Target profile for a physical vapor deposition chamber target

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target;

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a right elevation view thereof.

FIG. 7 is a left elevation view thereof.

FIG. 8 is an enlarged partial front elevation view showing portions of the design in greater detail.

FIG. 9 is a top perspective view of a sputtering target for a physical vapor deposition chamber, according to another embodiment of the novel design.

FIG. 10 is a top plan view thereof.

FIG. 11 is a bottom plan view thereof.

FIG. 12 is a front elevation view thereof.

FIG. 13 is a back elevation view thereof.

FIG. 14 is a right elevation view thereof.

FIG. 15 is a left elevation view thereof; and,

FIG. 16 is an enlarged partial front elevation view showing portions of the design in greater detail.

The broken lines shown in the drawings depict portions of the target profile for a physical vapor deposition chamber target that form no part of the claimed design. The dot-dash lines encircling portions of the target profile for a physical vapor deposition chamber target in FIGS. 4 and 8 indicate enlargements and form no part of the claimed design.

Claims

The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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Patent History
Patent number: D1072774
Type: Grant
Filed: Feb 6, 2021
Date of Patent: Apr 29, 2025
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Shane Lavan (Santa Clara, CA), Madan Kumar Shimoga Mylarappa (Bengaluru), Sundarapandian Ramalinga Vijayalakshmi Reddy (Bangalore), Avinash Nayak (Bangalore), Wei Dou (Sunnyvale, CA), Yong Cao (San Jose, CA), Kirankumar Neelasandra Savandaiah (Bangalore), Mingdong Li (Santa Clara, CA)
Primary Examiner: Mark A Goodwin
Assistant Examiner: Noah Perez
Application Number: 29/769,610