Susceptor shaft

- ASM IP Holding B.V.
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Description

FIG. 1 is a front perspective view of a susceptor shaft showing our new design;

FIG. 2 is a back perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a back view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a top view thereof; and,

FIG. 8 is a bottom view thereof.

Claims

The ornamental design for a susceptor shaft, as shown and described.

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Patent History
Patent number: D975665
Type: Grant
Filed: Sep 4, 2019
Date of Patent: Jan 17, 2023
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Aniket Patil (Tempe, AZ), Sam Kim (Chandler, AZ)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/704,408