Abstract: A composition for an oxide semiconductor thin film, a field effect transistor (FET) using the composition, and a method of fabricating the FET are provided. The composition includes an aluminum oxide, a zinc oxide, and a tin oxide. The thin film formed of the composition remains in amorphous phase at a temperature of 400° C or less. The FET using an active layer formed of the composition has improved electrical characteristics and can be fabricated using a low-temperature process without expensive raw materials, such as In and Ga.

Abstract: A semiconductor device includes a fin field effect transistor configured to include at least a first fin and a second fin. Threshold voltage of the first fin and threshold voltage of the second fin are different from each other in the fin field effect transistor.

Abstract: A semiconductor device includes a semiconductor substrate that includes a substrate layer having a first composition of semiconductor material. A source region, drain region, and a channel region are formed in the substrate, with the drain region spaced apart from the source region and the gate region abutting the channel region. The channel region includes a channel layer having a second composition of semiconductor material. Additionally, the substrate layer abuts the channel layer and applies a stress to the channel region along a boundary between the substrate layer and the channel layer.

Abstract: Provided are a method of doping a carbon nanotube (CNT) of a field effect transistor and a method of controlling the position of doping ions. The method may include providing a source, a drain, the CNT as a channel between the source and the drain, and a gate, applying a first voltage to the gate, and adsorbing ions on a surface of the CNT.

Abstract: Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. The structure includes a gate stack comprising an oxide layer, a polysilicon layer and sidewalls with adjacent spacers. The structure further includes an epitaxially grown straining material directly on the polysilicon layer and between portions of the sidewalls. The epitaxially grown straining material, in a relaxed state, strains the polysilicon layer.

Abstract: A method of manufacturing a semiconductor device includes the following processes. Multiple bit lines including a first silicide layer and/or a first polysilicon layer are formed. Then, multiple through holes are formed in the bit lines. Then, a first silicon layer is formed to fill the through holes. Then, a second silicon layer including a base and multiple bodies standing on the base is formed over the bit lines and the first silicon layer. Then, a gate insulating film and a gate electrode are formed to cover the bodies. Then, multiple first source-and-drain regions are formed under the respective bodies in the base. Then, multiple word lines connected to the gate electrode and including a second silicide layer and/or a second polysilicon layer are formed. Then, multiple second source-and-drain regions penetrating the word lines and connected to the respective bodies are formed.

Abstract: An isolation circuit, comprising a first transistor having a gate, a first source/drain terminal, and a second source/drain terminal, a first pad coupled to the gate of the first transistor, the first pad operable to receive an enable signal, a second pad coupled to the first source/drain of the first transistor, the second pad operable to receive a ground potential, a first fuse device coupling the second source/drain terminal to a node, a second fuse device coupling the node to the first pad, a third pad operable to receive a signal to be applied to at least one die, and a second transistor operable to selectively transfer the signal received at the third pad to the at least one die in response to a control signal provided by the node.

Abstract: A system and method for ion implantation during semiconductor fabrication. An integrated circuit may be designed with proximately located one-directional transistor gates. A two-way halo ion implantation is performed perpendicularly to the transistor gates in order to embed the dopant into the silicon body on the surface of the semiconductor wafer. The two-way halo both reduces the channeling effect by allowing ion implantation beneath the transistor gate, and reduces the halo shadowing effect resulting from halo implanting which is done parallel to the transistor gates.

Abstract: According to one aspect of the invention, a memory device is disclosed. The memory device comprises a substantially linear active area comprising a source and at least two drains defining a first axis. The memory device further comprises at least two substantially parallel word lines, at least a portion of a first word line located between a first drain and the source, and at least a portion of a second word line located between a second drain and the source, which word lines define a second axis. The memory device further comprises a digit line coupled to the source, wherein the digit line forms a substantially zig-zag pattern.

Abstract: A semiconductor device arrangement and a method. One embodiment includes at least one power transistor and at least one gate resistor located between a gate of the power transistor and a connecting point in the drive circuit of the power transistor. The semiconductor device arrangement includes a switchable element between the connecting point and a source of the power transistor.

Abstract: A method for manufacturing a semiconductor device having a metal silicide layer comprises forming a structure including a plurality of gate stacks formed on a semiconductor substrate, forming a gate spacer layer formed on an upper surface of the semiconductor substrate and around a sidewall of each gate stack, and forming an insulation layer between the gate stacks. The method further comprises forming a metal silicide layer on an exposed surface of the semiconductor substrate between the gate stacks.

