. A substrate is provided, having thereon a gate structure and a spacer on the sidewall of the gate structure and having therein an S/D extension region beside the gate structure. An opening is formed in the substrate beside the spacer, and then an S/D region is formed in or on the substrate at the bottom of the opening. A metal silicide layer is formed on the S/D region and the gate structure, and then a stress layer is formed over the substrate.

Abstract: A present invention is a method, and resulting device, for fabricating memory cells with an extremely small area and reduced standby current. The small area is accomplished by a judicious use of spacers which allows a tunnel window of a storage device to be fabricated in close proximity to an associated select gate and with a reduced gate width compared to typical devices. The tunnel window is recessed within an upper surface of a substrate. The tunnel window recess is made possible by selective etching of the substrate and oxides covering the substrate. A substantial reduction in the size of a tunnel window means device scaling is possible far beyond what is attainable with standard photolithography. Standby current is reduced significantly by fabricating a select device with complementary material types for the gate compared with the adjacent source/drain regions.

Abstract: The memory device includes a source region and a drain region in a substrate and spaced apart from each other; a memory cell formed on a surface of the substrate, wherein the memory cell connects the source region and the drain region and includes a plurality of nanocrystals; a control gate formed on the memory cell. The memory cell includes a first tunneling oxide layer formed on the substrate; a second tunneling oxide layer formed on the first tunneling oxide layer; and a control oxide layer formed on the second tunneling oxide layer. The control oxide layer includes the nanocrystals. The second tunneling oxide layer, having an aminosilane group the increases electrostatic attraction, may be hydrophilic, enabling the formation of a monolayer of the nanocrystals.

Abstract: A semiconductor device is provided with a first MISFET including a first gate insulating film including a HfAlO film formed over a semiconductor substrate and a first gate electrode, including a nickel silicide film, formed over the first gate insulating film. An aluminum concentration of the HfAlO film on a side of the HfAlO film facing the first gate electrode is higher than an aluminum concentration of the HfAlO film on a side of the HfAlO film facing the semiconductor substrate.

Abstract: An improvement in the method of fabricating on chip decoupling capacitors which help prevent L di/dt voltage droop on the power grid for high surge current conditions is disclosed. The inclusion of a hybrid metal/metal nitride top electrode/barrier provides for a low cost and higher performance option to strapping decoupling capacitors.

Abstract: Thresholds of MISFETS of a Full Depletion-type SOI substrate cannot be controlled by changing impurity density as with bulk silicon MISFETs. Therefore, it is difficult to set a suitable threshold for each circuit. According to the semiconductor device of the present invention, gate electrodes of P-channel type MISFETs composing a memory cell are made of N-type polysilicon, gate electrodes of N-channel type MISFETs are made of P-type polysilicon and gate electrodes of P-channel type and N-channel type MISFETs of peripheral circuits and a logic circuit are made of P-type silicon germanium. A suitable threshold can be achieved for each circuit using a SOI substrate, thereby making it possible to fully leverage the characteristics of the SOI substrate.

Abstract: An integrated circuit is provided comprising a latch circuit including, a first inverter including a first high threshold voltage PMOS transistor and a first high threshold voltage NMOS transistor with a first data node comprising interconnected source/drains (S/D) of the first PMOS and NMOS transistors; a second inverter including a second high threshold voltage PMOS transistor and a second high threshold voltage NMOS transistor with a second data node comprising interconnected source/drains (S/D) of the second PMOS and NMOS transistors; wherein the gates of the first PMOS and first NMOS transistors are coupled to the second data node; wherein the gates of the second PMOS and second NMOS transistors are coupled to the first data node; a first low threshold voltage access transistor including a first S/D coupled to the first data node and to the gate of the second PMOS transistor and to the gate of the second NMOS transistor and including a second S/D coupled to a first data access node and including a gate c

Abstract: A semiconductor technique is provided which can achieve both of lowered resistance in a logic formation region and reduced leakage current of the capacitor of a memory device. Source/drain regions (4) are formed in the upper surface of a semiconductor substrate (1) in a memory formation region and cobalt silicide films (9) are formed in the upper surfaces of the source/drain regions (4). Source/drain regions (54) are formed in the upper surface of the semiconductor substrate (1) in a logic formation region and cobalt silicide films (59) are formed in the upper surfaces of the source/drain regions (54). The cobalt silicide films (59) in the logic formation region are thicker than the cobalt silicide films (9) in the memory formation region.