Abstract: The semiconductor device includes the concentration of the impurity of the first conductivity type in a doped channel layer of a first conductivity type in the pass transistor is set at a relatively low value, and pocket regions of the first conductivity type in a pass transistor are formed so as to be relatively shallow with a relatively high impurity concentration.

Abstract: Disclosed is a fin transistor and a planar transistor and a method of forming the same. The fin transistor and the planar transistor are formed to have gate electrodes with similar thicknesses by selectively recessing a semiconductor substrate in a planar region where the planar transistor is formed.

Abstract: The present invention provides, in one embodiment, a method for fabricating a microelectronic device. The method comprises implanting a dopant into a gate electrode located on a substrate. The gate electrode has a melting point below a melting point of the substrate. The method also comprises melting the gate electrode to allow the dopant to diffuse throughout the gate electrode. The method further comprises re-solidifying the gate electrode to increase dopant-occupied substitutional sites within the gate electrode.

Abstract: A method (10) of forming a transistor (100) includes treating (12) at least some of a semiconductor substrate (102) with carbon and then forming (18) a gate structure (114) over the semiconductor substrate. A channel region (122) is thereby being defined within the semiconductor substrate (102) below the gate structure (114). Source and drain regions (140, 142) are then formed (26) within the semiconductor substrate (102) on opposing sides of the channel (122) with a phosphorus dopant.

Abstract: Disclosed is semiconductor structure that incorporates a field shield below a semiconductor device (e.g., a field effect transistor (FET) or a diode). The field shield is sandwiched between upper and lower isolation layers on a wafer. A local interconnect extends through the upper isolation layer and connects the field shield to a selected doped semiconductor region of the device (e.g., a source/drain region of a FET or a cathode or anode of a diode). Current that passes into the device, for example, during back-end of the line charging, is shunted by the local interconnect away from the upper isolation layer and down into the field shield. Consequently, an electric charge is not allowed to build up in the upper isolation layer but rather bleeds from the field shield into the lower isolation layer and into the substrate below.

Abstract: An electrical structure and method of forming. The electrical structure includes a semiconductor substrate comprising a deep trench, an oxide liner layer is formed over an exterior surface of the deep trench, and a field effect transistor (FET) formed within the semiconductor substrate. The first FET includes a source structure, a drain structure, and a gate structure. The gate structure includes a gate contact connected to a polysilicon fill structure. The polysilicon fill structure is formed over the oxide liner layer and within the deep trench. The polysilicon fill structure is configured to flow current laterally across the polysilicon fill structure such that the current will flow parallel to a top surface of the semiconductor substrate.

Abstract: A non-volatile memory transistor with a nanocrystal-containing floating gate formed by nanowires is disclosed. The nanocrystals are formed by the growth of short nanowires over a crystalline program oxide. As a result, the nanocrystals are single-crystals of uniform size and single-crystal orientation.

Abstract: An application-specific integrated circuit (ASIC) is customized using two non-adjacent via layers. An array of logic cells, each including a plurality of logic devices, are arranged in a plurality of non-customized base layers. A first routing grid, which includes a first non-customized metal routing layer, a customized via layer, and a second non-customized metal routing layer, is disposed on top of the plurality of non-customized layers. A second routing grid, which includes a third non-customized metal routing layer, another customized via layer, and a fourth non-customized metal routing layer, is disposed above the first routing grid. A non-customized via layer is disposed above the first routing grid and beneath the second routing grid. The routing grids and the non-customized via layer collectively facilitate routing connections to and from the logic cells.

Abstract: In one exemplary embodiment, a multi-chip connector is formed to have a first conductive strip that is attached to a first semiconductor die and a second conductive strip that is attached to a second semiconductor die.

Abstract: A method for manufacturing a gel electrolyte pattern is disclosed, the method comprising depositing an electrolyte precursor by inkjet printing onto a gelling agent layer. A gel electrolyte pattern is also disclosed, the gel electrolyte pattern comprising either a mixture of a gelling agent and an electrolyte precursor or the products of a chemical reaction between a gelling agent and an electrolyte precursor.

Abstract: Embodiments of the invention generally relate to semiconductor devices and more specifically to forming partially silicided and fully silicided structures. Fabricating the partially silicided and fully silicided structures may involve creating one or more gate stacks. A polysilicon layer of a first gate stack may be exposed and a first metal layer may be deposited thereon to create a partially silicided structure. Thereafter, a polysilicon layer of a second gate stack may be exposed and a second metal layer may be deposited thereon to form a fully silicided structure. In some embodiments, the polysilicon layers of one or more gate stacks may not be exposed, and resistors may be formed with the unsilicided polysilicon layers.

Abstract: Provided is a transistor of a semiconductor device and a method for fabricating the same. A transistor of a semiconductor device may include: a semiconductor substrate having an active region defined by an isolation layer; a recess trench formed in the active region and disposed to cross the semiconductor substrate in one direction; and a gate line formed in a straight line pattern, overlapping the recess trench and disposed to cross the recess trench at approximately right angles.

Abstract: Junction field effect transistors (JFETs) are shown to be a viable replacement for metal oxide semiconductor field effect transistors (MOSFETs) for gate lengths of less than about 40 nm, providing an alternative to the gate leakage problems presented by scaled down MOSFETs. Integrated circuit designs can have complementary JFET (CJFET) logic cells substituted for existing MOSFET-based logic cells to produce revised integrated circuit designs. Integrated circuits can include JFETS where the channel comprises a wide bandgap semiconductor material and the gate comprises a narrow bandgap semiconductor material. Mixtures of JFET and MOSFET transistors can be included on an integrated circuit design.

Abstract: In an embodiment, a integrated semiconductor device includes a first Vertical Junction Field Effect Transistor (VJFET) having a source, and a gate disposed on each side of the first VJFET source, and a second VJFET transistor having a source, and a gate disposed on each side of the second VJFET source. At least one gate of the first VJFET is separated from at least one gate of the second VJFET by a channel. The integrated semiconductor device also includes a Junction Barrier Schottky (JBS) diode positioned between the first and second VJFETs. The JBS diode comprises a metal contact that forms a rectifying contact to the channel and a non-rectifying contact to at least one gate of the first and second VJFETs, and the metal contact is an anode of the JBS diode.

Abstract: A method used during semiconductor device fabrication comprises forming at least two types of transistors. A first transistor type may comprise a CMOS transistor comprising gate oxide and having a wide active area and/or a long channel, and the second transistor type may comprise a NAND comprising tunnel oxide and having a narrow active area and/or short gate length. The transistors are exposed to a nitridation ambient which, due to their differences in sizing, results in nitridizing the tunnel oxide in its entirely but only partially nitridizing the gate oxide. Various process embodiments and completed structures are disclosed.

Abstract: A method for making a semiconductor device having non-volatile memory cell transistors and transistors of another type is provided. In the method, a substrate is provided having an NVM region, a high voltage (HV) region, and a low voltage (LV) region. The method includes forming a gate dielectric layer on the HV and LV regions. A tunnel oxide layer is formed over the substrate in the NVM region and the gate dielectric in the HV and LV regions. A first polysilicon layer is formed over the tunnel dielectric layer and gate dielectric layer. The first polysilicon layer is patterned to form NVM floating gates. An ONO layer is formed over the first polysilicon layer. A single etch removal step is used to form gates for the HV transistors from the first polysilicon layer while removing the first polysilicon layer from the LV region.

Abstract: An IGBT is disclosed which has a set of inside trenches and an outside trench formed in its semiconductor substrate. The substrate has emitter regions adjacent the trenches, a p-type base region adjacent the emitter regions and trenches, and an n-type base region comprising a first and a second subregion contiguous to each other. The first subregion of the n-type base region is contiguous to the inside trenches whereas the second subregion, less in impurity concentration than the first, is disposed adjacent the outside trench. Breakdown is easier to occur than heretofore adjacent the inside trenches, saving the device from destruction through mitigation of a concentrated current flow adjacent the outside trench.

Abstract: A monolithic integrated circuit fabricated on a semiconductor die includes a control circuit and a first output transistor having segments substantially equal to a first length. A second output transistor has segments substantially equal to a second length. The first and second output transistors occupy an L-shaped area of the semiconductor die, the L-shaped area having first and second inner sides that are respectively disposed adjacent first and second sides of the control circuit. At least one of the first and second output transistors is coupled to the control circuit. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract: A field-effect transistor and a method for manufacturing a field-effect transistor is disclosed. One embodiment includes a substrate having a surface along which a trench is implemented, wherein the trench has a trench bottom and a trench edge. A source area is implemented at the trench edge and a gate electrode at least partially implemented in the trench and separated from the substrate by an insulation layer. The field-effect transistor includes a drain electrode at a side of the substrate facing away from the surface. An additional electrode is implemented between the gate electrode and the trench bottom and electrically insulated from the substrate and an electrical connection between the additional electrode and the gate electrode, wherein the electrical connection has a predetermined ohmic resistance value.

Abstract: A capacitor-less memory cell, memory device, system and process of forming the capacitor-less memory cell includes forming the memory cell in an active area of a substantially physically isolated portion of the bulk semiconductor substrate. A pass transistor is formed on the active area for coupling with a word line. The capacitor-less memory cell further includes a read/write enable transistor vertically configured along at least one vertical side of the active area and operable during a reading of a logic state with the logic state being stored as charge in a floating body area of the active area, causing different determinable threshold voltages for the pass transistor.

Abstract: Some embodiments include methods of forming voids within semiconductor constructions. In some embodiments the voids may be utilized as microstructures for distributing coolant, for guiding electromagnetic radiation, or for separation and/or characterization of materials. Some embodiments include constructions having micro-structures therein which correspond to voids, conduits, insulative structures, semiconductor structures or conductive structures.

Abstract: In a semiconductor device, a first p-type MIS transistor includes: a first gate insulating film formed on a first active region; a first gate electrode formed on the first gate insulating film; a first side-wall insulating film; a first p-type source/drain region; a first contact liner film formed over the first active region; a first interlayer insulating film formed on the first contact liner film; and a first contact plug formed to reach the top surface of the first source/drain region. The first contact liner film has a slit extending, around a corner at which the side surface of the first side-wall insulating film intersects the top surface of the first active region, from the top surface of the first contact liner film toward the corner.

Abstract: Monolithic electronic devices including a common nitride epitaxial layer are provided. A first type of nitride device is provided on the common nitride epitaxial layer including a first at least one implanted n-type region on the common nitride epitaxial layer. The first at least one implanted n-type region has a first doping concentration greater than a doping concentration of the common nitride epitaxial layer. A second type of nitride device, different from the first type of nitride device, including a second at least one implanted n-type region is provided on the common nitride epitaxial layer. The second at least one implanted n-type region is different from the first at least one implanted n-type region and has a second doping concentration that is greater than the doping concentration of the common nitride epitaxial layer. A first plurality of electrical contacts are provided on the first at least one implanted n-type region.

Abstract: The invention relates to a laminated layer structure that includes a substrate and a stack of a plurality of layers of a material that includes at least two compounds A and B, wherein compound A has a crystalline structure being sufficient to allow a homo- or heteroepitaxial growth of compound A on the substrate, and wherein at least a part of the layers of the stack have a gradient composition AxB(1-xg), with x being a composition parameter within the range of 0 and 1 and with the composition parameter (1-xg) increasing gradually, in particular linearly, over the thickness of the corresponding layer. In order to improve the quality of the laminated layer structure with respect to the surface roughness and dislocation density, the composition parameter at the interface between the layer in the stack with the gradient composition and the subsequent layer in the stack is chosen to be smaller than the composition parameter (1-xg) of the layer with a gradient composition.

Abstract: A semiconductor integrated circuit relating to one aspect of the present invention includes a power transistor, at least one or more of first metal patterns functioning as a first electrode of the power transistor and at least one or more of second metal patterns functioning as a second electrode of the power transistor formed in an interlayer insulation film on the transistor, at least one or more of first busses electrically connected to a corresponding first metal pattern of the at least one or more of the first metal patterns, a single second bus electrically connected to the at least one or more of second metal patterns, and a contact pad provided to each of the at least one or more of first busses and the single second bus.

Abstract: Embodiments of the invention provide a semiconductor integrated circuit device and a method for fabricating the device. The semiconductor device includes a semiconductor substrate having a cell region and a peripheral region, a cell active region formed in the cell region, and a peripheral active region formed in the peripheral region, wherein the cell active region and the peripheral active region are defined by isolation regions. The semiconductor device further includes a first gate stack formed on the cell active region, a second gate stack formed on the peripheral active region, a cell epitaxial layer formed on an exposed portion of the cell active region, and a peripheral epitaxial layer formed on an exposed portion of the peripheral active region, wherein the height of the peripheral epitaxial layer is greater than the height of the cell epitaxial layer.

Abstract: A method for improved manufacturing stability of transistors having silicide layers is provided. A gate electrode 105 and a side wall insulating film that covers a side surface of the gate electrode are formed over the device-forming surface of a silicon substrate 101. A source/drain region 109 is formed in a periphery of the gate electrode 105 on the silicon substrate 101. A Ni film 115 is formed on the entire device-forming surface of the silicon substrate 101 that is provided with a side wall 107 formed thereon, and then, a reaction of the silicon substrate 101 with the Ni film 115 on the source/drain region 109 by heating the silicon substrate 101. Thereafter, unreacted portions of the Ni film 115 are removed, and then a Ni silicide layer 111 is formed on the source/drain region 109.

Abstract: Including a process for forming a fin 12a having a first height and a fin 12b having a second height lower than the first height, a process for forming a silicon oxide film on the upper and side faces of each of the fins 12a and 12b, a process for forming a conductive poly silicon film on the silicon oxide film, a process for forming a gate insulating film 15 and a gate electrode 16 on from the upper face to the side face of each of the fins 12a and 12b by patterning the silicon oxide film and the poly silicon film, and a process for forming a couple of diffusion regions 14 in two regions clipping a region underneath the gate electrode of each of the fins 12a and 12b. According to the present invention, a semiconductor device manufacturing method and a semiconductor device including a fin-type FET having capability of changing the design of the gate width corresponding to an application can be realized.

Abstract: Accordingly, in one embodiment of the invention, a method is provided for reducing stacking faults in an epitaxial semiconductor layer. In accordance with such method, a substrate is provided which includes a first single-crystal semiconductor region including a first semiconductor material, the first semiconductor region having a <110> crystal orientation. An epitaxial layer including the first semiconductor material is grown on the first semiconductor region, the epitaxial layer having the <110> crystal orientation. The substrate is then annealed with the epitaxial layer at a temperature greater than 1100 degrees Celsius in an ambient including hydrogen, whereby the step of annealing reduces stacking faults in the epitaxial layer.

Abstract: A semiconductor device includes unlined and sealed trenches and methods for forming the unlined and sealed trenches. More particularly, a superjunction semiconductor device includes unlined, and sealed trenches. The trench has sidewalls formed of the semiconductor material. The trench is sealed with a sealing material such that the trench is air-tight. First and second regions are separated by the trench. The first region may include a superjunction Schottky diode or MOSFET. In an alternative embodiment, a plurality of regions are separated by a plurality of unlined and sealed trenches.

Abstract: ON resistance and leakage current of a vertical power MOSFET are to be diminished. In a vertical high breakdown voltage MOSFET with unit MOSFETs (cells) arranged longitudinally and transversely over a main surface of a semiconductor substrate, the cells are made quadrangular in shape, and in each of the cells, source regions whose inner end portions are exposed to the interior of a quadrangular source contact hole are arranged separately and correspondingly to each side of the quadrangle. Each source region is trapezoidal in shape, and a lower side of the trapezoid is positioned below a gate electrode (gate insulating film), while an upper side portion of the trapezoid is exposed to the interior of the source contact hole. The four source regions are separated from one another by diagonal regions of the quadrangle.

Abstract: A nonvolatile semiconductor memory device includes a semiconductor substrate, plural semiconductor columns arranged in a matrix form on the substrate, plural first conductive areas zonally formed in a column direction on the substrate between the semiconductor columns and functioning as word lines, plural second conductive areas formed at tops of the semiconductor columns, respectively, plural bit lines connecting the second conductive areas in a row direction, plural channel areas respectively formed in the semiconductor columns between the first and second conductive areas and contacting the first and second conductive areas, plural third conductive areas continuously formed via first insulating films above the substrate and opposite to the channel areas in the column direction between the semiconductor columns and functioning as control gates, and plural charge accumulation areas respectively formed via second insulating films at upper portions of the channel areas at a position higher than the third condu

Abstract: The invention provides a method of forming a charge electrode array for a binary continuous inkjet printer, the method including forming the charge electrodes and the driver circuitry for the charge electrodes using common process steps. The process steps are preferably those associated with polycrystalline silicon thin-film transistor technology. The invention further provides a charge electrode array for a binary continuous inkjet printer when formed according to the inventive method. Such an array may not only be formed integrally with the driver electronics, but also with a phase detector, a deflector, and a velocity detector.

Abstract: A method of manufacturing a semiconductor device provides a semiconductor substrate with a gate and a number of source/drain regions on the semiconductor substrate. A layer containing a strain-inducing element is provided over the number of source/drain regions. The strain-inducing element is driven from the layer containing a strain-inducing element into the number of source/drain regions. A number of source/drains is formed in the number of source/drain regions.